CA2308015A1 - Method for manufacturing carbon nanotubes as functional elements of mems devices - Google Patents

Method for manufacturing carbon nanotubes as functional elements of mems devices Download PDF

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Publication number
CA2308015A1
CA2308015A1 CA002308015A CA2308015A CA2308015A1 CA 2308015 A1 CA2308015 A1 CA 2308015A1 CA 002308015 A CA002308015 A CA 002308015A CA 2308015 A CA2308015 A CA 2308015A CA 2308015 A1 CA2308015 A1 CA 2308015A1
Authority
CA
Canada
Prior art keywords
retaining structure
nanotube
catalyst retaining
nanosize
mems substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002308015A
Other languages
English (en)
French (fr)
Inventor
Vladimir Mancevski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xidex Corp
Original Assignee
Xidex Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2000572903A priority Critical patent/JP2002526354A/ja
Priority to EP99949896A priority patent/EP1135792A4/en
Priority to AU62672/99A priority patent/AU6267299A/en
Priority to US09/407,394 priority patent/US6146227A/en
Priority to PCT/US1999/022334 priority patent/WO2000019494A1/en
Application filed by Xidex Corp filed Critical Xidex Corp
Priority to CA002308015A priority patent/CA2308015A1/en
Publication of CA2308015A1 publication Critical patent/CA2308015A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • G01Q70/12—Nanotube tips
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C23/00—Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Micromachines (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
CA002308015A 1998-09-28 2000-05-11 Method for manufacturing carbon nanotubes as functional elements of mems devices Abandoned CA2308015A1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2000572903A JP2002526354A (ja) 1998-09-28 1999-09-28 Ｍｅｍｓデバイスの機能的要素としてのカーボンナノチューブを製造するための方法
EP99949896A EP1135792A4 (en) 1998-09-28 1999-09-28 METHOD FOR PRODUCING CARBON NANOROES AS FUNCTIONAL ELEMENTS OF MEMS COMPONENTS
AU62672/99A AU6267299A (en) 1998-09-28 1999-09-28 Method for manufacturing carbon nanotubes as functional elements of mems devices
US09/407,394 US6146227A (en) 1998-09-28 1999-09-28 Method for manufacturing carbon nanotubes as functional elements of MEMS devices
PCT/US1999/022334 WO2000019494A1 (en) 1998-09-28 1999-09-28 Method for manufacturing carbon nanotubes as functional elements of mems devices
CA002308015A CA2308015A1 (en) 1998-09-28 2000-05-11 Method for manufacturing carbon nanotubes as functional elements of mems devices

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10215998P 1998-09-28 1998-09-28
CA002308015A CA2308015A1 (en) 1998-09-28 2000-05-11 Method for manufacturing carbon nanotubes as functional elements of mems devices

Publications (1)

Publication Number Publication Date
CA2308015A1 true CA2308015A1 (en) 2001-11-11

Family

ID=25681792

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002308015A Abandoned CA2308015A1 (en) 1998-09-28 2000-05-11 Method for manufacturing carbon nanotubes as functional elements of mems devices

Country Status (5)

Country Link
EP (1) EP1135792A4 (ja)
JP (1) JP2002526354A (ja)
AU (1) AU6267299A (ja)
CA (1) CA2308015A1 (ja)
WO (1) WO2000019494A1 (ja)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003504857A (ja) 1999-07-02 2003-02-04 プレジデント・アンド・フェローズ・オブ・ハーバード・カレッジ ナノスコピックワイヤを用いる装置、アレイおよびその製造方法
US6495116B1 (en) 2000-04-10 2002-12-17 Lockheed Martin Corporation Net shape manufacturing using carbon nanotubes
US7129554B2 (en) 2000-12-11 2006-10-31 President & Fellows Of Harvard College Nanosensors
MXPA03001605A (es) 2000-08-22 2005-06-20 Harvard College Semiconductores alargado impurificados, desarrollo de tales semiconductores, dispositivos que los incluyen y fabricacion de dichos dispositivos.
GB0023983D0 (en) 2000-09-29 2000-11-15 Prolifix Ltd Therapeutic compounds
JP2002162335A (ja) * 2000-11-26 2002-06-07 Yoshikazu Nakayama 垂直式走査型顕微鏡用カンチレバー及びこれを使用した垂直式走査型顕微鏡用プローブ
JP2003090788A (ja) * 2001-09-19 2003-03-28 Olympus Optical Co Ltd Ｓｐｍカンチレバー及びその製造方法
AU2002348934A1 (en) * 2002-01-15 2003-07-30 International Business Machines Corporation Microstructures
WO2003076332A1 (fr) * 2002-03-08 2003-09-18 Communications Research Laboratory, Independent Administrative Institution Dispositif et procede pour la realisation d'un nanofil conducteur
JP2004202602A (ja) * 2002-12-24 2004-07-22 Sony Corp 微小構造体の製造方法、及び型材の製造方法
US7910064B2 (en) 2003-06-03 2011-03-22 Nanosys, Inc. Nanowire-based sensor configurations
JP4329014B2 (ja) * 2003-09-05 2009-09-09 ソニー株式会社 微細構造体の製造方法および微細構造体、表示装置、ならびに記録装置の製造方法および記録装置
FR2862156B1 (fr) 2003-11-06 2007-01-05 Commissariat Energie Atomique Dispositif d'enregistrement de donnees a micro-pointes conductrices et procede de fabrication d'un tel dispositif
JP4834957B2 (ja) * 2004-02-27 2011-12-14 住友電気工業株式会社 触媒構造体およびこれを用いたカーボンナノチューブの製造方法
JP4604563B2 (ja) * 2004-06-08 2011-01-05 住友電気工業株式会社 カーボンナノ構造体の製造方法
JP4360544B2 (ja) * 2004-06-16 2009-11-11 パイオニア株式会社 プローブ、並びに記録装置、再生装置及び記録再生装置
FR2876831B1 (fr) * 2004-10-15 2007-02-02 Commissariat Energie Atomique Dispositif d'enregistrement de donnees comportant des nanotubes de carbone inclines et procede de fabrication
JP2006125846A (ja) * 2004-10-26 2006-05-18 Olympus Corp カンチレバー
KR20070101857A (ko) 2004-12-06 2007-10-17 더 프레지던트 앤드 펠로우즈 오브 하바드 칼리지 나노스케일 와이어 기반 데이터 스토리지
DE502004003241D1 (de) 2004-12-14 2007-04-26 Nanoworld Ag Rasterkraftsonde mit einer EBD-Abtastspitze.
US20100227382A1 (en) 2005-05-25 2010-09-09 President And Fellows Of Harvard College Nanoscale sensors
WO2006132659A2 (en) 2005-06-06 2006-12-14 President And Fellows Of Harvard College Nanowire heterostructures
DE102005043974B4 (de) * 2005-09-15 2010-04-29 Team Nanotec Gmbh Mikromechanischer Abtastsensor
DE602007012248D1 (de) 2006-06-12 2011-03-10 Harvard College Nanosensoren und entsprechende technologien
WO2008033303A2 (en) 2006-09-11 2008-03-20 President And Fellows Of Harvard College Branched nanoscale wires
US8575663B2 (en) 2006-11-22 2013-11-05 President And Fellows Of Harvard College High-sensitivity nanoscale wire sensors
JP5269352B2 (ja) * 2007-06-08 2013-08-21 学校法人早稲田大学 単層カーボンナノチューブ製造方法、半導体配線構造の製造方法、フィールドエミッションディスプレイ用電子部品の製造方法及び探針製造方法
ATE516247T1 (de) * 2008-02-15 2011-07-15 Imec Synthese von zeolithkristallen und bildung von kohlenstoffnanostrukturen in gemusterten strukturen
KR101507129B1 (ko) * 2008-03-28 2015-03-31 서울바이오시스 주식회사 발광 다이오드 및 그 제조방법
US20120135158A1 (en) 2009-05-26 2012-05-31 Sharp Kabushiki Kaisha Methods and systems for electric field deposition of nanowires and other devices
US9297796B2 (en) 2009-09-24 2016-03-29 President And Fellows Of Harvard College Bent nanowires and related probing of species
US10006888B2 (en) * 2016-04-21 2018-06-26 The Boeing Company MEMS transducers in a phased array coupled to a flexible substrate using carbon nanotubes for conformal ultrasound scanning
EP3654075A1 (en) * 2018-11-13 2020-05-20 Koninklijke Philips N.V. Structured grating component, imaging system and manufacturing method

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4405768A1 (de) * 1994-02-23 1995-08-24 Till Keesmann Feldemissionskathodeneinrichtung und Verfahren zu ihrer Herstellung
US5697827A (en) * 1996-01-11 1997-12-16 Rabinowitz; Mario Emissive flat panel display with improved regenerative cathode
US6057637A (en) * 1996-09-13 2000-05-02 The Regents Of The University Of California Field emission electron source
JPH10203810A (ja) * 1997-01-21 1998-08-04 Canon Inc カーボンナノチューブの製法
WO1998039250A1 (en) * 1997-03-07 1998-09-11 William Marsh Rice University Carbon fibers formed from single-wall carbon nanotubes
JP3740295B2 (ja) * 1997-10-30 2006-02-01 キヤノン株式会社 カーボンナノチューブデバイス、その製造方法及び電子放出素子
JP3902883B2 (ja) * 1998-03-27 2007-04-11 キヤノン株式会社 ナノ構造体及びその製造方法

Also Published As

Publication number Publication date
EP1135792A1 (en) 2001-09-26
AU6267299A (en) 2000-04-17
JP2002526354A (ja) 2002-08-20
EP1135792A4 (en) 2005-06-08
WO2000019494A1 (en) 2000-04-06

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