JPS642002A - Formation of solid color image pick up element - Google Patents
Formation of solid color image pick up elementInfo
- Publication number
- JPS642002A JPS642002A JP15828587A JP15828587A JPS642002A JP S642002 A JPS642002 A JP S642002A JP 15828587 A JP15828587 A JP 15828587A JP 15828587 A JP15828587 A JP 15828587A JP S642002 A JPS642002 A JP S642002A
- Authority
- JP
- Japan
- Prior art keywords
- film
- image pick
- color image
- resist
- color layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Filters (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
PURPOSE: To form a color image pick up element having high quality and high resolution by a simple method by patterning a resist film to be used for far ultraviolet rays or electron rays contg. a dye using a photoresist as mask and forming plural color layers.
CONSTITUTION: Transparent photosensitive epoxy resin film 3 is applied on a substrate 1 on which a wiring L including an electrode pad P or a photodetector S is provided and the resin film 3 is then baked, then a resin film 6 consisting of a mixture of a copolymer resin with methacrylic ester for a resist to be used for far ultraviolet rays or electron rays contg. a red dye, etc. is applied on the film 3 and baked. Then, a photoresist 7 is applied on the film 6 and patterned by exposure. When the film 6 is patterned by the gas plasma ashing using a residual resist 7 as mask, a red color layer 6R basing on the film 6 is formed. Similarly, a green color layer 6G, and blue color layer 6B are laminated, and an electrode P is formed simultaneously as window. By this method, a dyeing stage is eliminated, and a color image pick up element having high quality and high resolution is formed by a simple method wherein a stage for using poisonous chemicals such as bichromic acid, etc. is not required.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62-158285A JPH012002A (en) | 1987-06-24 | Manufacturing method of solid-state color image sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62-158285A JPH012002A (en) | 1987-06-24 | Manufacturing method of solid-state color image sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS642002A true JPS642002A (en) | 1989-01-06 |
| JPH012002A JPH012002A (en) | 1989-01-06 |
Family
ID=
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02244102A (en) * | 1989-03-17 | 1990-09-28 | Fujitsu Ltd | Production of color filter |
| WO1991020006A1 (en) * | 1990-06-20 | 1991-12-26 | Dai Nippon Printing Co., Ltd. | Color filter and method of manufacturing the same |
| WO2006085528A1 (en) * | 2005-02-10 | 2006-08-17 | Toppan Printing Co., Ltd. | Solid-state imaging device and method for manufacturing same |
| JP2006222291A (en) * | 2005-02-10 | 2006-08-24 | Toppan Printing Co Ltd | Solid-state imaging element and its fabrication process |
| JP2006222290A (en) * | 2005-02-10 | 2006-08-24 | Toppan Printing Co Ltd | Solid-state imaging element and its manufacturing process |
| KR100931093B1 (en) * | 2009-05-06 | 2009-12-10 | 박호 | Composition for reinforcement of hair-roots and cleanness of scalp and its preparation method |
| JP2014164070A (en) * | 2013-02-25 | 2014-09-08 | Seiko Epson Corp | Color filter substrate, electro-optic device, method for manufacturing electro-optic device and electronic equipment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55115371A (en) * | 1979-02-26 | 1980-09-05 | Hitachi Ltd | Manufacturing method of solid color image pickup unit |
| JPS6058668A (en) * | 1983-09-12 | 1985-04-04 | Matsushita Electric Ind Co Ltd | Manufacture of color filter |
| JPS61296763A (en) * | 1985-06-25 | 1986-12-27 | Sony Corp | Manufacture of color solid-state image-pickup device |
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55115371A (en) * | 1979-02-26 | 1980-09-05 | Hitachi Ltd | Manufacturing method of solid color image pickup unit |
| JPS6058668A (en) * | 1983-09-12 | 1985-04-04 | Matsushita Electric Ind Co Ltd | Manufacture of color filter |
| JPS61296763A (en) * | 1985-06-25 | 1986-12-27 | Sony Corp | Manufacture of color solid-state image-pickup device |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02244102A (en) * | 1989-03-17 | 1990-09-28 | Fujitsu Ltd | Production of color filter |
| WO1991020006A1 (en) * | 1990-06-20 | 1991-12-26 | Dai Nippon Printing Co., Ltd. | Color filter and method of manufacturing the same |
| WO2006085528A1 (en) * | 2005-02-10 | 2006-08-17 | Toppan Printing Co., Ltd. | Solid-state imaging device and method for manufacturing same |
| JP2006222291A (en) * | 2005-02-10 | 2006-08-24 | Toppan Printing Co Ltd | Solid-state imaging element and its fabrication process |
| JP2006222290A (en) * | 2005-02-10 | 2006-08-24 | Toppan Printing Co Ltd | Solid-state imaging element and its manufacturing process |
| KR100934513B1 (en) | 2005-02-10 | 2009-12-29 | 도판 인사츠 가부시키가이샤 | Solid-state image sensor and its manufacturing method |
| US7932122B2 (en) | 2005-02-10 | 2011-04-26 | Toppan Printing Co., Ltd. | Manufacturing method for solid state image pickup device |
| US8097485B2 (en) | 2005-02-10 | 2012-01-17 | Toppan Printing Co., Ltd. | Solid state image pickup device and manufacturing method thereof |
| KR100931093B1 (en) * | 2009-05-06 | 2009-12-10 | 박호 | Composition for reinforcement of hair-roots and cleanness of scalp and its preparation method |
| JP2014164070A (en) * | 2013-02-25 | 2014-09-08 | Seiko Epson Corp | Color filter substrate, electro-optic device, method for manufacturing electro-optic device and electronic equipment |
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