CA2572485A1 - Sensor for detecting and/or measuring concentration of electric charges contained in an atmosphere, corresponding uses and method for making same - Google Patents

Sensor for detecting and/or measuring concentration of electric charges contained in an atmosphere, corresponding uses and method for making same Download PDF

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Publication number
CA2572485A1
CA2572485A1 CA002572485A CA2572485A CA2572485A1 CA 2572485 A1 CA2572485 A1 CA 2572485A1 CA 002572485 A CA002572485 A CA 002572485A CA 2572485 A CA2572485 A CA 2572485A CA 2572485 A1 CA2572485 A1 CA 2572485A1
Authority
CA
Canada
Prior art keywords
sensor
environment
air gap
measuring
contained
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002572485A
Other languages
English (en)
French (fr)
Inventor
Tayeb Mohammed-Brahim
Anne-Claire Salaun
France Le Bihan
Hicham Kotb
Farida Bendriaa
Olivier Bonnaud
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite de Rennes 1
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2572485A1 publication Critical patent/CA2572485A1/fr
Abandoned legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4141—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases
    • G01N27/4143—Air gap between gate and channel, i.e. suspended gate [SG] FETs

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
CA002572485A 2004-07-07 2005-07-07 Sensor for detecting and/or measuring concentration of electric charges contained in an atmosphere, corresponding uses and method for making same Abandoned CA2572485A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0407583A FR2872914B1 (fr) 2004-07-07 2004-07-07 Capteur pour la detection et/ou la mesure d'une concentration de charges electriques contenues dans une ambiance, utilisations et procede de fabrication correspondants
FR0407583 2004-07-07
PCT/FR2005/001761 WO2006013289A1 (fr) 2004-07-07 2005-07-07 Capteur pour la détection et/ou la mesure d'une concentration de charges électriques contenues dans une ambiance, utilisations et procédé de fabrication correspondants.

Publications (1)

Publication Number Publication Date
CA2572485A1 true CA2572485A1 (fr) 2006-02-09

Family

ID=34947923

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002572485A Abandoned CA2572485A1 (fr) 2004-07-07 2005-07-07 Sensor for detecting and/or measuring concentration of electric charges contained in an atmosphere, corresponding uses and method for making same

Country Status (9)

Country Link
US (1) US20080134759A1 (https=)
EP (1) EP1774307A1 (https=)
JP (1) JP2008506099A (https=)
CN (1) CN101048656A (https=)
CA (1) CA2572485A1 (https=)
FR (1) FR2872914B1 (https=)
IL (1) IL180496A0 (https=)
RU (1) RU2398222C2 (https=)
WO (1) WO2006013289A1 (https=)

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FR2934683B1 (fr) * 2008-07-31 2012-11-16 Mhs Electronics Capteur biologique a transistor a effet de champ.
US8373206B2 (en) * 2010-07-20 2013-02-12 Nth Tech Corporation Biosensor apparatuses and methods thereof
DE102011083644A1 (de) * 2011-09-28 2013-03-28 Robert Bosch Gmbh Mikromechanische Sensorvorrichtung mit beweglichem Gate und entsprechendes Herstellungsverfahren
DE102012211460A1 (de) * 2012-07-03 2014-01-09 Robert Bosch Gmbh Gassensor und Verfahren zum Herstellen eines solchen
US9599586B2 (en) * 2012-08-27 2017-03-21 Infineon Technologies Ag Ion sensor
WO2014059080A1 (en) * 2012-10-12 2014-04-17 Texas State University-San Marcos A vertically movable gate field effect transistor (vmgfet) on a silicon-on-insulator (soi) wafer and method of forming a vmgfet
US9170165B2 (en) * 2013-03-25 2015-10-27 Globalfoundries U.S. 2 Llc Workfunction modulation-based sensor to measure pressure and temperature
KR101616959B1 (ko) * 2013-07-02 2016-04-29 전자부품연구원 Fet 이온센서 및 이를 이용한 시스템
GB2523173A (en) 2014-02-17 2015-08-19 Nokia Technologies Oy An apparatus and associated methods
DE102014115980B4 (de) 2014-11-03 2022-06-23 Infineon Technologies Ag Gerät zum Analysieren der Ionenkinetik in Dielektrika
CN105301079B (zh) * 2015-10-13 2019-10-15 上海小海龟科技有限公司 用于待测物离子活度检测的半导体器件及其检测方法
CN105353000B (zh) * 2015-10-14 2019-04-19 深圳市共进电子股份有限公司 半导体器件及其检测方法
DE102016209360A1 (de) 2016-05-31 2017-11-30 Continental Automotive Gmbh Verfahren, Vorrichtung zum Betreiben eines Stickoxidsensors, Computerprogramm und Computerprogrammprodukt
TWI648864B (zh) * 2017-09-26 2019-01-21 國立清華大學 感測裝置及離子檢測方法
RU2675667C1 (ru) * 2017-12-18 2018-12-21 Общество с ограниченной ответственностью "Технологии Печатной Электроники" (ООО "ПРИНТЭЛТЕХ") Способ селективного определения концентрации газообразных меркаптосодержащих и/или аминосодержащих соединений при помощи газового сенсора на основе органического полевого транзистора и устройство для селективного определения концентрации газообразных меркаптосодержащих и/или аминосодержащих соединений
US20240230747A1 (en) * 2021-06-01 2024-07-11 Eltek S.P.A. Sensor device for monitoring the dielectric strength of a dielectric fluid, in particular a fluid for the thermal conditioning of a battery
CN113203898B (zh) * 2021-07-05 2021-09-14 北京科技大学 一种用于离子化空气中的非接触表面电位测试方法
US12449395B2 (en) 2022-03-14 2025-10-21 Saudi Arabian Oil Company System and method for real-time drilling fluids pH measuring utilizing electrolyte insulator semiconductor field-effect sensors
KR102811340B1 (ko) * 2022-06-15 2025-05-21 스웨센시 에이비 Fet 가스 센서 장치

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US4020830A (en) * 1975-03-12 1977-05-03 The University Of Utah Selective chemical sensitive FET transducers
CA1148279A (en) * 1979-12-14 1983-06-14 Andreas Scheidweiler Ionization smoke detector with increased operational reliability
US4514263A (en) * 1982-01-12 1985-04-30 University Of Utah Apparatus and method for measuring the concentration of components in fluids
US4411741A (en) * 1982-01-12 1983-10-25 University Of Utah Apparatus and method for measuring the concentration of components in fluids
GB8416994D0 (en) * 1984-07-04 1984-08-08 Emi Ltd Gas sensor
JPS6133645A (ja) * 1984-07-25 1986-02-17 住友電気工業株式会社 生体用センサ−
US4671852A (en) * 1986-05-07 1987-06-09 The Standard Oil Company Method of forming suspended gate, chemically sensitive field-effect transistor
DE3834189C1 (de) * 1988-10-07 1990-02-15 Ignaz Eisele Nicht-elektrochemische Herstellung von chemisch selektiven Schichten in Feldeffekttransistoren mit frei hängendem Gate
JPH0368857A (ja) * 1989-08-09 1991-03-25 Terumo Corp Ｉｓｆｅｔセンサ及びその製造方法
US5693545A (en) * 1996-02-28 1997-12-02 Motorola, Inc. Method for forming a semiconductor sensor FET device
US5683569A (en) * 1996-02-28 1997-11-04 Motorola, Inc. Method of sensing a chemical and sensor therefor
DE19849932A1 (de) * 1998-10-29 2000-05-11 Siemens Ag Gasdetektion nach dem Prinzip einer Messung von Austrittsarbeiten
DE19956303A1 (de) * 1999-11-23 2001-06-07 Siemens Ag Brandmelder mit Gassensoren
JP4467022B2 (ja) * 2000-03-31 2010-05-26 フィガロ技研株式会社 ガスセンサ
RU2188411C1 (ru) * 2001-06-13 2002-08-27 Тамбовский государственный технический университет Способ измерения активности ионов в растворах и устройство для его осуществления

Also Published As

Publication number Publication date
RU2007101659A (ru) 2008-08-20
EP1774307A1 (fr) 2007-04-18
IL180496A0 (en) 2007-06-03
FR2872914A1 (fr) 2006-01-13
JP2008506099A (ja) 2008-02-28
US20080134759A1 (en) 2008-06-12
WO2006013289A1 (fr) 2006-02-09
FR2872914B1 (fr) 2006-10-13
CN101048656A (zh) 2007-10-03
RU2398222C2 (ru) 2010-08-27

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Legal Events

Date Code Title Description
EEER Examination request
FZDE Discontinued

Effective date: 20140708