CA1133614A - Color solid-state imager and method of making the same - Google Patents
Color solid-state imager and method of making the sameInfo
- Publication number
- CA1133614A CA1133614A CA346,435A CA346435A CA1133614A CA 1133614 A CA1133614 A CA 1133614A CA 346435 A CA346435 A CA 346435A CA 1133614 A CA1133614 A CA 1133614A
- Authority
- CA
- Canada
- Prior art keywords
- color
- high molecular
- layer
- radiation
- sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 239000010410 layer Substances 0.000 claims abstract description 71
- 239000000463 material Substances 0.000 claims abstract description 50
- 230000005855 radiation Effects 0.000 claims abstract description 36
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 239000004065 semiconductor Substances 0.000 claims abstract description 23
- 230000003595 spectral effect Effects 0.000 claims abstract description 12
- 239000011241 protective layer Substances 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 238000003475 lamination Methods 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- 229920001187 thermosetting polymer Polymers 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 8
- 238000010276 construction Methods 0.000 abstract description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 9
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- 239000000975 dye Substances 0.000 description 9
- 238000004043 dyeing Methods 0.000 description 7
- 238000004132 cross linking Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000003086 colorant Substances 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
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- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229920002454 poly(glycidyl methacrylate) polymer Polymers 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 235000019422 polyvinyl alcohol Nutrition 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- KFTHUBZIEMOORC-UHFFFAOYSA-N 2-methylbut-2-enamide Chemical compound CC=C(C)C(N)=O KFTHUBZIEMOORC-UHFFFAOYSA-N 0.000 description 1
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 101100274575 Caenorhabditis elegans clh-3 gene Proteins 0.000 description 1
- 108010010803 Gelatin Proteins 0.000 description 1
- 229920000084 Gum arabic Polymers 0.000 description 1
- 229920002367 Polyisobutene Polymers 0.000 description 1
- 241000978776 Senegalia senegal Species 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 235000010489 acacia gum Nutrition 0.000 description 1
- 239000000205 acacia gum Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 235000012745 brilliant blue FCF Nutrition 0.000 description 1
- 239000005018 casein Substances 0.000 description 1
- BECPQYXYKAMYBN-UHFFFAOYSA-N casein, tech. Chemical compound NCCCCC(C(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(CC(C)C)N=C(O)C(CCC(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(C(C)O)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(COP(O)(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(N)CC1=CC=CC=C1 BECPQYXYKAMYBN-UHFFFAOYSA-N 0.000 description 1
- 235000021240 caseins Nutrition 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- PBOIUUROGJVVNC-UHFFFAOYSA-L disodium 2-hydroxy-5-[[4-[[2-methoxy-4-[(3-sulfonatophenyl)diazenyl]phenyl]carbamoylamino]phenyl]diazenyl]benzoate Chemical compound [Na+].[Na+].COc1cc(ccc1NC(=O)Nc1ccc(cc1)N=Nc1ccc(O)c(c1)C([O-])=O)N=Nc1cccc(c1)S([O-])(=O)=O PBOIUUROGJVVNC-UHFFFAOYSA-L 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- MCPLVIGCWWTHFH-UHFFFAOYSA-L methyl blue Chemical compound [Na+].[Na+].C1=CC(S(=O)(=O)[O-])=CC=C1NC1=CC=C(C(=C2C=CC(C=C2)=[NH+]C=2C=CC(=CC=2)S([O-])(=O)=O)C=2C=CC(NC=3C=CC(=CC=3)S([O-])(=O)=O)=CC=2)C=C1 MCPLVIGCWWTHFH-UHFFFAOYSA-L 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- UWGCNDBLFSEBDW-UHFFFAOYSA-M sodium;4-[[4-(diethylamino)phenyl]-(4-diethylazaniumylidenecyclohexa-2,5-dien-1-ylidene)methyl]naphthalene-2,7-disulfonate Chemical compound [Na+].C1=CC(N(CC)CC)=CC=C1C(C=1C2=CC=C(C=C2C=C(C=1)S([O-])(=O)=O)S([O-])(=O)=O)=C1C=CC(=[N+](CC)CC)C=C1 UWGCNDBLFSEBDW-UHFFFAOYSA-M 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XOSXWYQMOYSSKB-LDKJGXKFSA-L water blue Chemical compound CC1=CC(/C(\C(C=C2)=CC=C2NC(C=C2)=CC=C2S([O-])(=O)=O)=C(\C=C2)/C=C/C\2=N\C(C=C2)=CC=C2S([O-])(=O)=O)=CC(S(O)(=O)=O)=C1N.[Na+].[Na+] XOSXWYQMOYSSKB-LDKJGXKFSA-L 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F39/182—Colour image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/803—Pixels having integrated switching, control, storage or amplification elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
- H10F39/8053—Colour filters
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Optical Filters (AREA)
- Color Television Image Signal Generators (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP54020801A JPS6046401B2 (ja) | 1979-02-26 | 1979-02-26 | 固体撮像素子の製造方法 |
