CA2392378A1 - X-ray zoom lens - Google Patents

X-ray zoom lens Download PDF

Info

Publication number
CA2392378A1
CA2392378A1 CA002392378A CA2392378A CA2392378A1 CA 2392378 A1 CA2392378 A1 CA 2392378A1 CA 002392378 A CA002392378 A CA 002392378A CA 2392378 A CA2392378 A CA 2392378A CA 2392378 A1 CA2392378 A1 CA 2392378A1
Authority
CA
Canada
Prior art keywords
plate
ray
rays
optical array
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002392378A
Other languages
English (en)
French (fr)
Inventor
Alan George Michette
Philip Doughty Prewett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BTG International Ltd
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB9927631.3A external-priority patent/GB9927631D0/en
Priority claimed from GB0018332A external-priority patent/GB0018332D0/en
Application filed by Individual filed Critical Individual
Publication of CA2392378A1 publication Critical patent/CA2392378A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CA002392378A 1999-11-24 2000-11-24 X-ray zoom lens Abandoned CA2392378A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GB9927631.3 1999-11-24
GBGB9927631.3A GB9927631D0 (en) 1999-11-24 1999-11-24 X-ray imaging
GB0018332.7 2000-07-26
GB0018332A GB0018332D0 (en) 2000-07-26 2000-07-26 X ray zoom
PCT/GB2000/004494 WO2001039210A1 (en) 1999-11-24 2000-11-24 X-ray zoom lens

Publications (1)

Publication Number Publication Date
CA2392378A1 true CA2392378A1 (en) 2001-05-31

Family

ID=26244727

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002392378A Abandoned CA2392378A1 (en) 1999-11-24 2000-11-24 X-ray zoom lens

Country Status (7)

Country Link
EP (1) EP1243002A1 (zh)
JP (1) JP2003515728A (zh)
CN (1) CN1391697A (zh)
AU (1) AU1536901A (zh)
CA (1) CA2392378A1 (zh)
HK (1) HK1052793A1 (zh)
WO (1) WO2001039210A1 (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE520527C2 (sv) * 2002-04-30 2003-07-22 Arcoma Ab Rasterhållaranordning, samt röntgendiagnostiksystem innefattande sådan
WO2007003359A1 (de) * 2005-07-01 2007-01-11 Carl Zeiss Smt Ag Kollektoreinheit für ein beleuchtungssystem mit wellenlängen ≤ 193 nm
JP4814782B2 (ja) * 2006-12-28 2011-11-16 株式会社ジェイテック 位相回復法を用いたｘ線集光方法及びその装置
JP5540305B2 (ja) * 2008-10-01 2014-07-02 独立行政法人 宇宙航空研究開発機構 Ｘ線反射装置及びその製造方法
JP6172433B2 (ja) * 2013-01-29 2017-08-02 国立研究開発法人産業技術総合研究所 Ｘ線反射装置及びその製造方法
US10859518B2 (en) * 2017-01-03 2020-12-08 Kla-Tencor Corporation X-ray zoom lens for small angle x-ray scatterometry

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4017730A (en) * 1974-05-01 1977-04-12 Raytheon Company Radiographic imaging system for high energy radiation
NL8800679A (nl) * 1988-03-18 1989-10-16 Philips Nv Roentgenonderzoekapparaat met een strooistralenrooster met antivignetterende werking.
US5004319A (en) * 1988-12-29 1991-04-02 The United States Of America As Represented By The Department Of Energy Crystal diffraction lens with variable focal length
DE4119729C2 (de) * 1991-06-14 1994-08-18 Max Planck Gesellschaft Einrichtung zum Erzeugen kurzwelliger elektromagnetischer Strahlung
US5291539A (en) * 1992-10-19 1994-03-01 General Electric Company Variable focussed X-ray grid
JPH06258497A (ja) * 1993-03-08 1994-09-16 Aloka Co Ltd 曲率可変湾曲結晶モノクロメータ
JPH11162807A (ja) * 1997-11-25 1999-06-18 Nec Corp Ｘ線露光装置の倍率補正方法及びその装置

Also Published As

Publication number Publication date
CN1391697A (zh) 2003-01-15
AU1536901A (en) 2001-06-04
HK1052793A1 (zh) 2003-09-26
JP2003515728A (ja) 2003-05-07
WO2001039210A1 (en) 2001-05-31
EP1243002A1 (en) 2002-09-25

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Legal Events

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