JPH0250478A - Color filter - Google Patents

Abstract

PURPOSE:To eliminate sensitivity irregularity and color irregularity between photocells by forming a structure in which dyed regions of hues are formed in the equal layers nearest to the photocells. CONSTITUTION:An interlayer film 3 is provided on a photocell 1 and a photoshielding film 2, a dyed film is formed thereon, and dyed regions 4-7 are formed on the dyed film in one patterning step. Further, it is coated with dye resistant film 8, which is selectively opened, and magenta dye is, for example, provided on the dyed region 4. Then, the film 8 is removed, it is again coated with the dye resistant film, which is selectively opened, cyan dye, for example, is provided on a dyed region 5, the film 8 is then removed. Similarly, dye is provided on the dye region to form the dyed region having different hue on the same plane, the film 8 is eventually removed, and a surface film 9 is provided on the dyed film. Accordingly, all the dyed regions of different hues are formed in the same layer nearest to the photocell. Thus, sensitivity irregularity and color irregularity are not provided between the photocells.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a light receiving element, and particularly to the structure of a color filter provided on the surface of the light receiving element.

[Conventional technology]

As can be seen from the cross-sectional structure shown in FIG.
For example, interlayer R3a - magenta dyed film 4 - interlayer film 3b -
It had a multilayer structure in the order of yellow dyed film 7 - N interlayer 3C - cyan dyed film 5 - surface film 9.

[Problem to be solved by the invention]

In the structure of the conventional color filter described above, in particular, a portion of the light incident on the upper two layers of the dyed film changes its angle due to diffraction at the interface with the interlayer film below the dyed film and is transmitted to the adjacent photocell section. This has the disadvantage that sensitivity unevenness between photocells becomes large. In addition, there is a drawback that the overlapping precision of the upper and lower dyed films is poor and color unevenness tends to occur.

The present invention aims to eliminate sensitivity unevenness and color unevenness between photocells by devising the structure of a color filter.

[Means to solve the problem]

In the color filter according to the present invention, among the multilayer films provided on the surface of the photocell, all the dyed regions with different hues are provided in one layer closest to the photocell, so that the dyed films of each hue exist in the same plane. It has a structure.

[Effect]

In the present invention, since the dyed films of each hue exist on the same plane at the point closest to the photocell, even if light is diffracted at the dyed film/interlayer film interface, the diffracted light will enter the adjacent dyed film or photocell. This eliminates uneven sensitivity and color in the photocell effect caused by diffracted light.

〔Example〕

Next, the present invention will be explained with reference to the drawings.

FIGS. 1(a) and 1(b) are a sectional view during the manufacturing process and a final sectional view of a color filter according to the present invention. A glabellar membrane 3 is provided on the photocell 1 and the photoshield membrane 2, and a dyed film is formed thereon, and dyed areas 4, 5, 6 are formed on this dyed film.
．． 7 is formed by passing through a single patterning process. A dye-resistant film 8 is applied thereon, holes are selectively opened in the dye-resistant film, and the dyed area 4 is dyed, for example, magenta as shown in FIG. 1(a) by a conventional method. Next, the dye-resistant film 8 is removed. Next, a dye-resistant film is applied again, and holes are selectively opened in the dye-resistant film to dye, for example, cyan in the dyed area 5. Next, the dye-resistant film is removed. By repeating the above steps, each dyed area is dyed to form dyed areas with different hues on the same plane, and finally, after removing the dye-resistant film 8,
A surface film 9 is provided on the dyed crotch as shown in FIG. 1(b). By going through the above-mentioned manufacturing method, a color filter having a structure in which all dyed areas of different hues are formed in the same layer closest to the photocell is obtained.

[Example 2] FIGS. 2(a) and 2(b) are a sectional view during manufacturing and a final sectional view of Example 2 of the present invention. An interlayer film 3 is provided on the photocell 1 and the photoshields M and 2, and a dyed film and a dye-resistant film [8] are provided on top of the interlayer film 3. Staining y! A8 is patterned and selectively dyed to form dyed area 4. By repeating this selective dyeing process, each dyed area 4, 5,
Form 6.7. Finally, a surface film 9 is provided on the dyed film, resulting in the result shown in FIG. 2(b).Compared to Example 1, this Example 2 has the advantage that patterning of the dyeing pattern is unnecessary and the manufacturing method is simpler. .

〔Effect of the invention〕

As described above, according to the present invention, a color filter having a structure in which all dyed films of different hues are provided in the same layer closest to the photocell is obtained, which is effective in improving sensitivity unevenness. Furthermore, since the dyeing pattern is formed by patterning at most once, it is effective in improving color unevenness. As described above, the present invention is highly effective in improving the performance of color filters.

Area, 5... Cyan stained area, 6... Green stained area, 7... Yellow stained area, 8... Stain-resistant film, 9
...Surface film.

Claims (1)

[Claims] In a color filter provided on a photocell of a light receiving element and having a dyed area corresponding to each photocell, the dyed area of each hue is formed in the same layer closest to the photocell. A color filter for a light receiving element characterized by having a structure in which: