CA1181719A - Photochemical vapor deposition apparatus and method - Google Patents
Photochemical vapor deposition apparatus and methodInfo
- Publication number
- CA1181719A CA1181719A CA000390328A CA390328A CA1181719A CA 1181719 A CA1181719 A CA 1181719A CA 000390328 A CA000390328 A CA 000390328A CA 390328 A CA390328 A CA 390328A CA 1181719 A CA1181719 A CA 1181719A
- Authority
- CA
- Canada
- Prior art keywords
- radiation
- reaction
- window
- chamber
- deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title claims abstract description 35
- 238000007740 vapor deposition Methods 0.000 title claims abstract description 25
- 238000006243 chemical reaction Methods 0.000 claims abstract description 70
- 239000000463 material Substances 0.000 claims abstract description 68
- 230000005855 radiation Effects 0.000 claims abstract description 56
- 239000010453 quartz Substances 0.000 claims abstract description 52
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 52
- 239000000853 adhesive Substances 0.000 claims abstract description 8
- 229920000570 polyether Polymers 0.000 claims abstract description 8
- 230000001070 adhesive effect Effects 0.000 claims abstract description 7
- 239000004721 Polyphenylene oxide Substances 0.000 claims abstract description 6
- 230000008021 deposition Effects 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 25
- 238000006552 photochemical reaction Methods 0.000 claims description 15
- 239000000376 reactant Substances 0.000 claims description 13
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 12
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 12
- 239000007795 chemical reaction product Substances 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 9
- 238000005137 deposition process Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000012808 vapor phase Substances 0.000 claims 4
- 230000008569 process Effects 0.000 abstract description 23
- 238000005019 vapor deposition process Methods 0.000 abstract description 6
- 238000000151 deposition Methods 0.000 description 26
- 239000010408 film Substances 0.000 description 22
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 10
- 239000007789 gas Substances 0.000 description 9
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 6
- 230000001939 inductive effect Effects 0.000 description 5
- 229910052753 mercury Inorganic materials 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 230000000977 initiatory effect Effects 0.000 description 4
- 229910000077 silane Inorganic materials 0.000 description 4
- 229910021529 ammonia Inorganic materials 0.000 description 3
- 230000003292 diminished effect Effects 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010494 dissociation reaction Methods 0.000 description 2
- 230000005593 dissociations Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000010702 perfluoropolyether Substances 0.000 description 2
- 230000001443 photoexcitation Effects 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000002207 thermal evaporation Methods 0.000 description 2
- BOSAWIQFTJIYIS-UHFFFAOYSA-N 1,1,1-trichloro-2,2,2-trifluoroethane Chemical compound FC(F)(F)C(Cl)(Cl)Cl BOSAWIQFTJIYIS-UHFFFAOYSA-N 0.000 description 1
- 229920006384 Airco Polymers 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- CUZMQPZYCDIHQL-VCTVXEGHSA-L calcium;(2s)-1-[(2s)-3-[(2r)-2-(cyclohexanecarbonylamino)propanoyl]sulfanyl-2-methylpropanoyl]pyrrolidine-2-carboxylate Chemical compound [Ca+2].N([C@H](C)C(=O)SC[C@@H](C)C(=O)N1[C@@H](CCC1)C([O-])=O)C(=O)C1CCCCC1.N([C@H](C)C(=O)SC[C@@H](C)C(=O)N1[C@@H](CCC1)C([O-])=O)C(=O)C1CCCCC1 CUZMQPZYCDIHQL-VCTVXEGHSA-L 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 229910052729 chemical element Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- SYHGEUNFJIGTRX-UHFFFAOYSA-N methylenedioxypyrovalerone Chemical compound C=1C=C2OCOC2=CC=1C(=O)C(CCC)N1CCCC1 SYHGEUNFJIGTRX-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 238000005950 photosensitized reaction Methods 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000036647 reaction Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/047—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
- C23C16/488—Protection of windows for introduction of radiation into the coating chamber
Landscapes
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Toxicology (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US21604180A | 1980-12-15 | 1980-12-15 | |
| US216,041 | 1980-12-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1181719A true CA1181719A (en) | 1985-01-29 |
Family
ID=22805435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000390328A Expired CA1181719A (en) | 1980-12-15 | 1981-11-18 | Photochemical vapor deposition apparatus and method |
Country Status (10)
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3407089A1 (de) * | 1984-02-27 | 1985-08-29 | Siemens Ag | Verfahren und vorrichtung zur lichtinduzierten, fotolytischen abscheidung |
| JPS6118123A (ja) * | 1984-07-04 | 1986-01-27 | Semiconductor Energy Lab Co Ltd | 薄膜形成装置 |
| EP0171605B1 (en) * | 1984-07-11 | 1990-02-14 | Hitachi, Ltd. | Method of forming an insulating film on a semiconductor body |
| GB2162207B (en) * | 1984-07-26 | 1989-05-10 | Japan Res Dev Corp | Semiconductor crystal growth apparatus |
| US4615294A (en) * | 1984-07-31 | 1986-10-07 | Hughes Aircraft Company | Barrel reactor and method for photochemical vapor deposition |
| JPH0622222B2 (ja) * | 1984-09-18 | 1994-03-23 | 株式会社東芝 | 光処理装置 |
| JPS6362867A (ja) * | 1986-09-02 | 1988-03-19 | Seikosha Co Ltd | 有色物品 |
| GB8802942D0 (en) * | 1988-02-09 | 1988-03-09 | Aron Vecht & Co Ltd | Methods & apparatus for depositing thin films |
| CN113718233A (zh) * | 2021-08-30 | 2021-11-30 | 上海华力微电子有限公司 | 一种石英透镜的移除方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3678889A (en) * | 1970-02-06 | 1972-07-25 | Tokyo Shibaura Electric Co | Reflector assembly for reflecting the vapors of high temperature volatile materials |
| US3904505A (en) * | 1970-03-20 | 1975-09-09 | Space Sciences Inc | Apparatus for film deposition |
| US3951698A (en) * | 1974-11-25 | 1976-04-20 | The United States Of America As Represented By The Secretary Of The Army | Dual use of epitaxy seed crystal as tube input window and cathode structure base |
| GB1528192A (en) * | 1975-03-10 | 1978-10-11 | Secr Defence | Surface treatment of iii-v compound crystals |
| US4022928A (en) * | 1975-05-22 | 1977-05-10 | Piwcyzk Bernhard P | Vacuum deposition methods and masking structure |
-
1981
- 1981-11-10 IL IL64258A patent/IL64258A0/xx not_active IP Right Cessation
- 1981-11-13 GB GB8134329A patent/GB2089377A/en not_active Withdrawn
- 1981-11-14 EP EP81109700A patent/EP0054189B1/en not_active Expired
- 1981-11-14 DE DE8181109700T patent/DE3176707D1/de not_active Expired
- 1981-11-16 ZA ZA817910A patent/ZA817910B/xx unknown
- 1981-11-18 CA CA000390328A patent/CA1181719A/en not_active Expired
- 1981-12-04 AU AU78255/81A patent/AU530027B2/en not_active Ceased
- 1981-12-08 KR KR1019810004788A patent/KR850001974B1/ko not_active Expired
- 1981-12-14 DK DK553981A patent/DK553981A/da not_active Application Discontinuation
- 1981-12-15 JP JP56201054A patent/JPS57154839A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| AU7825581A (en) | 1982-07-22 |
| KR850001974B1 (ko) | 1985-12-31 |
| EP0054189A1 (en) | 1982-06-23 |
| EP0054189B1 (en) | 1988-04-20 |
| JPS649728B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-02-20 |
| KR830008409A (ko) | 1983-11-18 |
| DE3176707D1 (en) | 1988-05-26 |
| AU530027B2 (en) | 1983-06-30 |
| ZA817910B (en) | 1982-10-27 |
| IL64258A0 (en) | 1982-02-28 |
| GB2089377A (en) | 1982-06-23 |
| DK553981A (da) | 1982-06-16 |
| JPS57154839A (en) | 1982-09-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |