CA1145117A - Process for producing polycrystalline silicon - Google Patents

Process for producing polycrystalline silicon

Info

Publication number
CA1145117A
CA1145117A CA000327660A CA327660A CA1145117A CA 1145117 A CA1145117 A CA 1145117A CA 000327660 A CA000327660 A CA 000327660A CA 327660 A CA327660 A CA 327660A CA 1145117 A CA1145117 A CA 1145117A
Authority
CA
Canada
Prior art keywords
silicon
reactor
temperature
product
tribromosilane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000327660A
Other languages
English (en)
French (fr)
Inventor
Edward B. Moore
Lloyd M. Woerner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JC Schumacher Co
Original Assignee
JC Schumacher Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JC Schumacher Co filed Critical JC Schumacher Co
Application granted granted Critical
Publication of CA1145117A publication Critical patent/CA1145117A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
CA000327660A 1978-08-18 1979-05-15 Process for producing polycrystalline silicon Expired CA1145117A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US93500978A 1978-08-18 1978-08-18
US935,009 1978-08-18

Publications (1)

Publication Number Publication Date
CA1145117A true CA1145117A (en) 1983-04-26

Family

ID=25466438

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000327660A Expired CA1145117A (en) 1978-08-18 1979-05-15 Process for producing polycrystalline silicon

Country Status (6)

Country Link
JP (1) JPS5527890A (US06633600-20031014-M00021.png)
CA (1) CA1145117A (US06633600-20031014-M00021.png)
DE (2) DE2919086C2 (US06633600-20031014-M00021.png)
FR (1) FR2433479B1 (US06633600-20031014-M00021.png)
GB (1) GB2028289B (US06633600-20031014-M00021.png)
IT (1) IT1193203B (US06633600-20031014-M00021.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9023297B2 (en) 2009-07-08 2015-05-05 Schmid Silicon Technology Gmbh Method and system for producing monosilane

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4676967A (en) * 1978-08-23 1987-06-30 Union Carbide Corporation High purity silane and silicon production
US4374182A (en) * 1980-07-07 1983-02-15 Dow Corning Corporation Preparation of silicon metal through polymer degradation
US4390510A (en) 1982-02-16 1983-06-28 General Electric Company Process for treating spent silicon-containing reaction masses to produce halosilanes
JPS61101410A (ja) * 1984-10-24 1986-05-20 Hiroshi Ishizuka 多結晶珪素の製造法及びそのための装置
US4696834A (en) * 1986-02-28 1987-09-29 Dow Corning Corporation Silicon-containing coatings and a method for their preparation
US4743344A (en) * 1986-03-26 1988-05-10 Union Carbide Corporation Treatment of wastes from high purity silicon process
US4871524A (en) * 1987-09-03 1989-10-03 Ethyl Corporation Hydrogen purification process
EP1786730A2 (en) * 2004-07-16 2007-05-23 Institutt For Energiteknikk Method and reactor for continuous production of semiconductor grade silicon
CN101460398B (zh) * 2006-04-13 2012-08-29 卡伯特公司 通过闭合环路方法生产硅
US7935327B2 (en) 2006-08-30 2011-05-03 Hemlock Semiconductor Corporation Silicon production with a fluidized bed reactor integrated into a siemens-type process
US7656661B2 (en) * 2007-07-31 2010-02-02 Donald Shaum Electronic apparatus with multiple data input modes
DE102008017304A1 (de) 2008-03-31 2009-10-01 Schmid Silicon Technology Gmbh Verfahren und Anlage zur Herstellung von Reinstsilizium
DE102009037155B3 (de) * 2009-08-04 2010-11-04 Schmid Silicon Technology Gmbh Verfahren und Anlage zur Herstellung von Trichlorsilan
DE102009037154B3 (de) * 2009-08-04 2010-12-09 Schmid Silicon Technology Gmbh Verfahren zur Herstellung von Monosilan
DE102010000981A1 (de) 2010-01-18 2011-07-21 Evonik Degussa GmbH, 45128 Closed loop-Verfahren zur Herstellung von Trichlorsilan aus metallurgischem Silicium
DE102010034469A1 (de) 2010-08-06 2012-02-09 Schmid Silicon Technology Gmbh Anlage zur Herstellung von Monosilan
US8449848B2 (en) 2010-10-22 2013-05-28 Memc Electronic Materials, Inc. Production of polycrystalline silicon in substantially closed-loop systems
EP2630081B1 (en) * 2010-10-22 2016-04-20 MEMC Electronic Materials, Inc. Production of polycrystalline silicon in closed-loop processes and systems
US20120100061A1 (en) 2010-10-22 2012-04-26 Memc Electronic Materials, Inc. Production of Polycrystalline Silicon in Substantially Closed-loop Processes
DE102011089695A1 (de) 2011-12-22 2013-06-27 Schmid Silicon Technology Gmbh Reaktor und Verfahren zur Herstellung von Reinstsilizium
DE102015203618A1 (de) 2015-02-27 2016-09-01 Schmid Silicon Technology Gmbh Kolonne und Verfahren zur Disproportionierung von Chlorsilanen zu Monosilan und Tetrachlorsilan sowie Anlage zur Gewinnung von Monosilan
DE102015209008A1 (de) 2015-05-15 2016-11-17 Schmid Silicon Technology Gmbh Verfahren und Anlage zur Zersetzung von Monosilan
CN108883942A (zh) * 2016-04-21 2018-11-23 株式会社德山 金属粉末的制造方法
DE102019209898A1 (de) 2019-07-04 2021-01-07 Schmid Silicon Technology Gmbh Vorrichtung und Verfahren zur Bildung von flüssigem Silizium

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2595620A (en) * 1948-11-27 1952-05-06 Union Carbide & Carbon Corp Hydrogenation of halogenosilanes
BE554836A (US06633600-20031014-M00021.png) * 1956-02-11
BE571013A (US06633600-20031014-M00021.png) * 1957-09-07
US3012861A (en) * 1960-01-15 1961-12-12 Du Pont Production of silicon
GB1498266A (en) * 1974-05-13 1978-01-18 Texas Instruments Inc Method of silicon production
DE2620739A1 (de) * 1976-05-11 1977-12-01 Wacker Chemitronic Verfahren zur herstellung von hochreinem silicium
US4117094A (en) * 1977-06-13 1978-09-26 Texas Instruments Incorporated Process for silicon and trichlorosilane production

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9023297B2 (en) 2009-07-08 2015-05-05 Schmid Silicon Technology Gmbh Method and system for producing monosilane

Also Published As

Publication number Publication date
DE2919086C2 (de) 1986-10-16
DE2954368A1 (US06633600-20031014-M00021.png) 1984-07-12
DE2919086A1 (de) 1980-03-06
DE2954368C2 (de) 1986-10-16
GB2028289B (en) 1982-09-02
JPS6228083B2 (US06633600-20031014-M00021.png) 1987-06-18
IT7922753A0 (it) 1979-05-17
FR2433479A1 (fr) 1980-03-14
IT1193203B (it) 1988-06-15
JPS5527890A (en) 1980-02-28
FR2433479B1 (fr) 1985-10-18
GB2028289A (en) 1980-03-05

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