CA1061015A - Fabrication of a semiconductor device of indium antimonide - Google Patents

Fabrication of a semiconductor device of indium antimonide

Info

Publication number
CA1061015A
CA1061015A CA254,110A CA254110A CA1061015A CA 1061015 A CA1061015 A CA 1061015A CA 254110 A CA254110 A CA 254110A CA 1061015 A CA1061015 A CA 1061015A
Authority
CA
Canada
Prior art keywords
type
substrate
indium antimonide
preselected
impurity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA254,110A
Other languages
English (en)
French (fr)
Inventor
Roland Y. Hung
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA1061015A publication Critical patent/CA1061015A/en
Expired legal-status Critical Current

Links

Classifications

    • H10P30/21—
    • H10P14/6312—
    • H10P30/206—
    • H10P30/226—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
    • H10P14/6324—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/084—Ion implantation of compound devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S205/00—Electrolysis: processes, compositions used therein, and methods of preparing the compositions
    • Y10S205/92—Electrolytic coating of circuit board or printed circuit, other than selected area coating

Landscapes

  • Bipolar Transistors (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
CA254,110A 1975-06-30 1976-06-04 Fabrication of a semiconductor device of indium antimonide Expired CA1061015A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/591,996 US4080721A (en) 1975-06-30 1975-06-30 Fabrication of semiconductor device

Publications (1)

Publication Number Publication Date
CA1061015A true CA1061015A (en) 1979-08-21

Family

ID=24368832

Family Applications (1)

Application Number Title Priority Date Filing Date
CA254,110A Expired CA1061015A (en) 1975-06-30 1976-06-04 Fabrication of a semiconductor device of indium antimonide

Country Status (6)

Country Link
US (1) US4080721A (cg-RX-API-DMAC10.html)
JP (1) JPS526087A (cg-RX-API-DMAC10.html)
CA (1) CA1061015A (cg-RX-API-DMAC10.html)
DE (1) DE2628406A1 (cg-RX-API-DMAC10.html)
FR (1) FR2316727A1 (cg-RX-API-DMAC10.html)
GB (1) GB1488329A (cg-RX-API-DMAC10.html)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4177298A (en) * 1977-03-22 1979-12-04 Hitachi, Ltd. Method for producing an InSb thin film element
DE2755418A1 (de) * 1977-12-13 1979-06-21 Bosch Gmbh Robert Verfahren zur herstellung eines halbleiter-bauelements
US4247373A (en) * 1978-06-20 1981-01-27 Matsushita Electric Industrial Co., Ltd. Method of making semiconductor device
US4348473A (en) * 1981-03-04 1982-09-07 Xerox Corporation Dry process for the production of microelectronic devices
JPS58108774A (ja) * 1981-12-22 1983-06-28 Citizen Watch Co Ltd 薄膜トランジスタの製造方法
US4519127A (en) * 1983-02-28 1985-05-28 Tokyo Shibaura Denki Kabushiki Kaisha Method of manufacturing a MESFET by controlling implanted peak surface dopants
FR2556135B1 (fr) * 1983-12-02 1986-09-19 Thomson Csf Photo-diode a l'antimoniure d'indium et procede de fabrication
US4898834A (en) * 1988-06-27 1990-02-06 Amber Engineering, Inc. Open-tube, benign-environment annealing method for compound semiconductors
US5143857A (en) * 1988-11-07 1992-09-01 Triquint Semiconductor, Inc. Method of fabricating an electronic device with reduced susceptiblity to backgating effects
GB2331841A (en) * 1997-11-28 1999-06-02 Secr Defence Field effect transistor
US6194295B1 (en) * 1999-05-17 2001-02-27 National Science Council Of Republic Of China Production of a refractory metal by chemical vapor deposition of a bilayer-stacked tungsten metal
US7687256B2 (en) * 2002-04-11 2010-03-30 Spire Corporation Surface activated biochip

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3099776A (en) * 1960-06-10 1963-07-30 Texas Instruments Inc Indium antimonide transistor
US3515956A (en) * 1967-10-16 1970-06-02 Ion Physics Corp High-voltage semiconductor device having a guard ring containing substitutionally active ions in interstitial positions
DE2041035C2 (de) * 1970-08-18 1982-10-28 Siemens AG, 1000 Berlin und 8000 München Verfahren zum gleichzeitigen elektrolytischen in bezug auf die Sperrfähigkeit selektiven Behandeln von mehreren in einer gemeinsamen Halbleiterscheibe erzeugten gleichen Halbleiterbauelementen
US3929589A (en) * 1974-02-08 1975-12-30 Bell Telephone Labor Inc Selective area oxidation of III-V compound semiconductors

Also Published As

Publication number Publication date
DE2628406A1 (de) 1977-02-03
FR2316727B1 (cg-RX-API-DMAC10.html) 1978-08-25
FR2316727A1 (fr) 1977-01-28
GB1488329A (en) 1977-10-12
US4080721A (en) 1978-03-28
JPS5510985B2 (cg-RX-API-DMAC10.html) 1980-03-21
JPS526087A (en) 1977-01-18

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