JPS60165602A - Color separating filter - Google Patents

Color separating filter

Info

Publication number
JPS60165602A
JPS60165602A JP59023219A JP2321984A JPS60165602A JP S60165602 A JPS60165602 A JP S60165602A JP 59023219 A JP59023219 A JP 59023219A JP 2321984 A JP2321984 A JP 2321984A JP S60165602 A JPS60165602 A JP S60165602A
Authority
JP
Japan
Prior art keywords
filter
color
film
laminated
filters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59023219A
Other languages
Japanese (ja)
Inventor
Hideo Saeki
佐伯 英夫
Hikari Kawashima
川島 光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59023219A priority Critical patent/JPS60165602A/en
Publication of JPS60165602A publication Critical patent/JPS60165602A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0216Coatings
    • H01L31/02161Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Optical Filters (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

PURPOSE:To obtain a color separating filter which can control easily the color balance with each other by laminating a transparent color adjusting film for controlling the quantity of incident light color filters on a protective film for the color filters. CONSTITUTION:Photosensitive gelatin or the like is coated on a substrate and is dyed after patterning to form a Cy (cyan) filter layer 1. An intermediate reserve printing color film 2 is laminated thereon and a Ye (yellow) filter 3 is similarly formed. After a protective layer 4 is formed thereon, a transparent color adjusting film 5 is laminated on a G (green) filter 6 superposed with the Cy, Ye filter layers 1b, 3b in order to increase the lens effect of the filter 6. The quantity of the incident light of the filter 6 is increased by the lens effect of the film 5 by which the sensitivity is increased. The color separating filter which permits easy control of the color balance with each other is thus obtd.

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明は、微小なモザイクパターン或いはストライプ
よりなる色分解フィルタ、即ち、カラーフィルタに関し
、特に良好な色再現性が可能なカラーフィルタに関する
ものである。
[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a color separation filter consisting of minute mosaic patterns or stripes, that is, a color filter, and particularly relates to a color filter capable of good color reproducibility. .

〔従来技術〕[Prior art]

一般に、固体撮像素子、撮像管あるいは多色表示素子等
に使用されている、微小なパターンからなるモザイク状
又はストライブ状のカラーフィルタは、例えば、特公昭
52−17375号公報に記載されているような方法で
製造されている。これを第1図を用いて説明すると、ま
ずゼラチンやポリビニルアルコール等の水溶性樹脂に感
光性を付与した感光液を、ガラスやシリコンウェハ等か
らなる基板10上に均一に塗布し、これを乾燥して感光
膜を形成した後、写真製版技術を用いて所望のパターン
を形成し、この画像部分を所定の分光特性を有する染料
を用いて染色法等で着色してCy(シアン)フィルタ層
lを形成する。つづいて、これを透明な中間防染膜2で
被覆し、再び感光膜を形成しこれを露光現像して着色す
るという工程を順次繰り返して所望パターンの着色画像
、即ちYe(イエロー)フィルタ層3を上記Cyフィル
タ層1の一部に重ねて形成する。そしてその後、最上面
に透明な保護膜4を形成すると、Cyyフイルタa、Y
eeフイルタa、及び両フィルタ層1゜3の重なった部
分からなるG(グリーン)フィルタ6を有する色分解フ
ィルタが作成できる。この第1図に示したフィルタのよ
うに、2色、即ちCy、Yeフィルタ層1,3を重ねて
第3色のGフィルタ6を形成する手法は、その作業工程
を短縮することを目的として行なわれるものである。
Generally, a mosaic or stripe color filter consisting of a minute pattern, which is used in solid-state image pickup devices, image pickup tubes, multicolor display devices, etc., is described in, for example, Japanese Patent Publication No. 17375/1983. manufactured in such a way. To explain this using Fig. 1, first, a photosensitive liquid made by imparting photosensitivity to a water-soluble resin such as gelatin or polyvinyl alcohol is uniformly applied onto a substrate 10 made of glass or a silicon wafer, and then dried. After forming a photosensitive film, a desired pattern is formed using photolithography technology, and this image area is colored by a dyeing method using a dye having predetermined spectral characteristics to form a Cy (cyan) filter layer. form. Subsequently, this is coated with a transparent intermediate resist dyeing film 2, a photoresist film is again formed, this is exposed and developed, and the process of coloring is repeated sequentially to obtain a colored image of a desired pattern, that is, the Ye (yellow) filter layer 3. is formed overlapping a part of the Cy filter layer 1. After that, when a transparent protective film 4 is formed on the uppermost surface, Cyy filter a, Y
A color separation filter having an ee filter a and a G (green) filter 6 consisting of an overlapping portion of both filter layers 1.3 can be created. As in the filter shown in FIG. 1, the method of forming a third color G filter 6 by overlapping two color filter layers 1 and 3, that is, Cy and Ye filter layers, is aimed at shortening the work process. It is done.

