CA2384959C - Dispositif et procede de decouplage de lumiere en fonction de la longueur d'onde - Google Patents

Dispositif et procede de decouplage de lumiere en fonction de la longueur d'onde Download PDF

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Publication number
CA2384959C
CA2384959C CA2384959A CA2384959A CA2384959C CA 2384959 C CA2384959 C CA 2384959C CA 2384959 A CA2384959 A CA 2384959A CA 2384959 A CA2384959 A CA 2384959A CA 2384959 C CA2384959 C CA 2384959C
Authority
CA
Canada
Prior art keywords
lamp
mirror
mirror layer
spectral portion
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA2384959A
Other languages
English (en)
Other versions
CA2384959A1 (fr
Inventor
Stefan Eggers
Claas Andreae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
XSYS Prepress NV
Original Assignee
Punch Graphix Prepress Germany GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Punch Graphix Prepress Germany GmbH filed Critical Punch Graphix Prepress Germany GmbH
Publication of CA2384959A1 publication Critical patent/CA2384959A1/fr
Application granted granted Critical
Publication of CA2384959C publication Critical patent/CA2384959C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/108—Beam splitting or combining systems for sampling a portion of a beam or combining a small beam in a larger one, e.g. wherein the area ratio or power ratio of the divided beams significantly differs from unity, without spectral selectivity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/145—Beam splitting or combining systems operating by reflection only having sequential partially reflecting surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Projection-Type Copiers In General (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Lasers (AREA)

Abstract

L'invention concerne un dispositif d'éclairage, en particulier pour le découplage de lumière en fonction de la longueur d'onde, selon lequel au moins une couche miroir (7), de préférence fonction de la longueur d'onde, est disposée à l'intérieur du parcours du faisceau d'éclairage d'une lampe (1), en vue du découpage du faisceau en une composante utile pour l'éclairage et en une composante spectrale libre. L'invention a pour but d'obtenir un dispositif d'éclairage et un procédé permettant d'optimiser la qualité de l'éclairage en ayant recours à des moyens simples. Ce but est atteint grâce au fait qu'on dispose sur le parcours du faisceau de la composante spectrale libre, un miroir (16) au moyen duquel la région spectrale libre est réfléchie en direction d'une couche miroir et une partie de celle-ci est projetée sur un écran à visionner (19) en vue de l'ajustement.
CA2384959A 1999-09-17 2000-08-11 Dispositif et procede de decouplage de lumiere en fonction de la longueur d'onde Expired - Fee Related CA2384959C (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19944761A DE19944761A1 (de) 1999-09-17 1999-09-17 Vorrichtung und Verfahren zur wellenlängenabhängigen Lichtauskupplung
DE19944761.6 1999-09-17
PCT/EP2000/007841 WO2001022168A1 (fr) 1999-09-17 2000-08-11 Dispositif et procede de decouplage de lumiere en fonction de la longueur d'onde

Publications (2)

Publication Number Publication Date
CA2384959A1 CA2384959A1 (fr) 2001-03-29
CA2384959C true CA2384959C (fr) 2010-04-13

Family

ID=7922468

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2384959A Expired - Fee Related CA2384959C (fr) 1999-09-17 2000-08-11 Dispositif et procede de decouplage de lumiere en fonction de la longueur d'onde

Country Status (8)

Country Link
US (1) US6768127B1 (fr)
EP (1) EP1212660B1 (fr)
JP (1) JP4605964B2 (fr)
AT (1) ATE237832T1 (fr)
CA (1) CA2384959C (fr)
DE (2) DE19944761A1 (fr)
ES (1) ES2199854T3 (fr)
WO (1) WO2001022168A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7149033B2 (en) * 2004-10-28 2006-12-12 Ocean Optics, Inc. UV visual light beam combiner
US20100230593A1 (en) 2009-03-16 2010-09-16 Southwest Research Institute Compact handheld non-laser detector for greenhouse gasses
US8085301B2 (en) * 2009-03-16 2011-12-27 Southwest Research Institute Compact handheld detector for greenhouse gasses
WO2018131582A1 (fr) * 2017-01-10 2018-07-19 ウシオ電機株式会社 Dispositif de stérilisation par ultraviolets

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2634241A1 (de) * 1975-10-06 1977-04-14 Ibm Hochwirksames beleuchtungssystem
US5001038A (en) * 1987-11-16 1991-03-19 Motorola, Inc. Process for photoimaging a three dimensional printed circuit substrate
JPH01115236U (fr) * 1988-01-29 1989-08-03
JPH0322518A (ja) * 1989-06-20 1991-01-30 Nikon Corp 照明光学装置
US5537168A (en) * 1991-04-26 1996-07-16 Canon Kabushiki Kaisha Projection optical apparatus comprising automatic adjustment unit
DE4128439A1 (de) * 1991-08-27 1993-03-04 Huf Hans Joachim Dr Geraet zum kontaktbelichten von lichtempfindlichem material
US5206515A (en) * 1991-08-29 1993-04-27 Elliott David J Deep ultraviolet photolithography and microfabrication
US5298939A (en) * 1991-11-04 1994-03-29 Swanson Paul A Method and apparatus for transfer of a reticle pattern onto a substrate by scanning
JPH05217844A (ja) * 1992-01-30 1993-08-27 Matsushita Electric Ind Co Ltd 投影露光装置
JP3275575B2 (ja) * 1993-10-27 2002-04-15 キヤノン株式会社 投影露光装置及び該投影露光装置を用いたデバイスの製造方法
DE19631367C1 (de) 1996-08-02 1997-11-13 Roland Dr Diehl Verfahren zur röntgenographischen Identifizierung von geschliffenen Diamanten
JP3610175B2 (ja) * 1996-10-29 2005-01-12 キヤノン株式会社 投影露光装置及びそれを用いた半導体デバイスの製造方法
DE19723170A1 (de) * 1997-06-03 1998-12-10 Heidelberger Druckmasch Ag Verfahren und Vorrichtung zur Beseitigung von Licht
JPH11102074A (ja) * 1997-09-25 1999-04-13 Nikon Corp 照明光学系及び照明光学系を有する投影露光装置
JP4492772B2 (ja) * 1998-12-11 2010-06-30 パンチ グラフィックス プリプレス ジャーマニー ゲーエムベーハー 露光装置

Also Published As

Publication number Publication date
JP4605964B2 (ja) 2011-01-05
DE50001816D1 (de) 2003-05-22
WO2001022168A1 (fr) 2001-03-29
CA2384959A1 (fr) 2001-03-29
ATE237832T1 (de) 2003-05-15
EP1212660A1 (fr) 2002-06-12
US6768127B1 (en) 2004-07-27
JP2003510638A (ja) 2003-03-18
ES2199854T3 (es) 2004-03-01
EP1212660B1 (fr) 2003-04-16
DE19944761A1 (de) 2001-03-22

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Effective date: 20180813