JPS6215632B2 - - Google Patents

Info

Publication number
JPS6215632B2
JPS6215632B2 JP5969281A JP5969281A JPS6215632B2 JP S6215632 B2 JPS6215632 B2 JP S6215632B2 JP 5969281 A JP5969281 A JP 5969281A JP 5969281 A JP5969281 A JP 5969281A JP S6215632 B2 JPS6215632 B2 JP S6215632B2
Authority
JP
Japan
Prior art keywords
container
plating
steel strip
thickness
evaporation source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5969281A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57174458A (en
Inventor
Yoshikyo Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP5969281A priority Critical patent/JPS57174458A/ja
Publication of JPS57174458A publication Critical patent/JPS57174458A/ja
Publication of JPS6215632B2 publication Critical patent/JPS6215632B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP5969281A 1981-04-22 1981-04-22 Construction of vessel for evaporating source Granted JPS57174458A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5969281A JPS57174458A (en) 1981-04-22 1981-04-22 Construction of vessel for evaporating source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5969281A JPS57174458A (en) 1981-04-22 1981-04-22 Construction of vessel for evaporating source

Publications (2)

Publication Number Publication Date
JPS57174458A JPS57174458A (en) 1982-10-27
JPS6215632B2 true JPS6215632B2 (en, 2012) 1987-04-08

Family

ID=13120513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5969281A Granted JPS57174458A (en) 1981-04-22 1981-04-22 Construction of vessel for evaporating source

Country Status (1)

Country Link
JP (1) JPS57174458A (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH062942B2 (ja) * 1983-07-18 1994-01-12 三菱重工業株式会社 真空蒸着装置
JPH0635656B2 (ja) * 1986-10-03 1994-05-11 三菱重工業株式会社 真空蒸着装置
JPS63135963U (en, 2012) * 1987-02-23 1988-09-07

Also Published As

Publication number Publication date
JPS57174458A (en) 1982-10-27

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