第2図は以上の工程により得られた第1図の色分解フィ
ルタの分光感度特性を示し、図中のG。
FIG. 2 shows the spectral sensitivity characteristics of the color separation filter of FIG. 1 obtained by the above steps, and G in the figure.

C)’、Yeはそれぞれフィルタ6、la、3aの分光
感度特性を示している。
C)' and Ye indicate the spectral sensitivity characteristics of the filters 6, la, and 3a, respectively.

従来の色分解フィルタは以上のように構成されているの
で、2色重ね合わせフィルタでは第3色の分光特性は重
ね合わせ2色の特性により決定されてしまい、それぞれ
相互の色バランスをコン1−ロールすることは非常に困
難である。また、それぞれの色バランスがコントロール
できるよう1固々にフィルタを設けた場合、防染膜の形
成、フィルタバターニング、染色という3つの工程をさ
らに増やさなければならないという問題があった。
Conventional color separation filters are configured as described above, so in a two-color superimposed filter, the spectral characteristics of the third color are determined by the characteristics of the two superimposed colors, and it is difficult to control the mutual color balance. It is very difficult to roll. In addition, when a single filter is provided so that the color balance of each color can be controlled, there is a problem in that the three steps of forming an anti-dye film, filter buttering, and dyeing must be further increased.

〔発明の概要〕[Summary of the invention]

この発明は、かかる点に鑑みてなされたもので、出力を
増加させたい所望の色フィルタの保護膜の上に、該色フ
ィルタへの入射光量を制御するための透明な色調整膜を
積層することにより、相互の色バランスを容易にコンI
・ロールできる色分解フィルタを提供することを目的と
している。
This invention has been made in view of the above, and includes laminating a transparent color adjustment film for controlling the amount of light incident on the color filter on the protective film of a desired color filter whose output is desired to be increased. This makes it easy to control mutual color balance.
- The purpose is to provide color separation filters that can be rolled.

〔発明の実施例〕[Embodiments of the invention]

以下、この発明の一実施例を図について説明する。第3
図において、10はガラスやシリコンウェハ等からなる
基板、1は該基板10上に所望のパターンで形成された
Cy(シアン)フィルり層、1aは該cyフィルタ層1
の一部パターンからなるcyyフイルタ2は上記基板1
0及び上記cyフィルタ層層上上積層され、後工程であ
るYe(イエロー)染色の際の防染膜となる中間防染膜
、3は上記基板10−ト及び上記cyフィルタ層1の他
の一部パターンlb上に上記中間防染ll12を介して
所望のパターンで形成されたYe(イエロー)フィルタ
層、3aは該Yeフィルタ層3の一部パターンからなる
Yeeフイルタあり、上記Cy5Yeフィルタ層1,3
の重なり合った部分、即ちCyフィルタ層1の一部パタ
ーン1b及びYeフィルタ層3の一部パターン3bによ
りG(グリーン)フィルタ6が形成されている。4は上
記中間防染膜2及び上記Yeフィルタ層層上上積層され
た保護膜、5は上記Gフィルタ6上の保護膜上に積層さ
れた透明な色調整膜である。
An embodiment of the present invention will be described below with reference to the drawings. Third
In the figure, 10 is a substrate made of glass or a silicon wafer, etc., 1 is a Cy (cyan) fill layer formed in a desired pattern on the substrate 10, and 1a is the cy filter layer 1.
The cyy filter 2 consisting of a partial pattern of
0 and the intermediate resist dyeing film which is laminated on the cy filter layer and serves as a resist dyeing film during Ye (yellow) dyeing which is a subsequent process; 3 is the other layer of the substrate 10 and the cy filter layer 1; A Ye (yellow) filter layer is formed in a desired pattern on the partial pattern lb through the intermediate resist dyeing ll12, 3a is a Ye filter consisting of a partial pattern of the Ye filter layer 3, and the Cy5Ye filter layer 1 is formed on the partial pattern lb. ,3
A G (green) filter 6 is formed by the overlapping portion, that is, the partial pattern 1b of the Cy filter layer 1 and the partial pattern 3b of the Ye filter layer 3. 4 is a protective film laminated on the intermediate resist dyeing film 2 and the Ye filter layer, and 5 is a transparent color adjustment film laminated on the protective film on the G filter 6.

次に該フィルタの製造方法について述べる。まず感光性
のゼラチン等を基板10上に塗布し、写真製版技術を用
いて所定のパターンを形成した後、これを染色してcy
フィルタ層1を形成する。次に中間防染膜2を積層し、
上記cyフィルタ層1と同様にしてYeフィルタ層3を
形成する。そしてその上に保護111i4を積層するま
では従来法と同じである。本実施例の製造方法では、該
保護膜4を積層した後、Cy、Yeフィルタ層1.3が
重なり合った部分、即ち、Gフィルタ6上のレンズ効果
を増して感度を上げるために、該フィルタ6上に透明な
色調整膜5を写真製版工程を適用して積層する。
Next, a method for manufacturing the filter will be described. First, photosensitive gelatin or the like is applied onto the substrate 10, a predetermined pattern is formed using photolithography, and then this is dyed to create a cy
A filter layer 1 is formed. Next, the intermediate resist dyeing film 2 is laminated,
A Ye filter layer 3 is formed in the same manner as the cy filter layer 1 described above. The process is the same as the conventional method until the protection layer 111i4 is laminated thereon. In the manufacturing method of this embodiment, after the protective film 4 is laminated, the filter is A transparent color adjustment film 5 is laminated on the film 6 using a photolithography process.

次に作用効果について説明する。本実施例では、Gフィ
ルタ6上に透明な色調整膜5が積層されているので、そ
のレンズ効果により該Gフィルタ6への入射光量が増し
、感度が増加する。従って、この色調整膜5の膜厚及び
/またはパターン寸法を調整すれば、CY、Yeフィル
タ層1,3の特性によって決るGフィルタ6の色再現性
を、個別にかつ微妙にコントロールすることができる。
Next, the effects will be explained. In this embodiment, since the transparent color adjustment film 5 is laminated on the G filter 6, the amount of light incident on the G filter 6 increases due to its lens effect, and the sensitivity increases. Therefore, by adjusting the film thickness and/or pattern dimensions of this color adjustment film 5, the color reproducibility of the G filter 6, which is determined by the characteristics of the CY and Ye filter layers 1 and 3, can be individually and delicately controlled. can.

第4図はG(グリーン)の分光感度特性の測定結果を示
す。図中、曲線AはGフィルタ6上に色調整膜を積層し
ていない第1図の従来のフィルタをデバイス上に積層し
測定したもので、曲線B。
FIG. 4 shows the measurement results of the spectral sensitivity characteristics of G (green). In the figure, curve A is measured by laminating the conventional filter of FIG. 1 on the device, in which no color adjustment film is laminated on the G filter 6, and curve B is curve B.

Cは、Gフィルタ6上の保護膜4上に色調整膜5をそれ
ぞれ1.0μm 、 2.0μm積層したものを曲線A
と同様にして測定したものである。
Curve C is a curve A in which the color adjustment film 5 is laminated with a thickness of 1.0 μm and 2.0 μm on the protective film 4 on the G filter 6.
It was measured in the same manner.

図から分かるように、色調整膜5を積層することにより
、Gフィルタ6の分光感度を増加することができる。従
って、上記色調整膜5の膜厚を調整することにより感度
を良好にコントロールすることができ、他のフィルタl
a、3aとの色バランスを調整できる。
As can be seen from the figure, by stacking the color adjustment film 5, the spectral sensitivity of the G filter 6 can be increased. Therefore, by adjusting the film thickness of the color adjustment film 5, the sensitivity can be well controlled, and other filters
You can adjust the color balance with a and 3a.

第5図は色調整膜をGフィルタ上に積層したものの分光
感度特性を他のフィルタの特性とともに示す。図におい
て、第2図と同一符号は同一のものを示す。ここで、第
2図、第5図を比較すれば分かるように、本実施例では
他のフィルタla。
FIG. 5 shows the spectral sensitivity characteristics of a color adjustment film laminated on a G filter together with the characteristics of other filters. In the figure, the same reference numerals as in FIG. 2 indicate the same parts. Here, as can be seen by comparing FIG. 2 and FIG. 5, in this embodiment, another filter la is used.

3aには影響を与えずに、G(グリーン)の感度だけが
上がっている。このように、本実施例ではフィルタの感
度を個別にコントロールすることが可能となり、そのた
め設計も容易となる。
Only the sensitivity of G (green) is increased without affecting 3a. In this way, in this embodiment, it is possible to individually control the sensitivity of the filters, which facilitates the design.

なお、−上記実施例ではGフィルタの上のみに色調整膜
を設けたものを示したが、これはCy、ye等の準独の
フィルタ上に設計−Jてもよいし、複数のフィルタ上に
設置jても良い。
In addition, in the above embodiment, the color adjustment film was provided only on the G filter, but this may be designed on quasi-German filters such as Cy, ye, etc., or it may be designed on multiple filters. It may be installed in

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明に係る色分解フィルタによれば
、出力を増加させたい所望の色フィルタの保護膜の上に
、該色フィルタへの入射光量を制御するための透明な色
調整膜を積層したので、各色バランスを容易にコントロ
ールでき、良好な色可現性が得られる効果がある。
As described above, according to the color separation filter of the present invention, a transparent color adjustment film for controlling the amount of light incident on the color filter is provided on the protective film of the desired color filter whose output is desired to be increased. Since they are laminated, the balance of each color can be easily controlled and good color reproducibility can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来のカラーフィルタを示す図、第2図は従来
のフィルタを装備したデバイスの分光感度特性図、第3
図は本発明の一実施例によるカラーフィルタを示す図、
第4図は該フィルタにおける分光特性の色調整膜の膜厚
による変化を示す図、第5図は従来フィルタのGフィル
タ上に色調整膜を積層したデバイスの分光感度特性図で
ある。 1・・・Cy(シアン)フィルタ層、1a・・・Cyフ
ィルタ、2・・・中間防染膜、3・・・Ye(イエロー
)フィルタ層、3a・・・Yeフィルタ、4・・・保護
膜、5・・・色調整膜、6・・・G(グリーン)フィル
タ。 なお図中、同一符号は同−又は相当部分を示す。 代理人 大岩増雄 第2図 波長(nm)− 第4図 波長(nm)− 第5図 う皮 長(nm)−
Figure 1 is a diagram showing a conventional color filter, Figure 2 is a spectral response characteristic diagram of a device equipped with a conventional filter, and Figure 3 is a diagram showing a conventional color filter.
The figure shows a color filter according to an embodiment of the present invention;
FIG. 4 is a diagram showing changes in the spectral characteristics of the filter depending on the thickness of the color adjustment film, and FIG. 5 is a diagram of the spectral sensitivity characteristics of a device in which the color adjustment film is laminated on the G filter of the conventional filter. DESCRIPTION OF SYMBOLS 1... Cy (cyan) filter layer, 1a... Cy filter, 2... Intermediate resisting film, 3... Ye (yellow) filter layer, 3a... Ye filter, 4... Protection Film, 5... Color adjustment film, 6... G (green) filter. In the drawings, the same reference numerals indicate the same or equivalent parts. Agent Masuo Oiwa Fig. 2 Wavelength (nm) - Fig. 4 Wavelength (nm) - Fig. 5 Caries length (nm) -

Claims (1)

【特許請求の範囲】 111 それぞれ所定の分光特性を有する複数の色フィ
ルタと、該色フィルタ上に積層されたフィルタ保#!繞
と、上記複数の色フィルタのうちの所望の色フィルタの
保護膜上に積層され該色フィルタへの入射光量を制御す
る透明な色調整膜とを備えたことを特徴とする色分解フ
ィルタ。 (2)上記複数の色フィルタとして、基板−Fに所望の
パターンで形成されたシアンフィルタ層の一部パターン
からなるシアンフィルタ、上記基板上及び上記シアンフ
ィルタ層の他の一部パターン上に透明な中間防染膜を介
して所望のパターンで形成されたイエローフィルタ層の
一部パターンからなるイエローフィルタ、及び上記両フ
ィルタの重なった部分からなるグリーンフィルタが設け
られており、上記透明な色調整膜は上記グリーンフィル
タ上に形成されていることを特徴とする特許請求の範囲
第1項記載の色分解フィルタ。
[Claims] 111 A plurality of color filters each having predetermined spectral characteristics, and a filter retainer laminated on the color filters! A color separation filter comprising: a canopy; and a transparent color adjustment film laminated on a protective film of a desired color filter among the plurality of color filters to control the amount of light incident on the color filter. (2) The plurality of color filters include a cyan filter consisting of a partial pattern of a cyan filter layer formed in a desired pattern on the substrate-F, and a transparent filter formed on the substrate and another partial pattern of the cyan filter layer. A yellow filter consisting of a partial pattern of a yellow filter layer formed in a desired pattern through an intermediate resist dyeing film, and a green filter consisting of an overlapping portion of both of the above filters are provided, and the above transparent color adjustment 2. The color separation filter according to claim 1, wherein a film is formed on the green filter.
JP59023219A 1984-02-08 1984-02-08 Color separating filter Pending JPS60165602A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59023219A JPS60165602A (en) 1984-02-08 1984-02-08 Color separating filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59023219A JPS60165602A (en) 1984-02-08 1984-02-08 Color separating filter

Publications (1)

Publication Number Publication Date
JPS60165602A true JPS60165602A (en) 1985-08-28

Family

ID=12104540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59023219A Pending JPS60165602A (en) 1984-02-08 1984-02-08 Color separating filter

Country Status (1)

Country Link
JP (1) JPS60165602A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62217203A (en) * 1986-03-19 1987-09-24 Stanley Electric Co Ltd Color filter forming method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62217203A (en) * 1986-03-19 1987-09-24 Stanley Electric Co Ltd Color filter forming method

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