| JP20801/1979 | 1979-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1133614A true CA1133614A (en) | 1982-10-12 |
Family
ID=12037151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA346,435A Expired CA1133614A (en) | 1979-02-26 | 1980-02-26 | Color solid-state imager and method of making the same |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4285007A (OSRAM) |
| JP (1) | JPS6046401B2 (OSRAM) |
| CA (1) | CA1133614A (OSRAM) |
| DE (1) | DE3006919C2 (OSRAM) |
| FR (1) | FR2449974A1 (OSRAM) |
| GB (1) | GB2043998B (OSRAM) |
| NL (1) | NL8001159A (OSRAM) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5687782U (OSRAM) * | 1979-12-10 | 1981-07-14 | ||
| US4315978A (en) * | 1980-03-06 | 1982-02-16 | Eastman Kodak Company | Solid-state color imaging device having a color filter array using a photocrosslinkable barrier |
| JPS56165362A (en) * | 1980-05-26 | 1981-12-18 | Hitachi Ltd | Manufacture of solid state color image pickup element |
| JPS5754905A (en) | 1980-09-19 | 1982-04-01 | Hitachi Ltd | Manufacture of color filter |
| US4430666A (en) | 1981-02-27 | 1984-02-07 | Canon Kabushiki Kaisha | Photoelectric converting device |
| JPS57148367A (en) * | 1981-03-09 | 1982-09-13 | Nec Corp | Manufacture of solid state color image pickup element |
| US4882616A (en) * | 1981-06-29 | 1989-11-21 | Nippon Electric Co., Ltd. | Color filter for a solid state imaging device |
| JPS5812354A (ja) * | 1981-07-15 | 1983-01-24 | Toshiba Corp | カラ−用固体撮像装置の製造方法 |
| JPS5898959A (ja) * | 1981-12-09 | 1983-06-13 | Hitachi Ltd | カラー固体撮像素子の製造方法 |
| US4577098A (en) * | 1982-04-14 | 1986-03-18 | Matsushita Electric Industrial Co., Ltd. | Solid-state image sensor with a phototropic or fluorescent layer |
| JPS5999761A (ja) * | 1982-11-30 | 1984-06-08 | Fuji Photo Film Co Ltd | カラ−固体撮像素子の製造方法 |
| JPS59175761A (ja) * | 1983-03-26 | 1984-10-04 | Mitsubishi Electric Corp | カラ−フイルタ付固体撮像素子の製造方法 |
| US4553153A (en) * | 1983-10-21 | 1985-11-12 | Eastman Kodak Company | Planarizing layer for semiconductor substrates such as solid state imagers |
| JPS6130068A (ja) * | 1984-07-23 | 1986-02-12 | Victor Co Of Japan Ltd | カラ−化固体撮像素子製造法 |
| US5568186A (en) * | 1993-11-15 | 1996-10-22 | The United States Of America As Represented By The Secretary Of The Army | Focal plane filtered multispectral multidetector imager |
| US6252220B1 (en) | 1999-04-26 | 2001-06-26 | Xerox Corporation | Sensor cover glass with infrared filter |
| EP1138394A1 (en) * | 2000-03-31 | 2001-10-04 | Nordson Corporation | Improvements in and relating to powder coating system |
| US6768565B1 (en) | 2000-09-07 | 2004-07-27 | Xerox Corporation | Infrared correction in color scanners |
| US6316284B1 (en) | 2000-09-07 | 2001-11-13 | Xerox Corporation | Infrared correction in color scanners |
| WO2003038901A1 (de) * | 2001-10-26 | 2003-05-08 | Stmicroelectronics Nv | Verfahren zum herstellen eines tfa-bildsensors sowie tfa-bildsensor |
| US7282382B2 (en) * | 2001-10-29 | 2007-10-16 | Stmicroelectronics N.V. | Method for producing a photodiode contact for a TFA image sensor |
| AT505688A1 (de) * | 2007-09-13 | 2009-03-15 | Nanoident Technologies Ag | Sensormatrix aus halbleiterbauteilen |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3623794A (en) * | 1968-12-19 | 1971-11-30 | Technical Operations Inc | Spectral zonal encoder |
| US3619041A (en) * | 1969-01-13 | 1971-11-09 | Technical Operations Inc | Spectral zonal encoder employing a silver halide emulsion layer |
| US4081277A (en) * | 1976-10-08 | 1978-03-28 | Eastman Kodak Company | Method for making a solid-state color imaging device having an integral color filter and the device |
| US4204866A (en) * | 1976-10-08 | 1980-05-27 | Eastman Kodak Company | Solid-state color imaging devices and method for making them |
| US4196010A (en) * | 1978-06-06 | 1980-04-01 | Eastman Kodak Company | Color filter arrays and color imaging devices |
| US4190446A (en) * | 1978-09-06 | 1980-02-26 | Eastman Kodak Company | Photocrosslinkable, high-temperature-resistant polymers and their use in color imaging devices |
-
1979
- 1979-02-26 JP JP54020801A patent/JPS6046401B2/ja not_active Expired
-
1980
- 1980-02-20 US US06/123,085 patent/US4285007A/en not_active Expired - Lifetime
- 1980-02-25 GB GB8006331A patent/GB2043998B/en not_active Expired
- 1980-02-25 DE DE3006919A patent/DE3006919C2/de not_active Expired
- 1980-02-26 FR FR8004179A patent/FR2449974A1/fr active Granted
- 1980-02-26 CA CA346,435A patent/CA1133614A/en not_active Expired
- 1980-02-26 NL NL8001159A patent/NL8001159A/nl not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| US4285007A (en) | 1981-08-18 |
| JPS55115371A (en) | 1980-09-05 |
| DE3006919C2 (de) | 1986-01-16 |
| GB2043998A (en) | 1980-10-08 |
| NL8001159A (nl) | 1980-08-28 |
| JPS6046401B2 (ja) | 1985-10-16 |
| FR2449974A1 (fr) | 1980-09-19 |
| DE3006919A1 (de) | 1980-08-28 |
| GB2043998B (en) | 1983-05-05 |
| FR2449974B1 (OSRAM) | 1983-06-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |