JPH03230101A - Color solid state image pickup device and production thereof - Google Patents
Color solid state image pickup device and production thereofInfo
- Publication number
- JPH03230101A JPH03230101A JP2025436A JP2543690A JPH03230101A JP H03230101 A JPH03230101 A JP H03230101A JP 2025436 A JP2025436 A JP 2025436A JP 2543690 A JP2543690 A JP 2543690A JP H03230101 A JPH03230101 A JP H03230101A
- Authority
- JP
- Japan
- Prior art keywords
- color
- layer
- image pickup
- light
- state image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000007787 solid Substances 0.000 title abstract 5
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 238000003384 imaging method Methods 0.000 claims description 34
- 238000000034 method Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 9
- 238000004040 coloring Methods 0.000 claims description 4
- 239000010410 layer Substances 0.000 abstract description 55
- 239000011347 resin Substances 0.000 abstract description 15
- 229920005989 resin Polymers 0.000 abstract description 15
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 239000011247 coating layer Substances 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 7
- 238000004043 dyeing Methods 0.000 description 5
- 108010010803 Gelatin Proteins 0.000 description 3
- 229920000159 gelatin Polymers 0.000 description 3
- 239000008273 gelatin Substances 0.000 description 3
- 235000019322 gelatine Nutrition 0.000 description 3
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- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
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- 235000013372 meat Nutrition 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Color Television Image Signal Generators (AREA)
- Optical Filters (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明はカラーフィルタを有するカラー固体撮像装置と
その製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a color solid-state imaging device having a color filter and a method for manufacturing the same.
従来の技術
近年、固体撮像装置をカラー化する方法として、固体撮
像装置の形成された基板上に直接カラーフィルタを形成
する方法が主流になってきている。従来のカラー固体撮
像装置およびその製造方法を図面を参照しながら説明す
る。2. Description of the Related Art In recent years, as a method for colorizing a solid-state imaging device, a method of directly forming a color filter on a substrate on which a solid-state imaging device is formed has become mainstream. A conventional color solid-state imaging device and its manufacturing method will be described with reference to the drawings.
第３図は従来のカラー固体撮像装置の構造を示す部分拡
大断面図であり、第４図の（ａ）〜（母は第３図に示す
従来のカラー固体撮像装置の製造方法を工程順に示した
部分拡大断面図である。第３図および第４図の（ａｌ〜
（ｇ）において、１は固体撮像装置の形成された基板、
２は遠紫外線ポジ型透明樹脂、３は受光部、４はマゼン
タ層、５はイエロー層、６はシアン層を示している。FIG. 3 is a partially enlarged cross-sectional view showing the structure of a conventional color solid-state imaging device, and FIG. FIG. 4 is a partially enlarged sectional view of FIG.
In (g), 1 is a substrate on which a solid-state imaging device is formed;
Reference numeral 2 indicates a deep ultraviolet positive type transparent resin, 3 indicates a light receiving section, 4 indicates a magenta layer, 5 indicates a yellow layer, and 6 indicates a cyan layer.
まず第３図においで、従来のカラー固体撮像装置の構造
について説明する。First, referring to FIG. 3, the structure of a conventional color solid-state imaging device will be explained.
固体撮像装置の形成された基板１表面を平坦化するため
に遠紫外線ポジ型透明樹脂２により平坦化層が形成され
、目的とする受光部３上にマゼンタ層４．イエロー層５
．シアン層６が各々形成され、各フィルタ間は色の混合
防止のために平坦化に用いたものと同様の遠紫外線ポジ
型透明樹脂２により中間層が形成されている。また、最
後に表面保護用として遠赤外線ボン型透明樹脂２を用い
てトップコート層が形成され、カラー固体撮像装置を実
現している。In order to flatten the surface of the substrate 1 on which the solid-state imaging device is formed, a flattening layer is formed of a far-ultraviolet positive type transparent resin 2, and a magenta layer 4. yellow layer 5
．． A cyan layer 6 is formed on each filter, and an intermediate layer is formed between each filter using a deep ultraviolet positive type transparent resin 2 similar to that used for flattening in order to prevent color mixing. Finally, a top coat layer is formed using a far-infrared bron-type transparent resin 2 for surface protection, thereby realizing a color solid-state imaging device.
次に第４図において従来のカラー固体撮像装置の製造方
法について工程順に説明する。Next, referring to FIG. 4, a conventional method for manufacturing a color solid-state imaging device will be explained in order of steps.
まず第４図（ａｌにおいて、固体撮像装置の形成された
基板１上に遠紫外線ポジ型透明樹脂２を塗布し、表面を
平坦化する。続いてカラーフィルタ層として感光性を持
たせ、かつ粘度調整したゼラチンなどの感光性材料を塗
布し、露光、現像・リンス処理により目的とするパター
ンを形成し、さらにマゼンタ染料で染色することにより
、第４図（ｂｌに示すようにマゼンタ層４が形成される
。そして次の工程での混色を防止する目的から前記平坦
化で使用した遠紫外線ポジ型透明樹脂２を中間層として
塗布した状態が第４図（Ｃ）である。以下、染料を変え
て第４図（ｂ）、第４図（Ｃ）と同様な工程を行なうこ
とにより、第４図（ｆｌに示すようにマゼンタ層４、イ
エロー層５．シアン層６の各フィルタが形成され、最後
に表面保護として、平坦化および中間層に用いているも
のと同じ遠紫外線ポジ型透明樹脂２を塗布して、カラー
固体撮像装置を実現している。First, in FIG. 4 (al), a deep ultraviolet positive type transparent resin 2 is coated on the substrate 1 on which the solid-state imaging device is formed, and the surface is flattened. A magenta layer 4 is formed as shown in Figure 4 (bl) by applying a photosensitive material such as adjusted gelatin, forming the desired pattern by exposure, development and rinsing, and further dyeing with magenta dye. Figure 4(C) shows the state in which the deep ultraviolet positive type transparent resin 2 used in the planarization is applied as an intermediate layer in order to prevent color mixing in the next step. By performing the same steps as shown in FIG. 4(b) and FIG. 4(C), the magenta layer 4, yellow layer 5, and cyan layer 6 filters are formed as shown in FIG. 4(fl). Finally, as a surface protection, deep ultraviolet positive type transparent resin 2, which is the same as that used for flattening and the intermediate layer, is applied to realize a color solid-state imaging device.
発明が解決しようとする課題
しかしながら、上記従来の構成では、カラーフィルタの
トータル厚みが厚くなるだけでなく、マゼンタ、イエロ
ー、シアンの各フィルタが高さ方向で段違い構造となる
ため、パターンサイズ、中間の厚みいかんによっては光
が漏れて受光部に入射する場合があり、フリッカ等画質
に悪影響をおよぼす。カラーフィルタのトータル厚みが
厚くなると、受光部とそれに対応するフィルタまでの距
離が大きくなり、フィルタを通過した光が隣接した受光
部に入射し、混色を引き起こすという問題もある。また
、従来のフィルタ構造では受光部への集光が不十分であ
るため、感度の向上は望めなかった。Problems to be Solved by the Invention However, with the above conventional configuration, not only does the total thickness of the color filter increase, but also the magenta, yellow, and cyan filters have a structure with different levels in the height direction. Depending on the thickness of the screen, light may leak and enter the light receiving section, causing flicker and other negative effects on image quality. When the total thickness of the color filter increases, the distance between the light receiving section and the corresponding filter increases, and there is also the problem that light passing through the filter enters an adjacent light receiving section, causing color mixture. Furthermore, with the conventional filter structure, it was not possible to improve the sensitivity because the light was insufficiently focused on the light receiving section.
本発明は上記従来の課題を解決するものであり、隣接受
光部間で光の混入もなく、また感度を向上させ、優れた
画質を提供するカラー固体撮像装置およびその製造方法
を提供することを目的とする。The present invention solves the above-mentioned conventional problems, and aims to provide a color solid-state imaging device and a method for manufacturing the same, which eliminates the mixing of light between adjacent light-receiving sections, improves sensitivity, and provides excellent image quality. purpose.
