CA1089544A - Elastic surface wave device - Google Patents
Elastic surface wave deviceInfo
- Publication number
- CA1089544A CA1089544A CA290,391A CA290391A CA1089544A CA 1089544 A CA1089544 A CA 1089544A CA 290391 A CA290391 A CA 290391A CA 1089544 A CA1089544 A CA 1089544A
- Authority
- CA
- Canada
- Prior art keywords
- substrate
- surface wave
- thickness
- frequency
- pass band
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims abstract description 48
- 229910012463 LiTaO3 Inorganic materials 0.000 claims abstract description 20
- 238000007373 indentation Methods 0.000 claims description 10
- 239000000306 component Substances 0.000 description 11
- 230000005284 excitation Effects 0.000 description 9
- 239000002184 metal Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910003327 LiNbO3 Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 206010001497 Agitation Diseases 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6489—Compensation of undesirable effects
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02614—Treatment of substrates, e.g. curved, spherical, cylindrical substrates ensuring closed round-about circuits for the acoustical waves
- H03H9/02622—Treatment of substrates, e.g. curved, spherical, cylindrical substrates ensuring closed round-about circuits for the acoustical waves of the surface, including back surface
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02866—Means for compensation or elimination of undesirable effects of bulk wave excitation and reflections
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13372076A JPS5828770B2 (ja) | 1976-11-09 | 1976-11-09 | 弾性表面波装置 |
| JP133721/76 | 1976-11-09 | ||
| JP133720/76 | 1976-11-09 | ||
| JP13372176A JPS53108256A (en) | 1976-11-09 | 1976-11-09 | Elastic surface wave device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1089544A true CA1089544A (en) | 1980-11-11 |
Family
ID=26467994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA290,391A Expired CA1089544A (en) | 1976-11-09 | 1977-11-08 | Elastic surface wave device |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4163201A (Direct) |
| CA (1) | CA1089544A (Direct) |
| DE (2) | DE2760154C2 (Direct) |
| FR (1) | FR2370387A1 (Direct) |
| GB (1) | GB1594339A (Direct) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58119219A (ja) * | 1982-01-11 | 1983-07-15 | Hitachi Ltd | 弾性表面波装置 |
| JPH0897675A (ja) * | 1994-09-28 | 1996-04-12 | Canon Inc | 弾性表面波素子及びその作製方法及びそれを用いた通信装置 |
| DE19626410A1 (de) * | 1996-07-01 | 1998-01-08 | Siemens Matsushita Components | Substrat für mit akustischen Oberflächenwellen arbeitende Bauelemente |
| EP1017169B1 (en) * | 1998-12-29 | 2005-03-16 | Kabushiki Kaisha Toshiba | Surface acoustic wave device |
| EP1454412B1 (en) | 2001-11-06 | 2009-10-28 | Avago Technologies Wireless IP (Singapore) Pte. Ltd. | Filter device and method of fabricating a filter device |
| CN100566152C (zh) * | 2002-09-12 | 2009-12-02 | Nxp股份有限公司 | 具有抑制体声波滤波器中通带波纹的装置的体声波谐振器 |
| JP2005303980A (ja) * | 2004-03-15 | 2005-10-27 | Matsushita Electric Ind Co Ltd | 弾性表面波デバイスおよびその形成方法 |
| JP5910636B2 (ja) * | 2012-02-03 | 2016-04-27 | 株式会社村田製作所 | 弾性表面波素子及びそれを備えた複合モジュール |
| US9991870B2 (en) | 2015-08-25 | 2018-06-05 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Surface acoustic wave (SAW) resonator |
| US10523178B2 (en) * | 2015-08-25 | 2019-12-31 | Avago Technologies International Sales Pte. Limited | Surface acoustic wave (SAW) resonator |
| US10020796B2 (en) * | 2015-08-25 | 2018-07-10 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Surface acoustic wave (SAW) resonator |
| US10469056B2 (en) | 2015-08-25 | 2019-11-05 | Avago Technologies International Sales Pte. Limited | Acoustic filters integrated into single die |
| US10090822B2 (en) * | 2015-08-25 | 2018-10-02 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Surface acoustic wave (SAW) resonator |
| US10177734B2 (en) | 2015-08-25 | 2019-01-08 | Avago Technologies International Sales Pte. Limited | Surface acoustic wave (SAW) resonator |
| US20170063330A1 (en) * | 2015-08-25 | 2017-03-02 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Surface acoustic wave (saw) resonator |
| US10536133B2 (en) | 2016-04-22 | 2020-01-14 | Avago Technologies International Sales Pte. Limited | Composite surface acoustic wave (SAW) device with absorbing layer for suppression of spurious responses |
| US20180337657A1 (en) * | 2015-09-25 | 2018-11-22 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic wave resonator having antiresonant cavity |
| US20180241374A1 (en) * | 2015-09-25 | 2018-08-23 | Avago Technologies General Ip (Singapore) Pte. Ltd | Acoustic wave resonator having antiresonant cavity |
| US9369111B1 (en) * | 2015-10-28 | 2016-06-14 | Resonant Inc. | Fabrication of surface acoustic wave filters having plate modes |
| US10177735B2 (en) * | 2016-02-29 | 2019-01-08 | Avago Technologies International Sales Pte. Limited | Surface acoustic wave (SAW) resonator |
| JP2018037719A (ja) * | 2016-08-29 | 2018-03-08 | 株式会社村田製作所 | 弾性波装置 |
| US11183987B2 (en) * | 2019-09-26 | 2021-11-23 | Avago Technologies International Sales Pte. Limited | Acoustic resonator device |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3818382A (en) * | 1970-10-20 | 1974-06-18 | Raytheon Co | Surface wave delay line structures having reduced temperature coefficient of delay time |
| GB1438777A (en) * | 1973-09-04 | 1976-06-09 | Mullard Ltd | Electromechanical propagation devices and the manufacture thereof |
| JPS5099289A (Direct) * | 1973-12-28 | 1975-08-06 | ||
| FR2261654B1 (Direct) * | 1974-02-15 | 1978-01-06 | Thomson Csf | |
| JPS5515887B2 (Direct) * | 1974-09-09 | 1980-04-26 | ||
| US4001767A (en) * | 1975-11-18 | 1977-01-04 | The United States Of America As Represented By The Secretary Of The Air Force | Low diffraction loss-low spurious response LiTaO3 substrate for surface acoustic wave devices |
| JPS52114246A (en) * | 1976-03-22 | 1977-09-24 | Toshiba Corp | Elastic surface wave device |
-
1977
- 1977-11-08 CA CA290,391A patent/CA1089544A/en not_active Expired
- 1977-11-09 GB GB46614/77A patent/GB1594339A/en not_active Expired
- 1977-11-09 DE DE2760154A patent/DE2760154C2/de not_active Expired
- 1977-11-09 FR FR7733779A patent/FR2370387A1/fr active Granted
- 1977-11-09 DE DE2750144A patent/DE2750144C2/de not_active Expired
- 1977-11-09 US US05/849,945 patent/US4163201A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE2750144C2 (de) | 1984-09-20 |
| US4163201A (en) | 1979-07-31 |
| FR2370387A1 (fr) | 1978-06-02 |
| DE2760154C2 (de) | 1984-12-20 |
| GB1594339A (en) | 1981-07-30 |
| FR2370387B1 (Direct) | 1983-10-14 |
| DE2750144A1 (de) | 1978-05-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |