CA1243103A - Radiation-sensitive semiconductor device - Google Patents
Radiation-sensitive semiconductor deviceInfo
- Publication number
- CA1243103A CA1243103A CA000458633A CA458633A CA1243103A CA 1243103 A CA1243103 A CA 1243103A CA 000458633 A CA000458633 A CA 000458633A CA 458633 A CA458633 A CA 458633A CA 1243103 A CA1243103 A CA 1243103A
- Authority
- CA
- Canada
- Prior art keywords
- zone
- radiation
- layer
- semiconductor
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 54
- 230000005855 radiation Effects 0.000 title claims abstract description 30
- 238000001465 metallisation Methods 0.000 claims description 10
- 230000007423 decrease Effects 0.000 claims description 5
- 239000012535 impurity Substances 0.000 claims description 3
- 239000002800 charge carrier Substances 0.000 abstract description 5
- 230000005684 electric field Effects 0.000 abstract description 5
- 230000003247 decreasing effect Effects 0.000 abstract description 3
- 230000002950 deficient Effects 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- XQPRBTXUXXVTKB-UHFFFAOYSA-M caesium iodide Chemical compound [I-].[Cs+] XQPRBTXUXXVTKB-UHFFFAOYSA-M 0.000 description 4
- 230000002411 adverse Effects 0.000 description 2
- 230000000875 corresponding effect Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 241001663154 Electron Species 0.000 description 1
- 239000000370 acceptor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000136 polysorbate Polymers 0.000 description 1
- QHGVXILFMXYDRS-UHFFFAOYSA-N pyraclofos Chemical compound C1=C(OP(=O)(OCC)SCCC)C=NN1C1=CC=C(Cl)C=C1 QHGVXILFMXYDRS-UHFFFAOYSA-N 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/95—Circuit arrangements
- H10F77/953—Circuit arrangements for devices having potential barriers
- H10F77/959—Circuit arrangements for devices having potential barriers for devices working in avalanche mode
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
- H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
- H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
- H10F30/221—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PN homojunction
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
- H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
- H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
- H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
- H10F30/225—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier working in avalanche mode, e.g. avalanche photodiodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/14—Shape of semiconductor bodies; Shapes, relative sizes or dispositions of semiconductor regions within semiconductor bodies
- H10F77/148—Shapes of potential barriers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Light Receiving Elements (AREA)
- Measurement Of Radiation (AREA)
- Element Separation (AREA)
- Curing Cements, Concrete, And Artificial Stone (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NLAANVRAGE8302516,A NL187416C (nl) | 1983-07-14 | 1983-07-14 | Stralingsgevoelige halfgeleiderinrichting. |
| NL8302516 | 1983-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1243103A true CA1243103A (en) | 1988-10-11 |
Family
ID=19842158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000458633A Expired CA1243103A (en) | 1983-07-14 | 1984-07-11 | Radiation-sensitive semiconductor device |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US4652899A (enExample) |
| JP (2) | JPS6126539A (enExample) |
| AT (1) | AT392704B (enExample) |
| AU (1) | AU3057484A (enExample) |
| CA (1) | CA1243103A (enExample) |
| DE (1) | DE3425309C2 (enExample) |
| ES (1) | ES534204A0 (enExample) |
| FR (1) | FR2549295B1 (enExample) |
| GB (1) | GB2143373B (enExample) |
| IT (1) | IT1176383B (enExample) |
| NL (1) | NL187416C (enExample) |