課題を解決するための手段
上記従来の課題を解決するために本発明におけるカラー
固体撮像装置は以下のような構造を有している。すなわ
ち固体撮像装置の形成された基板表面を平坦化した後、
平坦化層上で目的とする受光部上にマゼンタ、イエロー
、シアン、グリーンなどの各フィルタを形成する際、前
記各フィルタ形状を丸みをもった半球状のマイクロレン
ズ形状とすることを特徴としている。Means for Solving the Problems In order to solve the above-mentioned conventional problems, the color solid-state imaging device according to the present invention has the following structure. That is, after flattening the substrate surface on which the solid-state imaging device is formed,
When forming magenta, yellow, cyan, green, etc. filters on the target light-receiving area on the flattening layer, each of the filters is shaped into a rounded hemispherical microlens shape. .
また第２の発明であるカラー固体撮像装置の製造方法は
、固体撮像装置の形成された基板上にカラーマイクロレ
ンズ層を形成する方法の発明であり、例えばネガ型の感
光性材料を用いて、デフォーカス露光、現像処理によっ
てマイクロレンズを形成し、レジストによりマスキング
し、目的とする受光部上のマイクロレンズ部のみ窓開け
し、目的とする染料で染色し、さらに染料を変えて前記
レジストによるマスキング、窓開けおよび染色を繰り返
すことにより、複数色のカラーマイクロレンズ層を同一
層で有するという構成を有している。The second invention, a method for manufacturing a color solid-state imaging device, is an invention of a method for forming a color microlens layer on a substrate on which a solid-state imaging device is formed, for example, using a negative photosensitive material. Microlenses are formed by defocus exposure and development processing, masked with a resist, a window is opened only on the microlens portion above the target light-receiving area, dyed with the target dye, and then the dye is changed and masked with the resist. By repeating window opening and dyeing, it has a structure in which multiple color microlens layers are formed in the same layer.
なお、デフォーカス露光とは、適正フォーカス点よりフ
ォーカスをずらして露光することをいう。Note that defocus exposure refers to exposure with the focus shifted from the proper focus point.
作用
この構成によって、受光部に入射する光はカラーマイク
ロレンズ層のレンズ効果により、受光部に集光するため
、感度は向上する。また、複数色のカラーマイクロレン
ズを単層で形成できるため、カラーフィルタ構造は段違
い構造とはならず、さらにレンズ効果によって入射光は
集光されるため、不必要な光が漏れて受光部に入射した
り、隣接受光部間での混入もなくなる。それゆえ従来課
題とされていた画質上の悪影響は解消することができる
。また、平坦化層が厚くなり、結果的にカラーフィルタ
のトータル厚みが厚くなっても、マイクロレンズのレン
ズ効果によって、十分目的とする受光部に集光させるこ
とができるので、カラーフィルタの厚みに起因する隣接
受光部への光の混入も解消することができる。Effect: With this configuration, the light incident on the light receiving section is focused on the light receiving section by the lens effect of the color microlens layer, so that the sensitivity is improved. In addition, since color microlenses of multiple colors can be formed in a single layer, the color filter structure does not have a stepped structure, and since the incident light is condensed by the lens effect, unnecessary light may leak and reach the light receiving area. There is no possibility of light entering or mixing between adjacent light receiving sections. Therefore, the negative effects on image quality, which have been a problem in the past, can be eliminated. In addition, even if the flattening layer becomes thicker and the total thickness of the color filter becomes thicker, the lens effect of the microlens allows the light to be sufficiently focused on the intended light-receiving area, so the thickness of the color filter does not change. It is also possible to eliminate the contamination of light into adjacent light-receiving sections due to this.
マイクロレンズの形成はステッパーという露光装置を用
いて、例えばネガ型の感光性材料に対してフォーカスを
ずらして露光するというデフォーカス露光することによ
り、パターン角の形状をコントロールすることができる
ため、容易に丸みを帯びさせることができ、半球状のマ
イクロレンズを形成することができる。カラーマイクロ
レンズ形成は形成したマイクロレンズを、目的とする色
の染料で着色することによりカラー化することができる
。また複数色のカラーマイクロレンズを単層で有する構
造とするには、マイクロレンズに着色する際にレジスト
を用いて必要な箇所のマイクロレンズのみを窓開けし、
着色するという工程を繰り返すことによって可能である
。The formation of microlenses is easy because the shape of the pattern angle can be controlled by using an exposure device called a stepper, for example, by defocusing exposure of a negative photosensitive material with a shifted focus. can be rounded to form a hemispherical microlens. Color microlenses can be formed by coloring the formed microlenses with a dye of a desired color. Furthermore, in order to create a structure with multiple color microlenses in a single layer, when coloring the microlenses, a resist is used to open only the necessary areas of the microlenses.
