CA1090453A - Surface-channel ccd image sensor with buried-channel output register - Google Patents
Surface-channel ccd image sensor with buried-channel output registerInfo
- Publication number
- CA1090453A CA1090453A CA282,034A CA282034A CA1090453A CA 1090453 A CA1090453 A CA 1090453A CA 282034 A CA282034 A CA 282034A CA 1090453 A CA1090453 A CA 1090453A
- Authority
- CA
- Canada
- Prior art keywords
- register
- channel
- charge
- channels
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012546 transfer Methods 0.000 claims abstract description 38
- 239000000758 substrate Substances 0.000 claims abstract description 36
- 239000004065 semiconductor Substances 0.000 claims abstract description 16
- 238000003860 storage Methods 0.000 claims abstract description 16
- 238000005036 potential barrier Methods 0.000 claims abstract description 10
- 239000002344 surface layer Substances 0.000 claims abstract description 6
- 230000004044 response Effects 0.000 claims abstract description 5
- 230000005855 radiation Effects 0.000 claims abstract description 3
- 230000004888 barrier function Effects 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- 229920005591 polysilicon Polymers 0.000 description 5
- 230000010354 integration Effects 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000000644 propagated effect Effects 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000003389 potentiating effect Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/15—Charge-coupled device [CCD] image sensors
- H10F39/153—Two-dimensional or three-dimensional array CCD image sensors
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB31953/76A GB1559860A (en) | 1976-12-14 | 1976-12-14 | Surface-channel ccd image sensor with buried-channel output register |
| GB31953/76 | 1976-12-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1090453A true CA1090453A (en) | 1980-11-25 |
Family
ID=10330840
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA282,034A Expired CA1090453A (en) | 1976-12-14 | 1977-07-05 | Surface-channel ccd image sensor with buried-channel output register |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4246591A (index.php) |
| JP (1) | JPS5317220A (index.php) |
| CA (1) | CA1090453A (index.php) |
| DE (1) | DE2734409C3 (index.php) |
| FR (1) | FR2360176A1 (index.php) |
| GB (1) | GB1559860A (index.php) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5558677A (en) * | 1978-10-26 | 1980-05-01 | Nec Corp | Charge transfer image pickup device and its driving method |
| JPS57139961A (en) * | 1981-02-23 | 1982-08-30 | Nec Corp | Solid state image pickup device |
| FR2551919B1 (fr) * | 1983-09-13 | 1986-10-10 | Thomson Csf | Dispositif photosensible a transfert de ligne |
| NL8500337A (nl) * | 1985-02-07 | 1986-09-01 | Philips Nv | Ladingsgekoppelde beeldopneeminrichting. |
| US4658278A (en) * | 1985-04-15 | 1987-04-14 | Rca Corporation | High density charge-coupled device imager and method of making the same |
| JPS6262553A (ja) * | 1985-09-12 | 1987-03-19 | Toshiba Corp | 固体撮像装置 |
| US5036937A (en) * | 1989-08-04 | 1991-08-06 | Yamaha Hatsudoki Kabushiki Kaisha | Exercise vehicle |
| DE69220126T2 (de) * | 1991-03-29 | 1997-12-04 | Philips Electronics Nv | Ladungsgekoppelte Anordnung |
| US5331165A (en) * | 1992-12-01 | 1994-07-19 | Ball Corporation | Split event reduced x-ray imager |
| US5608242A (en) * | 1994-10-11 | 1997-03-04 | Dalsa, Inc. | Variable width CCD register with uniform pitch and charge storage capacity |
| US8383443B2 (en) | 2010-05-14 | 2013-02-26 | International Business Machines Corporation | Non-uniform gate dielectric charge for pixel sensor cells and methods of manufacturing |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL181766C (nl) * | 1973-03-19 | 1987-10-16 | Philips Nv | Ladingsgekoppelde halfgeleiderschakeling, waarbij pakketten meerderheidsladingsdragers door een halfgeleiderlaag evenwijdig aan de halfgeleiderlaag kunnen worden overgedragen. |
| NL7311600A (nl) * | 1973-08-23 | 1975-02-25 | Philips Nv | Ladingsgekoppelde inrichting. |
| US3911467A (en) * | 1974-07-25 | 1975-10-07 | Rca Corp | Interlaced readout of charge stored in charge-coupled image sensing array |
| US3971003A (en) * | 1974-11-18 | 1976-07-20 | Rca Corporation | Charge coupled device imager |
-
1976
- 1976-12-14 GB GB31953/76A patent/GB1559860A/en not_active Expired
- 1976-12-27 US US05/754,690 patent/US4246591A/en not_active Expired - Lifetime
-
1977
- 1977-07-05 CA CA282,034A patent/CA1090453A/en not_active Expired
- 1977-07-29 DE DE2734409A patent/DE2734409C3/de not_active Expired
- 1977-07-29 JP JP9214477A patent/JPS5317220A/ja active Pending
- 1977-07-29 FR FR7723491A patent/FR2360176A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| US4246591A (en) | 1981-01-20 |
| DE2734409A1 (de) | 1978-02-02 |
| DE2734409C3 (de) | 1979-08-09 |
| JPS5317220A (en) | 1978-02-17 |
| GB1559860A (en) | 1980-01-30 |
| DE2734409B2 (de) | 1978-12-07 |
| FR2360176B1 (index.php) | 1979-03-23 |
| FR2360176A1 (fr) | 1978-02-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |