CA1244641A - Continuous vacuum deposition apparatus with control panels for regulating width of vapor flow - Google Patents
Continuous vacuum deposition apparatus with control panels for regulating width of vapor flowInfo
- Publication number
- CA1244641A CA1244641A CA000490046A CA490046A CA1244641A CA 1244641 A CA1244641 A CA 1244641A CA 000490046 A CA000490046 A CA 000490046A CA 490046 A CA490046 A CA 490046A CA 1244641 A CA1244641 A CA 1244641A
- Authority
- CA
- Canada
- Prior art keywords
- vapor
- strip
- control panels
- vacuum deposition
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 33
- 230000001105 regulatory effect Effects 0.000 title description 6
- 229910052751 metal Inorganic materials 0.000 claims abstract description 40
- 239000002184 metal Substances 0.000 claims abstract description 40
- 239000011248 coating agent Substances 0.000 claims abstract description 17
- 238000000576 coating method Methods 0.000 claims abstract description 17
- 238000000151 deposition Methods 0.000 claims abstract description 17
- 230000008021 deposition Effects 0.000 claims abstract description 17
- 230000008020 evaporation Effects 0.000 claims description 20
- 238000001704 evaporation Methods 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 20
- 230000000694 effects Effects 0.000 description 6
- 229910000831 Steel Inorganic materials 0.000 description 3
- 230000008602 contraction Effects 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 230000008022 sublimation Effects 0.000 description 3
- 238000000859 sublimation Methods 0.000 description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Treatment Of Metals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP192575/84 | 1984-09-17 | ||
| JP59192575A JPS6173875A (ja) | 1984-09-17 | 1984-09-17 | 流路幅調整板付き真空蒸着装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1244641A true CA1244641A (en) | 1988-11-15 |
Family
ID=16293560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000490046A Expired CA1244641A (en) | 1984-09-17 | 1985-09-05 | Continuous vacuum deposition apparatus with control panels for regulating width of vapor flow |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4655168A (en, 2012) |
| EP (1) | EP0176852B1 (en, 2012) |
| JP (1) | JPS6173875A (en, 2012) |
| KR (1) | KR890002745B1 (en, 2012) |
| AU (1) | AU558389B2 (en, 2012) |
| CA (1) | CA1244641A (en, 2012) |
| DE (1) | DE3564593D1 (en, 2012) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0621348B2 (ja) * | 1986-07-22 | 1994-03-23 | 日新製鋼株式会社 | 合金化亜鉛メツキ鋼板とその製造法 |
| JPH0635656B2 (ja) * | 1986-10-03 | 1994-05-11 | 三菱重工業株式会社 | 真空蒸着装置 |
| KR920003591B1 (ko) * | 1988-04-11 | 1992-05-04 | 미쯔비시주우고오교오 가부시기가이샤 | 연속진공증착장치 |
| JPH0762239B2 (ja) * | 1990-09-28 | 1995-07-05 | 三菱重工業株式会社 | 真空蒸着装置 |
| TW340876B (en) * | 1996-03-27 | 1998-09-21 | Nisshin Steel Co Ltd | Method and apparatus for controlling the deposition amount of a plating metal as well as method and apparatus for measuring the amount of a metal vapor |
| TWI264473B (en) * | 2001-10-26 | 2006-10-21 | Matsushita Electric Works Ltd | Vacuum deposition device and vacuum deposition method |
| US7125587B2 (en) * | 2002-05-20 | 2006-10-24 | Varian Semiconductor Equipment Associates Inc. | Ion beam for enhancing optical properties of materials |
| SE527393C2 (sv) * | 2003-09-05 | 2006-02-21 | Sandvik Intellectual Property | Aluminiumbelagd bandprodukt av rostfritt stål för användning som offeranod |
| KR100795487B1 (ko) * | 2006-09-27 | 2008-01-16 | 주식회사 실트론 | 층류유동제어장치 및 이를 구비한 화학기상증착반응기 |
| EP2516694B1 (en) * | 2009-12-24 | 2018-02-21 | Posco | Strip passing apparatus and apparatus for treating surface of strip with the same |
| KR102622868B1 (ko) * | 2016-11-28 | 2024-01-08 | 엘지디스플레이 주식회사 | 열충격이 방지된 롤투롤 제조장치 |
| CN107034437B (zh) * | 2017-05-27 | 2024-01-30 | 郑州华晶新能源科技有限公司 | 一种宽度自适应铝金属蒸汽导流窗 |
| DE102020200366A1 (de) | 2019-04-23 | 2020-10-29 | Sms Group Gmbh | PVD Dickenregelung |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3394678A (en) * | 1966-12-23 | 1968-07-30 | Air Reduction | Apparatus for vacuum coating |
| US3627569A (en) * | 1968-12-27 | 1971-12-14 | Bell Telephone Labor Inc | Deposition of thin films with controlled thickness and planar area profile |
| US3989862A (en) * | 1970-10-13 | 1976-11-02 | Jones & Laughlin Steel Corporation | Method and apparatus for vapor-depositing coatings on substrates |
| US3735728A (en) * | 1971-12-01 | 1973-05-29 | Andvari Inc | Apparatus for continuous vacuum deposition |
| GB1596385A (en) * | 1976-12-29 | 1981-08-26 | Matsushita Electric Ind Co Ltd | Methods and apparatus for manufacturing magnetic recording media |
| JPS56163526A (en) * | 1980-05-20 | 1981-12-16 | Fuji Photo Film Co Ltd | Production of magnetic recording medium |
| DE3224234A1 (de) * | 1981-09-01 | 1983-03-10 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur herstellung von metallfreien streifen bei der metallbedampfung eines isolierstoffbandes und vorrichtung zur durchfuehrung des verfahrens |
| JPS6021377A (ja) * | 1983-07-15 | 1985-02-02 | Nisshin Steel Co Ltd | 付着量分布制御手段つき真空蒸着めつき装置 |
-
1984
- 1984-09-17 JP JP59192575A patent/JPS6173875A/ja active Granted
-
1985
- 1985-09-05 CA CA000490046A patent/CA1244641A/en not_active Expired
- 1985-09-10 US US06/774,290 patent/US4655168A/en not_active Expired - Lifetime
- 1985-09-11 AU AU47346/85A patent/AU558389B2/en not_active Ceased
- 1985-09-16 EP EP85111698A patent/EP0176852B1/en not_active Expired
- 1985-09-16 DE DE8585111698T patent/DE3564593D1/de not_active Expired
- 1985-09-17 KR KR1019850006779A patent/KR890002745B1/ko not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| AU4734685A (en) | 1986-03-27 |
| US4655168A (en) | 1987-04-07 |
| EP0176852B1 (en) | 1988-08-24 |
| KR890002745B1 (ko) | 1989-07-26 |
| JPH0136554B2 (en, 2012) | 1989-08-01 |
| KR860002590A (ko) | 1986-04-28 |
| AU558389B2 (en) | 1987-01-29 |
| DE3564593D1 (en) | 1988-09-29 |
| JPS6173875A (ja) | 1986-04-16 |
| EP0176852A1 (en) | 1986-04-09 |
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| CA1244641A (en) | Continuous vacuum deposition apparatus with control panels for regulating width of vapor flow | |
| FI59980B (fi) | Foerfarande och apparat foer belaeggning av planglas | |
| KR920003591B1 (ko) | 연속진공증착장치 | |
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| JPS633949B2 (en, 2012) | ||
| JPS63192858A (ja) | 連続式真空蒸着装置 | |
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| JPS6215632B2 (en, 2012) | ||
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |