JP2751375B2 - Solid-state imaging device - Google Patents
Solid-state imaging deviceInfo
- Publication number
- JP2751375B2 JP2751375B2 JP1108191A JP10819189A JP2751375B2 JP 2751375 B2 JP2751375 B2 JP 2751375B2 JP 1108191 A JP1108191 A JP 1108191A JP 10819189 A JP10819189 A JP 10819189A JP 2751375 B2 JP2751375 B2 JP 2751375B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- hue
- light receiving
- receiving element
- color filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000003384 imaging method Methods 0.000 title claims description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 28
- 229910052782 aluminium Inorganic materials 0.000 claims description 28
- 239000011347 resin Substances 0.000 claims description 19
- 229920005989 resin Polymers 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 16
- 239000010410 layer Substances 0.000 description 57
- 238000004043 dyeing Methods 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 239000002344 surface layer Substances 0.000 description 4
- 108010010803 Gelatin Proteins 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229920000159 gelatin Polymers 0.000 description 3
- 239000008273 gelatin Substances 0.000 description 3
- 235000019322 gelatine Nutrition 0.000 description 3
- 235000011852 gelatine desserts Nutrition 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000010030 laminating Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Landscapes
- Transforming Light Signals Into Electric Signals (AREA)
- Color Television Image Signal Generators (AREA)
- Solid State Image Pick-Up Elements (AREA)
Description
本発明は、基板上の受光素子群の一部にアルミニウム
皮膜を被覆し、他の受光素子群に複数の色相のカラーフ
ィルタ層を段階的に積層して形成した固体撮像素子に関
するものである。The present invention relates to a solid-state imaging device in which a part of a light receiving element group on a substrate is coated with an aluminum film, and a color filter layer having a plurality of hues is stacked stepwise on another light receiving element group.
一般に、この種のアルミニウム皮膜を一部に施し、且
つ他の部分にカラーフィルタ層を備えた固体撮像素子は
種々の構造のものが知られており、例えば、第３〜４図
に示したような構成を有している。 同図において、１は例えば半導体ウェハから所定の大
きさに切断されたシリコン基板であり、該基板に多数の
受光素子群２が設けられており、該受光素子群の一部に
所定厚さのアルミニウム皮膜３がフレーム状に被覆さ
れ、該アルミニウム皮膜３で囲まれた内側に複数の色相
のカラーフィルタ層４が設けられている。前記アルミニ
ウム皮膜３は、受光素子群２の一部を遮光するために施
されるものであり、この遮光された受光素子群と前記カ
ラーフィルタ層４で覆われている受光素子群との間の電
位差を見て、カラーフィルタ層４で覆われている受光素
子群が受光したかどうかを判定するようになっている。 又、前記カラーフィルタ層４は、一般的に第５図
（Ａ）〜（Ｄ）に示したようにして形成される。即ち、
アルミニウム皮膜３が被覆された（（Ａ）図）基板１上
に第１層目の色相５を形成するためにゼラチンをスピン
コートし（（Ｂ）図）、第１層目の色相として残す部分
が露光される所定のパターンマスクを使用して露光し現
像すると、部分的に受光素子に対応する部分が残る
（（Ｃ）図）。その残った部分を公知の染色手段により
例えば赤色に染色して第１層目の色相を形成する。次に
透明な樹脂をスピンコートして中間層６を形成し、表面
を略平坦にしてから第２層目の色相７を前記同様にして
形成する（（Ｄ）図）。この第２層目の色相７は緑色で
ある。更に、前記同様にして中間層８及び第３層目の青
色の色相９が形成され、その表面に保護を兼ねた表面層
10がスピンコートされている。尚、11は基板に設けられ
た複数の電極である。In general, various types of solid-state imaging devices having an aluminum film of this type partially applied and a color filter layer provided at another portion are known, for example, as shown in FIGS. Configuration. In FIG. 1, reference numeral 1 denotes, for example, a silicon substrate cut to a predetermined size from a semiconductor wafer, on which a large number of light receiving element groups 2 are provided, and a part of the light receiving element group having a predetermined thickness. The aluminum film 3 is covered in a frame shape, and a color filter layer 4 having a plurality of hues is provided inside the frame surrounded by the aluminum film 3. The aluminum film 3 is provided to shield a part of the light receiving element group 2 from light, and is provided between the light-shielded light receiving element group and the light receiving element group covered with the color filter layer 4. On the basis of the potential difference, it is determined whether the light receiving element group covered with the color filter layer 4 has received light. The color filter layer 4 is generally formed as shown in FIGS. 5 (A) to 5 (D). That is,
Gelatin is spin-coated on substrate 1 covered with aluminum film 3 (FIG. 1A) to form first-layer hue 5 (FIG. 2B), and the portion left as the first-layer hue is formed. Exposure and development are performed using a predetermined pattern mask on which light is exposed, and a portion corresponding to the light receiving element partially remains (FIG. 14C). The remaining portion is dyed, for example, red by a known dyeing means to form a first-layer hue. Next, the intermediate layer 6 is formed by spin-coating a transparent resin, the surface is made substantially flat, and then the second-layer hue 7 is formed in the same manner as described above (FIG. (D)). The hue 7 of the second layer is green. Further, the intermediate layer 8 and the third layer of blue hue 9 are formed in the same manner as described above, and the surface layer serving as a protection is formed on the surface.
10 are spin coated. Incidentally, reference numeral 11 denotes a plurality of electrodes provided on the substrate.
前記従来例において、基板上に所定厚さのアルミニウ
ム層３が形成されているため、基板１との間に段差があ
り、第１層目の色相５を形成する際に、ゼラチンをスピ
ンコートすると、その段差の部分に対応又は隣設する色
相５の厚みが他の色相の部分よりも著しく厚くなり、そ
の断面形状がデルター状になる。そして、順次積層され
る中間層及び第２層目の色相７も同様にスピンコートさ
れるのであるが、前記第１層目の色相５の断面形状がデ
ルター状であることから、その形状に沿うように積層さ
れるのでやはり傾斜は避けられず、従ってアルミニウム
皮膜３が被覆された位置近傍に形成される色相の断面形
状が他の中央部の形成される色相に比べて変型してお
り、光の屈折に差があって光学的にバラツキが生じ、品
質の低下を来すと云う課題を有している。In the conventional example, since the aluminum layer 3 having a predetermined thickness is formed on the substrate, there is a step between the aluminum layer 3 and the substrate 1, and when forming the hue 5 of the first layer, when the gelatin is spin-coated, The thickness of the hue 5 corresponding to or adjacent to the step becomes significantly thicker than the other hues, and the cross-sectional shape becomes a delta shape. Then, the hue 7 of the intermediate layer and the second layer, which are sequentially laminated, is also spin-coated in the same manner. However, since the cross-sectional shape of the hue 5 of the first layer is delta-shaped, it follows the shape. Therefore, the cross section of the hue formed in the vicinity of the position where the aluminum film 3 is coated is deformed as compared with the hue formed in the other central portion. There is a problem in that there is a difference in the refraction of the light, which results in an optical variation, resulting in a reduction in quality.
前記従来例の課題を解決する具体的手段として本発明
は、基板上の受光素子群の一部にはアルミニウム皮膜が
被覆され、その他の受光素子上には該アルミニウム皮膜
と略同じ厚さで透明な樹脂層が形成されており、更に、
複数の色相のカラーフィルタ層が、該透明な樹脂層を介
して前記受光素子上に積層されていることを特徴とする
固体撮像素子を提供するものであり、前記アルミニウム
の被覆により生じた段差を解消するための樹脂層を設け
ることにより、その上部に積層される色相及び中間層が
全体的に平坦になって、特に該色相の断面形状が全て同
一となり、光学的バラツキが解消できるのである。As a specific means for solving the problem of the conventional example, the present invention is directed to a light receiving element group on a substrate in which a part of the light receiving element is coated with an aluminum film, and the other light receiving elements are transparent with substantially the same thickness as the aluminum film. Resin layer is formed,
A color filter layer having a plurality of hues is provided on the light-receiving element via the transparent resin layer to provide a solid-state imaging device, wherein a step caused by the aluminum coating is removed. By providing the resin layer for eliminating the hue, the hue and the intermediate layer laminated on the resin layer are entirely flat, and especially, the cross-sectional shapes of the hue are all the same, so that the optical variation can be eliminated.
次に本発明を図示の実施例により更に詳しく説明す
る。尚、理解を容易にするため、従来例と同一部分には
同一符号を付してその詳細を省略する。 まず、第１図において、１は半導体ウェハから所定の
大きさに切断されたシリコン基板であり、該基板に多数
の受光素子群２が設けられており、これら受光素子群の
一部に所定厚さのアルミニウム皮膜３が被覆され、該ア
ルミニウム皮膜３は、その平面形状が例えばＩ字状、Ｌ
字状など種々の形状に形成できるが、図示の実施例では
フレーム状に形成した例を示してある。そして、このア
ルミニウム皮膜３で囲まれた内側に複数の色相のカラー
フィルタ層４が設けられる。このカラーフィルタ層４を
形成するに先立って、前記アルミニウム皮膜３で囲まれ
た内側に略同じ厚さの透明な樹脂層12を形成し、前記カ
ラーフィルタ層４が形成される領域において、アルミニ
ウム皮膜３と基板１との間の段差を実質的になくした点
に本発明の特徴が存するのである。 即ち、第２図（Ａ）〜（Ｆ）に示したように、基板１
の光素子群２の一部に所定厚さのアルミニウム皮膜３が
フレーム状に被覆された後に、感光性の透明な樹脂をス
ピンコートし（（Ｂ）図）、カラーフィルタ層４が形成
される領域のみが露光するパターンマスクを使用して露
光し、次に現像してカラーフィルタ層４が形成される領
域に透明な樹脂層12を形成する（（Ｃ）図）。このよう
にして形成された透明な樹脂層12は実質的に前記アルミ
ニウム皮膜３と略同じ厚さになる。 この透明な樹脂層12の上部にカラーフィルタ層４が形
成される。まず、アルミニウム皮膜３と透明な樹脂層12
の上部に第１層目の色相７を形成するためにゼラチンを
スピンコートし（（Ｄ）図）、第１層目の色相として残
す部分が露光される所定のパターンマスクを使用して露
光し現象すると、部分的に受光素子に対応する部分が残
る（（Ｅ）図）。その残った部分を公知の染色手段によ
り緑色に染色して第１層目の色相７を形成し、その上部
に透明な樹脂をスピンコートして中間層６を形成し、表
面を略平坦にする（（Ｆ）図）。 次に前記同様の手段により第２層目の色相５を形成す
る。この第２層目の色相５は赤色である。更に、前記同
様にして中間層８及び第３層目の青色の色相９が順次積
層して形成され、その表面に保護を兼ねた表面層10がス
ピンコートされる。 このように、カラーフィルタ層４が形成される領域に
透明な樹脂層12を形成することによって、アルミニウム
皮膜３と基板１との間の段差をなくし、その透明な樹脂
層12の上部に色相及び中間層を順次積層することによ
り、特にアルミニウム皮膜３の境界部分に近接して形成
される色相の厚みが全体的に均一になり、該色相を通過
する光の屈折率に大きな変化がなくなるのである。 尚、前記アルミニウム皮膜３の厚みは6000〜11000Å
であり、前記緑色及び赤色の色相7,5の染色前の厚みは1
0000〜13000Åで、染色後の厚みが15000〜16000Åとな
る。又、前記青色の色相９は、染色前の厚みが約4000Å
であり、染色後の厚みは約6000Åとなっている。更に、
各中間層6,8及び表面層10の厚みは10000〜11000Åであ
る。Next, the present invention will be described in more detail with reference to the illustrated embodiment. To facilitate understanding, the same parts as those of the conventional example are denoted by the same reference numerals, and the details are omitted. First, in FIG. 1, reference numeral 1 denotes a silicon substrate cut to a predetermined size from a semiconductor wafer, and a large number of light receiving element groups 2 are provided on the silicon substrate. Aluminum coating 3 having a planar shape of, for example, an I-shape, L
Although it can be formed in various shapes such as a character shape, the illustrated embodiment shows an example in which the frame is formed in a frame shape. A color filter layer 4 having a plurality of hues is provided inside the aluminum film 3. Prior to forming the color filter layer 4, a transparent resin layer 12 having substantially the same thickness is formed on the inside surrounded by the aluminum film 3, and an aluminum film is formed in a region where the color filter layer 4 is formed. The feature of the present invention lies in that the step between the substrate 3 and the substrate 1 is substantially eliminated. That is, as shown in FIGS. 2A to 2F, the substrate 1
After a part of the optical element group 2 is coated with an aluminum film 3 having a predetermined thickness in a frame shape, a photosensitive transparent resin is spin-coated (FIG. 2B) to form a color filter layer 4. Exposure is performed using a pattern mask that exposes only the area, and then development is performed to form a transparent resin layer 12 in the area where the color filter layer 4 is to be formed (FIG. 7C). The transparent resin layer 12 thus formed has substantially the same thickness as the aluminum film 3. The color filter layer 4 is formed on the transparent resin layer 12. First, the aluminum film 3 and the transparent resin layer 12
Is spin-coated with gelatin to form a first layer hue 7 (FIG. 4D), and is exposed using a predetermined pattern mask that exposes a portion left as the first layer hue. When this phenomenon occurs, a portion corresponding to the light receiving element partially remains (FIG. (E)). The remaining portion is dyed green by a known dyeing means to form a first-layer hue 7, and a transparent resin is spin-coated thereon to form an intermediate layer 6, and the surface is made substantially flat. (Figure (F)). Next, the hue 5 of the second layer is formed by the same means as described above. The hue 5 of the second layer is red. Further, the intermediate layer 8 and the third layer of blue hue 9 are sequentially laminated in the same manner as described above, and a surface layer 10 also serving as protection is spin-coated on the surface. As described above, by forming the transparent resin layer 12 in the region where the color filter layer 4 is formed, the step between the aluminum film 3 and the substrate 1 is eliminated, and the hue and color are formed on the transparent resin layer 12. By sequentially laminating the intermediate layers, the thickness of the hue formed particularly in the vicinity of the boundary portion of the aluminum film 3 becomes uniform as a whole, and the refractive index of light passing through the hue does not largely change. . The thickness of the aluminum coating 3 is 6000 to 11000〜
The thickness of the green and red hues 7, 5 before dyeing is 1
The thickness after dyeing is 15000-16000Å, at 0000-13000Å. The blue hue 9 has a thickness before dyeing of about 4000 mm.
The thickness after dyeing is about 6000 mm. Furthermore,
The thickness of each of the intermediate layers 6, 8 and the surface layer 10 is 10,000 to 11000 °.
以上説明したように本発明に係る固体撮像素子は、基
板上の受光素子群の一部にアルミニウム皮膜を被覆し、
他の受光素子に複数の色相のフィルタ層を積層した固体
撮像素子であって、前記アルミニウムの被覆により生じ
た段差を解消するための樹脂層を設け、該樹脂上に前記
カラーフィルタ層を積層した構成とすることにより、そ
の上部に積層される色相の内、アルミニウム皮膜の境界
部分に近接して形成される色相の厚みが全体的に均一に
なり、それによって該色相を通過する光の屈折率に大き
な変化がなくなり、フィルタ層における光学的バラツキ
が解消でき、製品の品質が安定すると共に性能が著しく
向上すると云う優れた効果を奏する。As described above, the solid-state imaging device according to the present invention covers a part of the light receiving element group on the substrate with the aluminum film,
A solid-state imaging device in which a filter layer of a plurality of hues is laminated on another light receiving element, wherein a resin layer for eliminating a step caused by the aluminum coating is provided, and the color filter layer is laminated on the resin. With this configuration, the thickness of the hue formed close to the boundary portion of the aluminum film among the hues laminated on the upper portion becomes entirely uniform, whereby the refractive index of light passing through the hue is increased. There is no great change, and optical variations in the filter layer can be eliminated, and the excellent effect of stabilizing the quality of the product and significantly improving the performance can be obtained.
第１図は本発明に係る固体撮像素子の要部を断面で示し
た拡大断面図、第２図（Ａ）〜（Ｆ）は同固体撮像素子
の製造工程を順次略示的に示した要部の拡大断面図、第
３図は従来例の固体撮像素子の略示的正面図、第４図は
第３図のIV−IV線に沿う拡大断面図、第５図（Ａ）〜
（Ｄ）は同従来例における固体撮像素子の製造工程を順
次略示的に示した要部の拡大断面図である。 １……基板、２……受光素子群 ３……アルミニウム皮膜 ４……カラーフィルタ層 ５……赤色の色相、6,8……中間層 ７……緑色の色相、９……青色の色相 10……表面層、12……透明な樹脂層FIG. 1 is an enlarged cross-sectional view showing a main part of a solid-state imaging device according to the present invention in a cross-sectional view, and FIGS. 2 (A) to 2 (F) are schematic views sequentially showing manufacturing steps of the solid-state imaging device. FIG. 3 is a schematic front view of a conventional solid-state imaging device, FIG. 4 is an enlarged sectional view taken along line IV-IV in FIG. 3, and FIGS.
FIG. 4D is an enlarged cross-sectional view of a main part schematically and sequentially showing a manufacturing process of the solid-state imaging device in the conventional example. DESCRIPTION OF SYMBOLS 1 ... Substrate 2, ... Light receiving element group 3 ... Aluminum film 4 ... Color filter layer 5 ... Red hue, 6, 8 ... Intermediate layer 7 ... Green hue, 9 ... Blue hue 10 ... surface layer, 12 ... transparent resin layer
───────────────────────────────────────────────────── フロントページの続き 合議体 審判長 張谷 雅人 審判官 橋本 武 審判官 河口 雅英 (56)参考文献 特開 昭63−161667（ＪＰ，Ａ) 特開 昭60−261278（ＪＰ，Ａ) 特開 昭59−36961（ＪＰ，Ａ) ────────────────────────────────────────────────── ─── Continuation of the front page Judge Masato Hariya Judge Judge Takeshi Hashimoto Judge Judge Masahide Kawaguchi (56) Reference JP-A-63-161667 (JP, A) Kaisho 59-36961 (JP, A)
Claims (2)
ム皮膜が被覆され、その他の受光素子上には、該受光素
子の全てを被覆する形状であって、前記アルミニウム皮
膜と略同じ厚さの透明な樹脂層が形成されており、更
に、複数の色相のカラーフィルタ層が、該透明な樹脂層
を介して前記受光素子上に積層されていることを特徴と
する固体撮像素子。An aluminum film covers a part of a light receiving element group on a substrate, and the other light receiving element has a shape covering all of the light receiving elements and has a thickness substantially equal to the aluminum film. A solid-state imaging device, wherein a transparent resin layer is formed, and a color filter layer of a plurality of hues is laminated on the light receiving element via the transparent resin layer.
て、第１層目のカラーフィルタ層が緑色であることを特
徴とする請求項１記載の固体撮像素子。2. The solid-state imaging device according to claim 1, wherein the first color filter layer of the plurality of hue color filter layers is green.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1108191A JP2751375B2 (en) | 1989-04-27 | 1989-04-27 | Solid-state imaging device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1108191A JP2751375B2 (en) | 1989-04-27 | 1989-04-27 | Solid-state imaging device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02285675A JPH02285675A (en) | 1990-11-22 |
| JP2751375B2 true JP2751375B2 (en) | 1998-05-18 |
Family
ID=14478315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1108191A Expired - Lifetime JP2751375B2 (en) | 1989-04-27 | 1989-04-27 | Solid-state imaging device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2751375B2 (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5936961A (en) * | 1982-08-25 | 1984-02-29 | Sanyo Electric Co Ltd | Color solid-state image pick-up element |
| JPS60261278A (en) * | 1984-06-08 | 1985-12-24 | Toppan Printing Co Ltd | Color solid-state image pickup element |
| JPS63161667A (en) * | 1986-12-25 | 1988-07-05 | Nec Corp | Solid-state image sensor |
-
1989
- 1989-04-27 JP JP1108191A patent/JP2751375B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02285675A (en) | 1990-11-22 |
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