HK1052793A1 - X射線變焦鏡頭 - Google Patents

X射線變焦鏡頭

Info

Publication number
HK1052793A1
HK1052793A1 HK03105083.4A HK03105083A HK1052793A1 HK 1052793 A1 HK1052793 A1 HK 1052793A1 HK 03105083 A HK03105083 A HK 03105083A HK 1052793 A1 HK1052793 A1 HK 1052793A1
Authority
HK
Hong Kong
Prior art keywords
zoom lens
ray zoom
ray
lens
zoom
Prior art date
Application number
HK03105083.4A
Other languages
English (en)
Inventor
George Michette Alan
Doughty Prewett Philip
Original Assignee
英國技術集團國際有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB9927631.3A external-priority patent/GB9927631D0/en
Priority claimed from GB0018332A external-priority patent/GB0018332D0/en
Application filed by 英國技術集團國際有限公司 filed Critical 英國技術集團國際有限公司
Publication of HK1052793A1 publication Critical patent/HK1052793A1/zh

Links

Classifications

    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
HK03105083.4A 1999-11-24 2003-07-14 X射線變焦鏡頭 HK1052793A1 (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB9927631.3A GB9927631D0 (en) 1999-11-24 1999-11-24 X-ray imaging
GB0018332A GB0018332D0 (en) 2000-07-26 2000-07-26 X ray zoom
PCT/GB2000/004494 WO2001039210A1 (en) 1999-11-24 2000-11-24 X-ray zoom lens

Publications (1)

Publication Number Publication Date
HK1052793A1 true HK1052793A1 (zh) 2003-09-26

Family

ID=26244727

Family Applications (1)

Application Number Title Priority Date Filing Date
HK03105083.4A HK1052793A1 (zh) 1999-11-24 2003-07-14 X射線變焦鏡頭

Country Status (7)

Country Link
EP (1) EP1243002A1 (zh)
JP (1) JP2003515728A (zh)
CN (1) CN1391697A (zh)
AU (1) AU1536901A (zh)
CA (1) CA2392378A1 (zh)
HK (1) HK1052793A1 (zh)
WO (1) WO2001039210A1 (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE520527C2 (sv) 2002-04-30 2003-07-22 Arcoma Ab Rasterhållaranordning, samt röntgendiagnostiksystem innefattande sådan
WO2007003359A1 (de) * 2005-07-01 2007-01-11 Carl Zeiss Smt Ag Kollektoreinheit für ein beleuchtungssystem mit wellenlängen ≤ 193 nm
JP4814782B2 (ja) * 2006-12-28 2011-11-16 株式会社ジェイテック 位相回復法を用いたx線集光方法及びその装置
JP5540305B2 (ja) * 2008-10-01 2014-07-02 独立行政法人 宇宙航空研究開発機構 X線反射装置及びその製造方法
JP6172433B2 (ja) * 2013-01-29 2017-08-02 国立研究開発法人産業技術総合研究所 X線反射装置及びその製造方法
US10859518B2 (en) * 2017-01-03 2020-12-08 Kla-Tencor Corporation X-ray zoom lens for small angle x-ray scatterometry

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4017730A (en) * 1974-05-01 1977-04-12 Raytheon Company Radiographic imaging system for high energy radiation
NL8800679A (nl) * 1988-03-18 1989-10-16 Philips Nv Roentgenonderzoekapparaat met een strooistralenrooster met antivignetterende werking.
US5004319A (en) * 1988-12-29 1991-04-02 The United States Of America As Represented By The Department Of Energy Crystal diffraction lens with variable focal length
DE4119729C2 (de) * 1991-06-14 1994-08-18 Max Planck Gesellschaft Einrichtung zum Erzeugen kurzwelliger elektromagnetischer Strahlung
US5291539A (en) * 1992-10-19 1994-03-01 General Electric Company Variable focussed X-ray grid
JPH06258497A (ja) * 1993-03-08 1994-09-16 Aloka Co Ltd 曲率可変湾曲結晶モノクロメータ
JPH11162807A (ja) * 1997-11-25 1999-06-18 Nec Corp X線露光装置の倍率補正方法及びその装置

Also Published As

Publication number Publication date
WO2001039210A1 (en) 2001-05-31
JP2003515728A (ja) 2003-05-07
EP1243002A1 (en) 2002-09-25
CA2392378A1 (en) 2001-05-31
AU1536901A (en) 2001-06-04
CN1391697A (zh) 2003-01-15

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