This is possible by repeating the coloring process.
実施例
以下、本発明の実施例について図面を参照しながら説明
する。EXAMPLES Hereinafter, examples of the present invention will be described with reference to the drawings.
第１図は本発明における第１の発明に係るカラー固体撮
像装置の構造を示す部分拡大断面図であり、第２図ｆａ
ｔ〜−は本発明における第２の発明に係るカラー固体撮
像装置の製造方法を工程順に示した部分拡大断面図であ
る。第１図および第２図の（ａ）〜−において、１は固
体撮像装置の形成された基板、２は遠紫外線ポジ型透明
樹脂、３は受光部、４はマゼンタ層、５はイエロー層、
６はシアン層、７は感光性材料、８はマイクロレンズ、
９はレジスト、１０はグリーン層を示している。FIG. 1 is a partially enlarged sectional view showing the structure of a color solid-state imaging device according to the first aspect of the present invention, and FIG.
t-- are partially enlarged cross-sectional views illustrating a method for manufacturing a color solid-state imaging device according to a second aspect of the present invention in order of steps. In FIGS. 1 and 2 (a) to -, 1 is a substrate on which a solid-state imaging device is formed, 2 is a far-ultraviolet positive type transparent resin, 3 is a light receiving part, 4 is a magenta layer, 5 is a yellow layer,
6 is a cyan layer, 7 is a photosensitive material, 8 is a microlens,
9 indicates a resist, and 10 indicates a green layer.
まず第１図において本発明のカラー固体撮像装置の構成
について説明する。First, the configuration of the color solid-state imaging device of the present invention will be explained with reference to FIG.
固体撮像装置の形成された基板１、表面を平坦化するた
めに遠紫外線ポジ型透明樹脂２により平坦化層が形成さ
れ、その上に半球状のマゼンタ層４、イエロー層５．ン
アン層６．グリーン層１０の各カラーマイクロレンズが
同一層で存在し、前記カラーマイクロレンズ層上には表
面保護のために遠紫外線ポジ型透明樹脂２によりトップ
コート層が形成されている。A flattening layer is formed of a deep ultraviolet positive type transparent resin 2 to flatten the surface of a substrate 1 on which a solid-state imaging device is formed, and a hemispherical magenta layer 4, a yellow layer 5. N'an layer 6. Each of the color microlenses of the green layer 10 is present in the same layer, and a top coat layer is formed on the color microlens layer using a deep ultraviolet positive type transparent resin 2 for surface protection.
上記構造により、光は半球状のカラーマイクロレンズ層
を通り、受光部３に集光するため、感度の高いカラー固
体撮像装置を実現できる。With the above structure, light passes through the hemispherical color microlens layer and is focused on the light receiving section 3, so that a highly sensitive color solid-state imaging device can be realized.
次に第２図の（ａｌ〜−において本発明のカラー固体撮
像装置の製造方法について説明する。Next, a method for manufacturing the color solid-state imaging device of the present invention will be described in (al to --) of FIG.
第２図のｆａｔにおいて、固体撮像装置の形成された基
板１表面を遠紫外線ポジ型透明樹脂２を塗布することに
よって平坦化する。続いて（ｂｌにおいてマイクロレン
ズ層形成のために例えばネガ型の感光性を持たせ、かつ
粘度調整したゼラチン、カゼイン グリユーなどの感光
性材料７を塗布する。In the fat shown in FIG. 2, the surface of the substrate 1 on which the solid-state imaging device is formed is flattened by applying a far-ultraviolet positive type transparent resin 2. Subsequently, in order to form a microlens layer (bl), a photosensitive material 7 such as gelatin, casein gris, etc., which has negative photosensitivity and whose viscosity has been adjusted, is applied.
