FR2370387A1 - Dispositif a ondes de surfaces elastiques - Google Patents

Dispositif a ondes de surfaces elastiques

Info

Publication number
FR2370387A1
FR2370387A1 FR7733779A FR7733779A FR2370387A1 FR 2370387 A1 FR2370387 A1 FR 2370387A1 FR 7733779 A FR7733779 A FR 7733779A FR 7733779 A FR7733779 A FR 7733779A FR 2370387 A1 FR2370387 A1 FR 2370387A1
Authority
FR
France
Prior art keywords
wave device
surface wave
elastic surface
substrate
satisfying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7733779A
Other languages
English (en)
Other versions
FR2370387B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP13372176A external-priority patent/JPS53108256A/ja
Priority claimed from JP13372076A external-priority patent/JPS5828770B2/ja
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Publication of FR2370387A1 publication Critical patent/FR2370387A1/fr
Application granted granted Critical
Publication of FR2370387B1 publication Critical patent/FR2370387B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6489—Compensation of undesirable effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02614—Treatment of substrates, e.g. curved, spherical, cylindrical substrates ensuring closed round-about circuits for the acoustical waves
    • H03H9/02622—Treatment of substrates, e.g. curved, spherical, cylindrical substrates ensuring closed round-about circuits for the acoustical waves of the surface, including back surface
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02866—Means for compensation or elimination of undesirable effects of bulk wave excitation and reflections

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

L'invention concerne un dispositif à ondes de surface élastiques constitué par un substrat de LiTaO3 à coupe suivant l'axe cristallin X. Le substrat 90 a une épaisseur d satisfaisant l'expression :
FR7733779A 1976-11-09 1977-11-09 Dispositif a ondes de surfaces elastiques Granted FR2370387A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP13372176A JPS53108256A (en) 1976-11-09 1976-11-09 Elastic surface wave device
JP13372076A JPS5828770B2 (ja) 1976-11-09 1976-11-09 弾性表面波装置

Publications (2)

Publication Number Publication Date
FR2370387A1 true FR2370387A1 (fr) 1978-06-02
FR2370387B1 FR2370387B1 (fr) 1983-10-14

Family

ID=26467994

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7733779A Granted FR2370387A1 (fr) 1976-11-09 1977-11-09 Dispositif a ondes de surfaces elastiques

Country Status (5)

Country Link
US (1) US4163201A (fr)
CA (1) CA1089544A (fr)
DE (2) DE2750144C2 (fr)
FR (1) FR2370387A1 (fr)
GB (1) GB1594339A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998000913A1 (fr) * 1996-07-01 1998-01-08 Siemens Matsushita Components Gmbh & Co. Kg Substrat pour composants fonctionnant avec des ondes de surface acoustiques
WO2003041273A1 (fr) * 2001-11-06 2003-05-15 Infineon Technologies Ag Dispositif de filtre et procede de fabrication d'un dispositif de filtre