| SE (2) | SE460002B (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2628562A1 (fr) * | 1988-03-11 | 1989-09-15 | Thomson Csf | Dispositif d'imagerie a structure matricielle |
| US5049962A (en) * | 1990-03-07 | 1991-09-17 | Santa Barbara Research Center | Control of optical crosstalk between adjacent photodetecting regions |
| JP2711038B2 (ja) * | 1991-11-20 | 1998-02-10 | 富士通株式会社 | 光検知装置 |
| EP2287917B1 (en) * | 1999-02-25 | 2016-05-25 | Canon Kabushiki Kaisha | Light-receiving element and photoelectric conversion device |
| JP3467013B2 (ja) | 1999-12-06 | 2003-11-17 | キヤノン株式会社 | 固体撮像装置 |
| US6960817B2 (en) * | 2000-04-21 | 2005-11-01 | Canon Kabushiki Kaisha | Solid-state imaging device |
| RU2290721C2 (ru) | 2004-05-05 | 2006-12-27 | Борис Анатольевич Долгошеин | Кремниевый фотоэлектронный умножитель (варианты) и ячейка для кремниевого фотоэлектронного умножителя |
| JP2009525619A (ja) * | 2006-02-01 | 2009-07-09 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | ガイガーモード・アバランシェ・フォトダイオード |
| WO2010140944A1 (en) * | 2009-06-05 | 2010-12-09 | Rti Electronics Ab | X-ray detection device |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1072080A (en) * | 1965-12-31 | 1967-06-14 | Standard Telephones Cables Ltd | Improvements in or relating to semiconductor devices |
| US3501678A (en) * | 1967-06-28 | 1970-03-17 | Ortec | Tapered-shelf semiconductor |
| US3832732A (en) * | 1973-01-11 | 1974-08-27 | Westinghouse Electric Corp | Light-activated lateral thyristor and ac switch |
| US3994012A (en) * | 1975-05-07 | 1976-11-23 | The Regents Of The University Of Minnesota | Photovoltaic semi-conductor devices |
| DE2927126A1 (de) * | 1979-07-05 | 1981-01-08 | Standard Elektrik Lorenz Ag | Photodiode |
| US4394676A (en) * | 1980-12-17 | 1983-07-19 | Agouridis Dimitrios C | Photovoltaic radiation detector element |
-
1983
- 1983-07-14 NL NLAANVRAGE8302516,A patent/NL187416C/xx not_active IP Right Cessation
-
1984
- 1984-07-02 US US06/627,309 patent/US4652899A/en not_active Expired - Fee Related
- 1984-07-06 FR FR8410787A patent/FR2549295B1/fr not_active Expired
- 1984-07-10 DE DE3425309A patent/DE3425309C2/de not_active Expired - Fee Related
- 1984-07-11 SE SE8403661A patent/SE460002B/sv not_active IP Right Cessation
- 1984-07-11 JP JP14248184A patent/JPS6126539A/ja active Pending
- 1984-07-11 GB GB08417670A patent/GB2143373B/en not_active Expired
- 1984-07-11 IT IT21834/84A patent/IT1176383B/it active
- 1984-07-11 JP JP59142479A patent/JPS6057677A/ja active Granted
- 1984-07-11 CA CA000458633A patent/CA1243103A/en not_active Expired
- 1984-07-11 SE SE8403661D patent/SE8403661L/xx not_active Application Discontinuation
- 1984-07-11 ES ES534204A patent/ES534204A0/es active Granted
- 1984-07-12 AT AT2254/84A patent/AT392704B/de not_active IP Right Cessation
- 1984-07-13 AU AU30574/84A patent/AU3057484A/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| GB2143373A (en) | 1985-02-06 |
| AT392704B (de) | 1991-05-27 |
| IT8421834A0 (it) | 1984-07-11 |
| SE460002B (sv) | 1989-08-28 |
| US4652899A (en) | 1987-03-24 |
| FR2549295A1 (fr) | 1985-01-18 |
| NL187416B (nl) | 1991-04-16 |
| JPS6057677A (ja) | 1985-04-03 |
| DE3425309C2 (de) | 1994-02-10 |
| ES8505144A1 (es) | 1985-04-16 |
| NL8302516A (nl) | 1985-02-01 |
| FR2549295B1 (fr) | 1987-07-31 |
| JPH0527997B2 (enExample) | 1993-04-22 |
| ATA225484A (de) | 1990-10-15 |
| DE3425309A1 (de) | 1985-01-24 |
| NL187416C (nl) | 1991-09-16 |
| SE8403661D0 (sv) | 1984-07-11 |
| IT1176383B (it) | 1987-08-18 |
| GB2143373B (en) | 1986-11-12 |
| SE8403661L (sv) | 1985-01-15 |
| JPS6126539A (ja) | 1986-02-05 |
| AU3057484A (en) | 1985-01-17 |
| ES534204A0 (es) | 1985-04-16 |
| GB8417670D0 (en) | 1984-08-15 |
| IT8421834A1 (it) | 1986-01-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |