JPS55148476A - Solid image pickup plate and fabricating method of the same - Google Patents
Solid image pickup plate and fabricating method of the sameInfo
- Publication number
- JPS55148476A JPS55148476A JP5582479A JP5582479A JPS55148476A JP S55148476 A JPS55148476 A JP S55148476A JP 5582479 A JP5582479 A JP 5582479A JP 5582479 A JP5582479 A JP 5582479A JP S55148476 A JPS55148476 A JP S55148476A
- Authority
- JP
- Japan
- Prior art keywords
- filter
- same
- image pickup
- solid image
- fabricating method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007787 solid Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000010409 thin film Substances 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Color Television Image Signal Generators (AREA)
Abstract
PURPOSE:To reduce the distance between a photosensitive element and a filter and to enable accurately positioning therebetween by coating and sensing a photosensitive thin film on the element. CONSTITUTION:An n<+>-type diffused region is formed in a p-type substrate 10 to form photodiodes 11-13. Then, an SiO2 film 14, a bonding pad 15, and a photosensitive thin film 16 are sequentially formed thereon. On the other hand, it is exposed with light and developed by a photomask formed with a red filter 18, a green filter 19, a blue filter 20, black filters 21-24 and a transparent region 25 in predetermined regions of one surface of a glass plate 17 to form filters on the photodiodes 11-13.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5582479A JPS55148476A (en) | 1979-05-07 | 1979-05-07 | Solid image pickup plate and fabricating method of the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5582479A JPS55148476A (en) | 1979-05-07 | 1979-05-07 | Solid image pickup plate and fabricating method of the same |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55148476A true JPS55148476A (en) | 1980-11-19 |
Family
ID=13009697
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5582479A Pending JPS55148476A (en) | 1979-05-07 | 1979-05-07 | Solid image pickup plate and fabricating method of the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55148476A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57148367A (en) * | 1981-03-09 | 1982-09-13 | Nec Corp | Manufacture of solid state color image pickup element |
JPS60182767A (en) * | 1984-02-29 | 1985-09-18 | Nec Corp | Solid-state color image pickup element |
JPS6381849A (en) * | 1986-09-26 | 1988-04-12 | Hitachi Ltd | Solid-state image sensor |
JPH0250478A (en) * | 1988-08-12 | 1990-02-20 | Nec Kyushu Ltd | Color filter |
JPH02295166A (en) * | 1989-05-10 | 1990-12-06 | Toppan Printing Co Ltd | Color filter, one-dimensional image sensor and solid-state image sensor |
-
1979
- 1979-05-07 JP JP5582479A patent/JPS55148476A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57148367A (en) * | 1981-03-09 | 1982-09-13 | Nec Corp | Manufacture of solid state color image pickup element |
JPS60182767A (en) * | 1984-02-29 | 1985-09-18 | Nec Corp | Solid-state color image pickup element |
JPS6381849A (en) * | 1986-09-26 | 1988-04-12 | Hitachi Ltd | Solid-state image sensor |
JPH0250478A (en) * | 1988-08-12 | 1990-02-20 | Nec Kyushu Ltd | Color filter |
JPH02295166A (en) * | 1989-05-10 | 1990-12-06 | Toppan Printing Co Ltd | Color filter, one-dimensional image sensor and solid-state image sensor |
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