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58119219A (ja) * 1982-01-11 1983-07-15 Hitachi Ltd 弾性表面波装置
JPH0897675A (ja) * 1994-09-28 1996-04-12 Canon Inc 弾性表面波素子及びその作製方法及びそれを用いた通信装置
SG108217A1 (en) * 1998-12-29 2005-01-28 Toshiba Kk Surface acoustic wave device
JP4541147B2 (ja) * 2002-09-12 2010-09-08 エヌエックスピー ビー ヴィ バルク弾性波フィルタにおける通過帯域リップルを抑制する手段を有するバルク弾性波共振器
JP2005303980A (ja) * 2004-03-15 2005-10-27 Matsushita Electric Ind Co Ltd 弾性表面波デバイスおよびその形成方法
WO2013115115A1 (fr) * 2012-02-03 2013-08-08 株式会社村田製作所 Elément d'onde de surface acoustique et module composé comprenant le même
US10469056B2 (en) 2015-08-25 2019-11-05 Avago Technologies International Sales Pte. Limited Acoustic filters integrated into single die
US10020796B2 (en) * 2015-08-25 2018-07-10 Avago Technologies General Ip (Singapore) Pte. Ltd. Surface acoustic wave (SAW) resonator
US10523178B2 (en) * 2015-08-25 2019-12-31 Avago Technologies International Sales Pte. Limited Surface acoustic wave (SAW) resonator
US10177734B2 (en) 2015-08-25 2019-01-08 Avago Technologies International Sales Pte. Limited Surface acoustic wave (SAW) resonator
US9991870B2 (en) 2015-08-25 2018-06-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Surface acoustic wave (SAW) resonator
US20170063330A1 (en) * 2015-08-25 2017-03-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Surface acoustic wave (saw) resonator
US10536133B2 (en) 2016-04-22 2020-01-14 Avago Technologies International Sales Pte. Limited Composite surface acoustic wave (SAW) device with absorbing layer for suppression of spurious responses
US10090822B2 (en) * 2015-08-25 2018-10-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Surface acoustic wave (SAW) resonator
US20180337657A1 (en) * 2015-09-25 2018-11-22 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic wave resonator having antiresonant cavity
US20180241374A1 (en) * 2015-09-25 2018-08-23 Avago Technologies General Ip (Singapore) Pte. Ltd Acoustic wave resonator having antiresonant cavity
US9369111B1 (en) * 2015-10-28 2016-06-14 Resonant Inc. Fabrication of surface acoustic wave filters having plate modes
US10177735B2 (en) * 2016-02-29 2019-01-08 Avago Technologies International Sales Pte. Limited Surface acoustic wave (SAW) resonator
JP2018037719A (ja) * 2016-08-29 2018-03-08 株式会社村田製作所 弾性波装置
US11183987B2 (en) * 2019-09-26 2021-11-23 Avago Technologies International Sales Pte. Limited Acoustic resonator device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3818382A (en) * 1970-10-20 1974-06-18 Raytheon Co Surface wave delay line structures having reduced temperature coefficient of delay time
FR2242814A1 (fr) * 1973-09-04 1975-03-28 Philips Nv
FR2261654A1 (fr) * 1974-02-15 1975-09-12 Thomson Csf
FR2284222A1 (fr) * 1974-09-09 1976-04-02 Tokyo Shibaura Electric Co Appareil a ondes elastiques de surface
FR2345854A1 (fr) * 1976-03-22 1977-10-21 Tokyo Shibaura Electric Co Dispositif a ondes de surface elastiques

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5099289A (fr) * 1973-12-28 1975-08-06
US4001767A (en) * 1975-11-18 1977-01-04 The United States Of America As Represented By The Secretary Of The Air Force Low diffraction loss-low spurious response LiTaO3 substrate for surface acoustic wave devices

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3818382A (en) * 1970-10-20 1974-06-18 Raytheon Co Surface wave delay line structures having reduced temperature coefficient of delay time
FR2242814A1 (fr) * 1973-09-04 1975-03-28 Philips Nv
FR2261654A1 (fr) * 1974-02-15 1975-09-12 Thomson Csf
FR2284222A1 (fr) * 1974-09-09 1976-04-02 Tokyo Shibaura Electric Co Appareil a ondes elastiques de surface
FR2345854A1 (fr) * 1976-03-22 1977-10-21 Tokyo Shibaura Electric Co Dispositif a ondes de surface elastiques

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998000913A1 (fr) * 1996-07-01 1998-01-08 Siemens Matsushita Components Gmbh & Co. Kg Substrat pour composants fonctionnant avec des ondes de surface acoustiques
WO2003041273A1 (fr) * 2001-11-06 2003-05-15 Infineon Technologies Ag Dispositif de filtre et procede de fabrication d'un dispositif de filtre
US6943647B2 (en) 2001-11-06 2005-09-13 Infineon Technologies Ag Bulk acoustic wave filter with a roughened substrate bottom surface and method of fabricating same

Also Published As

Publication number Publication date
DE2760154C2 (de) 1984-12-20
DE2750144A1 (de) 1978-05-18
DE2750144C2 (de) 1984-09-20
FR2370387B1 (fr) 1983-10-14
GB1594339A (en) 1981-07-30
US4163201A (en) 1979-07-31
CA1089544A (fr) 1980-11-11

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