JPS57148367A - Manufacture of solid state color image pickup element - Google Patents

Manufacture of solid state color image pickup element

Info

Publication number
JPS57148367A
JPS57148367A JP56033356A JP3335681A JPS57148367A JP S57148367 A JPS57148367 A JP S57148367A JP 56033356 A JP56033356 A JP 56033356A JP 3335681 A JP3335681 A JP 3335681A JP S57148367 A JPS57148367 A JP S57148367A
Authority
JP
Japan
Prior art keywords
section
base material
separation filter
organic high
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56033356A
Other languages
Japanese (ja)
Inventor
Tatsuo Fuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56033356A priority Critical patent/JPS57148367A/en
Publication of JPS57148367A publication Critical patent/JPS57148367A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Color Television Image Signal Generators (AREA)

Abstract

PURPOSE:To enable to form a high quality multicolor separation filter in a short process of manufacture by a method wherein the base material of color separation filter is formed into one which develops multicolors using an organic high molecule substance as a base material. CONSTITUTION:The base material layer 2 of the color resolving filter, having an organic high molecule substance as a base material, is formed on the semiconductor susbstrate 1 whereon a number of photo-detecting sections 10 and a driving circuit section 11 were formed. Then, an exposure is performed using a white light (w) through the intermediary of a mask 3 which is fitted to the substrate 1 and has the prescribed spectral characteristics at the stipulated section. Then, developing and fixing works are performed. Through these procedures, the desired section of the layer 2 is colored giving the prescribed spectral characteristics to the prescribed section. Subsequently, a protective film 5 consisting of radioactive ray sensing organic high molecular material is formed all over the substrate, and the color separation filter of double layer structure is completed. Then, an aperture is provided on the layers 2 and 5, and the necessary sections such as a bonding pad section 12 and the like are exposed. Then, a thin wire 13 is connected to the bonding pad.
JP56033356A 1981-03-09 1981-03-09 Manufacture of solid state color image pickup element Pending JPS57148367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56033356A JPS57148367A (en) 1981-03-09 1981-03-09 Manufacture of solid state color image pickup element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56033356A JPS57148367A (en) 1981-03-09 1981-03-09 Manufacture of solid state color image pickup element

Publications (1)

Publication Number Publication Date
JPS57148367A true JPS57148367A (en) 1982-09-13

Family

ID=12384296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56033356A Pending JPS57148367A (en) 1981-03-09 1981-03-09 Manufacture of solid state color image pickup element

Country Status (1)

Country Link
JP (1) JPS57148367A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60182767A (en) * 1984-02-29 1985-09-18 Nec Corp Solid-state color image pickup element
US5011786A (en) * 1986-07-11 1991-04-30 Mitsubishi Denki K.K. Method of manufacturing a hybrid circuit element

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55115371A (en) * 1979-02-26 1980-09-05 Hitachi Ltd Manufacturing method of solid color image pickup unit
JPS55148476A (en) * 1979-05-07 1980-11-19 Matsushita Electric Ind Co Ltd Solid image pickup plate and fabricating method of the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55115371A (en) * 1979-02-26 1980-09-05 Hitachi Ltd Manufacturing method of solid color image pickup unit
JPS55148476A (en) * 1979-05-07 1980-11-19 Matsushita Electric Ind Co Ltd Solid image pickup plate and fabricating method of the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60182767A (en) * 1984-02-29 1985-09-18 Nec Corp Solid-state color image pickup element
US5011786A (en) * 1986-07-11 1991-04-30 Mitsubishi Denki K.K. Method of manufacturing a hybrid circuit element

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