そして感光装置としてステッパーなどを用いてデフォー
カス露光し、現像・リンス処理を施し、半球状のマイク
ロレンズ８が形成された状態が第１図ｆｃ）である。続
いて前記形成したマイクロレンズ８をカラー化するため
に染色により着色するが、必要な受光部３上のマイクロ
レンズ８のみを染色するためにレジスト９により不要な
マイクロレンズ８をマスキングし、必要なマイクロレン
ズ８を窓開けした状態が第１図（ｄｌである。そして例
えばマゼンタ染料で染色し、マゼンタ層４が形成された
状態が第１図ｆｅ）である。以下、染料を変えて前記ｆ
ｄｌ〜ｔｅｌのようにレジスト９によりマスキングと窓
開け、染色の工程を繰り返し、レジスト９を除去するこ
とにより、第１図＋１１に示すように同一層に半球状の
マイクロレンズ形状を有するマゼンタ層４．イエロー層
５．シアン層６．グリーン層１０を形成することができ
る。最後に表面保護として前記第１図（ａｌで用いた遠
紫外線ポジ型透明樹脂２を塗布してトップコート層を形
成し、カラーフィルタが完成し、カラー固体撮像装置を
実現した状態が第１図−である。Then, defocus exposure is carried out using a stepper or the like as a photosensitive device, followed by development and rinsing processing to form hemispherical microlenses 8, as shown in FIG. 1 fc). Next, the formed microlenses 8 are colored by dyeing, but in order to dye only the necessary microlenses 8 on the light receiving part 3, unnecessary microlenses 8 are masked with a resist 9, and the necessary microlenses 8 are colored. The state in which the microlens 8 is opened is shown in FIG. 1 (dl), and the state in which it is dyed with, for example, magenta dye and a magenta layer 4 is formed is shown in FIG. 1 (fe). Below, by changing the dye,
By repeating the process of masking, window opening, and dyeing using the resist 9 as shown in dl to tel and removing the resist 9, a magenta layer 4 having a hemispherical microlens shape is formed in the same layer as shown in FIG. 1+11. ．． Yellow layer 5. Cyan layer 6. A green layer 10 can be formed. Finally, a top coat layer is formed by coating the far-UV positive type transparent resin 2 used in Figure 1 (al) as a surface protection, and the color filter is completed, and Figure 1 shows the state in which the color solid-state imaging device has been realized. − is.
以上のように本発明の実施例によれば、ネガ型の感光性
を持たせたゼラチンなどの感光性材料７をデフォーカス
露光し、現像・リンス処理することにより、マイクロレ
ンズ８形成が可能であり、レジストマスクを用いて選択
的に染色することにより、同一層に複数色のカラーマイ
クロレンズの形成が可能である。As described above, according to the embodiment of the present invention, the microlens 8 can be formed by defocusing the photosensitive material 7, such as gelatin, which has negative photosensitivity, and then developing and rinsing the photosensitive material 7. By selectively dyeing using a resist mask, it is possible to form color microlenses of multiple colors in the same layer.
発明の効果
以上のように本発明はカラーフィルタの形状を半球状の
マイクロレンズ形状とすることにより、固体撮像装置上
の受光部に光を集光することができるため、従来のカラ
ー固体撮像装置と比較し感度が向上し、また、集光させ
ているため隣接受光部間での光の混入もない優れたカラ
ー固体撮像装置を実現できるものである。Effects of the Invention As described above, the present invention makes it possible to focus light on the light receiving section on the solid-state imaging device by making the color filter into a hemispherical microlens shape. It is possible to realize an excellent color solid-state image pickup device with improved sensitivity compared to the previous one, and since light is condensed, there is no light mixing between adjacent light receiving sections.
第１図は本発明の実施例におけるカラー固体撮像装置の
構造を示す部分拡大図、第２図は本発明の実施例におけ
るカラー固体撮像装置の製造方法を工程順に示した部分
拡大断面図、第３図は従来例におけるカラー固体撮像装
置の構造を示す部分拡大断面図、第４図は従来例におけ
るカラー固体撮像装置の製造方法を工程順に示した部分
拡大断面図である。
１・・・・・・固体撮像装置の形成された基板、２・・
・・・・遠紫外線ポジ型透明樹脂、３・・・・・・受光
部、４・・・・・・マゼンタ層、５・・・・・・イエロ
ー層、６・・・・・・ンアン層、７・・・・・・感光性
材料、８・・・・・・マイクロレンズ、９・・・・・・
レジスト、１０・・・・・・グリーン層。
５ イエローな龜
６ ・シアン１
７ 尽光軒λυ日
？ マイクロレン５−
第２図
茗２図
蔦３図
第４図
篤ζ図FIG. 1 is a partially enlarged view showing the structure of a color solid-state imaging device according to an embodiment of the present invention, FIG. FIG. 3 is a partially enlarged sectional view showing the structure of a conventional color solid-state imaging device, and FIG. 4 is a partially enlarged sectional view showing a method for manufacturing a conventional color solid-state imaging device in order of steps. 1... Substrate on which a solid-state imaging device is formed, 2...
..... Deep ultraviolet positive type transparent resin, 3 ..... Light receiving part, 4 ..... Magenta layer, 5 ..... Yellow layer, 6 ..... Nen layer , 7... Photosensitive material, 8... Microlens, 9...
Resist, 10...Green layer. 5 Yellow head 6 ・Cyan 1 7 Jinkoken λυ day? Microlen 5- Fig. 2 Meat Fig. 2 Ivy Fig. 3 Fig. 4 Atsushi ζ Fig.
Claims (2)
クロレンズ形状を有するカラーフィルタを備えることを
特徴とするカラー固体撮像装置。(1) A color solid-state imaging device characterized by comprising a color filter having a hemispherical microlens shape on a substrate on which the solid-state imaging device is formed.
ることによってマイクロレンズを形成する工程と、前記
マイクロレンズをレジストマスクを用いて選択的に着色
する工程によりカラーフィルタを作ることを特徴とする
カラー固体撮像装置の製造方法。(2) A color filter characterized in that a color filter is made by a step of forming microlenses by subjecting a photosensitive material to defocused exposure and development, and a step of selectively coloring the microlenses using a resist mask. A method for manufacturing a solid-state imaging device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2025436A JPH03230101A (en) | 1990-02-05 | 1990-02-05 | Color solid state image pickup device and production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2025436A JPH03230101A (en) | 1990-02-05 | 1990-02-05 | Color solid state image pickup device and production thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03230101A true JPH03230101A (en) | 1991-10-14 |
Family
ID=12165940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025436A Pending JPH03230101A (en) | 1990-02-05 | 1990-02-05 | Color solid state image pickup device and production thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03230101A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05206429A (en) * | 1992-01-27 | 1993-08-13 | Toshiba Corp | Colored microlens array and its manufacture |
| EP0825460A2 (en) * | 1996-08-16 | 1998-02-25 | Dai Nippon Printing Co., Ltd. | Lenticular lens sheet, display front plate and transmission type projection screen |
| WO1998019185A1 (en) * | 1996-10-31 | 1998-05-07 | Mitsubishi Rayon Co., Ltd. | Low chromatic aberration rod lens array, its unit and image scanner employing them |
| KR19980056449A (en) * | 1996-12-28 | 1998-09-25 | 문정환 | Color solid-state imaging device and manufacturing method thereof |
| EP0911654A1 (en) * | 1997-10-22 | 1999-04-28 | Dai Nippon Printing Co., Ltd. | Lenticular lens sheet and process for producing the same |
| EP0945743A1 (en) * | 1998-03-27 | 1999-09-29 | Sony Corporation | Solid-state image sensing device and method for manufacturing the same |
| JP2001356470A (en) * | 2000-06-13 | 2001-12-26 | Ricoh Opt Ind Co Ltd | Method for producing three-dimensional structure using distributed density mask |
| JP2006186203A (en) * | 2004-12-28 | 2006-07-13 | Matsushita Electric Ind Co Ltd | Solid-state image pick-up device, manufacturing method therefor, and camera |
| KR100784391B1 (en) * | 2006-09-06 | 2007-12-11 | 삼성전자주식회사 | Color filter array and cmos image senser including thereof |
