JPS57148367A - Manufacture of solid state color image pickup element - Google Patents
Manufacture of solid state color image pickup elementInfo
- Publication number
- JPS57148367A JPS57148367A JP56033356A JP3335681A JPS57148367A JP S57148367 A JPS57148367 A JP S57148367A JP 56033356 A JP56033356 A JP 56033356A JP 3335681 A JP3335681 A JP 3335681A JP S57148367 A JPS57148367 A JP S57148367A
- Authority
- JP
- Japan
- Prior art keywords
- section
- base material
- separation filter
- organic high
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000007787 solid Substances 0.000 title 1
- 239000000463 material Substances 0.000 abstract 5
- 238000000034 method Methods 0.000 abstract 3
- 238000000926 separation method Methods 0.000 abstract 3
- 230000003595 spectral effect Effects 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 230000001681 protective effect Effects 0.000 abstract 1
- 230000002285 radioactive effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Color Television Image Signal Generators (AREA)
Abstract
PURPOSE:To enable to form a high quality multicolor separation filter in a short process of manufacture by a method wherein the base material of color separation filter is formed into one which develops multicolors using an organic high molecule substance as a base material. CONSTITUTION:The base material layer 2 of the color resolving filter, having an organic high molecule substance as a base material, is formed on the semiconductor susbstrate 1 whereon a number of photo-detecting sections 10 and a driving circuit section 11 were formed. Then, an exposure is performed using a white light (w) through the intermediary of a mask 3 which is fitted to the substrate 1 and has the prescribed spectral characteristics at the stipulated section. Then, developing and fixing works are performed. Through these procedures, the desired section of the layer 2 is colored giving the prescribed spectral characteristics to the prescribed section. Subsequently, a protective film 5 consisting of radioactive ray sensing organic high molecular material is formed all over the substrate, and the color separation filter of double layer structure is completed. Then, an aperture is provided on the layers 2 and 5, and the necessary sections such as a bonding pad section 12 and the like are exposed. Then, a thin wire 13 is connected to the bonding pad.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56033356A JPS57148367A (en) | 1981-03-09 | 1981-03-09 | Manufacture of solid state color image pickup element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56033356A JPS57148367A (en) | 1981-03-09 | 1981-03-09 | Manufacture of solid state color image pickup element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57148367A true JPS57148367A (en) | 1982-09-13 |
Family
ID=12384296
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56033356A Pending JPS57148367A (en) | 1981-03-09 | 1981-03-09 | Manufacture of solid state color image pickup element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57148367A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60182767A (en) * | 1984-02-29 | 1985-09-18 | Nec Corp | Solid-state color image pickup element |
US5011786A (en) * | 1986-07-11 | 1991-04-30 | Mitsubishi Denki K.K. | Method of manufacturing a hybrid circuit element |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55115371A (en) * | 1979-02-26 | 1980-09-05 | Hitachi Ltd | Manufacturing method of solid color image pickup unit |
JPS55148476A (en) * | 1979-05-07 | 1980-11-19 | Matsushita Electric Ind Co Ltd | Solid image pickup plate and fabricating method of the same |
-
1981
- 1981-03-09 JP JP56033356A patent/JPS57148367A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55115371A (en) * | 1979-02-26 | 1980-09-05 | Hitachi Ltd | Manufacturing method of solid color image pickup unit |
JPS55148476A (en) * | 1979-05-07 | 1980-11-19 | Matsushita Electric Ind Co Ltd | Solid image pickup plate and fabricating method of the same |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60182767A (en) * | 1984-02-29 | 1985-09-18 | Nec Corp | Solid-state color image pickup element |
US5011786A (en) * | 1986-07-11 | 1991-04-30 | Mitsubishi Denki K.K. | Method of manufacturing a hybrid circuit element |
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