| JP2009063777A (en) * | 2007-09-05 | 2009-03-26 | Sharp Corp | Colored microlens array and manufacturing method, collar solid imaging element and manufacturing method, color display device and manufacturing method, and electronic information equipment |
| WO2023243289A1 (en) * | 2022-06-15 | 2023-12-21 | 住友化学株式会社 | Lens element |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5466926A (en) * | 1992-01-27 | 1995-11-14 | Kabushiki Kaisha Toshiba | Colored microlens array and method of manufacturing same |
| JPH05206429A (en) * | 1992-01-27 | 1993-08-13 | Toshiba Corp | Colored microlens array and its manufacture |
| CN1100271C (en) * | 1996-08-16 | 2003-01-29 | 大日本印刷株式会社 | Lenticular lens sheet, display front plate and transmission type projection screen |
| EP0825460A2 (en) * | 1996-08-16 | 1998-02-25 | Dai Nippon Printing Co., Ltd. | Lenticular lens sheet, display front plate and transmission type projection screen |
| EP0825460A3 (en) * | 1996-08-16 | 1998-08-12 | Dai Nippon Printing Co., Ltd. | Lenticular lens sheet, display front plate and transmission type projection screen |
| WO1998019185A1 (en) * | 1996-10-31 | 1998-05-07 | Mitsubishi Rayon Co., Ltd. | Low chromatic aberration rod lens array, its unit and image scanner employing them |
| US6449414B1 (en) | 1996-10-31 | 2002-09-10 | Mitsubishi Rayon Co., Ltd. | Low chromatic aberration rod lens array, its unit and image scanner employing them |
| KR19980056449A (en) * | 1996-12-28 | 1998-09-25 | 문정환 | Color solid-state imaging device and manufacturing method thereof |
| EP0911654A1 (en) * | 1997-10-22 | 1999-04-28 | Dai Nippon Printing Co., Ltd. | Lenticular lens sheet and process for producing the same |
| US6046855A (en) * | 1997-10-22 | 2000-04-04 | Dai Nippon Printing Co., Ltd. | Lenticular lens sheet and process for producing the same |
| EP0945743A1 (en) * | 1998-03-27 | 1999-09-29 | Sony Corporation | Solid-state image sensing device and method for manufacturing the same |
| US6255640B1 (en) | 1998-03-27 | 2001-07-03 | Sony Corporation | Solid-state image sensing device and method for manufacturing solid-state image sensing device |
| JP2001356470A (en) * | 2000-06-13 | 2001-12-26 | Ricoh Opt Ind Co Ltd | Method for producing three-dimensional structure using distributed density mask |
| JP4557373B2 (en) * | 2000-06-13 | 2010-10-06 | リコー光学株式会社 | Three-dimensional structure manufacturing method using concentration distribution mask |
| JP2006186203A (en) * | 2004-12-28 | 2006-07-13 | Matsushita Electric Ind Co Ltd | Solid-state image pick-up device, manufacturing method therefor, and camera |
| KR100784391B1 (en) * | 2006-09-06 | 2007-12-11 | 삼성전자주식회사 | Color filter array and cmos image senser including thereof |
| US7800666B2 (en) | 2006-09-06 | 2010-09-21 | Samsung Electronics Co., Ltd. | Color filter arrays compensating for wavelength offset due to crosstalk and methods of producing the same |
| JP2009063777A (en) * | 2007-09-05 | 2009-03-26 | Sharp Corp | Colored microlens array and manufacturing method, collar solid imaging element and manufacturing method, color display device and manufacturing method, and electronic information equipment |
| JP4576412B2 (en) * | 2007-09-05 | 2010-11-10 | シャープ株式会社 | Manufacturing method of colored microlens array, color solid-state imaging device and manufacturing method thereof, manufacturing method of color display device, manufacturing method of electronic information device |
| US8274031B2 (en) | 2007-09-05 | 2012-09-25 | Sharp Kabushiki Kaisha | Colored microlens array and manufacturing method for colored microlens array, color solid-state image capturing device and manufacturing method for color solid-state image capturing device, color display apparatus and manufacturing method for color display apparatus, and electronic information device |
| WO2023243289A1 (en) * | 2022-06-15 | 2023-12-21 | 住友化学株式会社 | Lens element |
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