CA1057419A - Technique for preventing forward biased epi-isolation degradation - Google Patents
Technique for preventing forward biased epi-isolation degradationInfo
- Publication number
- CA1057419A CA1057419A CA287,528A CA287528A CA1057419A CA 1057419 A CA1057419 A CA 1057419A CA 287528 A CA287528 A CA 287528A CA 1057419 A CA1057419 A CA 1057419A
- Authority
- CA
- Canada
- Prior art keywords
- isolation
- region
- conductivity type
- isolation region
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/761—PN junctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
- H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
- H10D62/105—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
- Bipolar Transistors (AREA)
- Electroluminescent Light Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/736,646 US4113512A (en) | 1976-10-28 | 1976-10-28 | Technique for preventing forward biased epi-isolation degradation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1057419A true CA1057419A (en) | 1979-06-26 |
Family
ID=24960699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA287,528A Expired CA1057419A (en) | 1976-10-28 | 1977-09-26 | Technique for preventing forward biased epi-isolation degradation |
Country Status (12)
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4178190A (en) * | 1975-06-30 | 1979-12-11 | Rca Corporation | Method of making a bipolar transistor with high-low emitter impurity concentration |
| US5041896A (en) * | 1989-07-06 | 1991-08-20 | General Electric Company | Symmetrical blocking high voltage semiconductor device and method of fabrication |
| TW274628B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1994-06-03 | 1996-04-21 | At & T Corp | |
| JP3408098B2 (ja) * | 1997-02-20 | 2003-05-19 | キヤノン株式会社 | 固体撮像装置及びｘ線撮像装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1050805A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1964-06-23 | 1900-01-01 | ||
| US3551760A (en) * | 1966-03-28 | 1970-12-29 | Hitachi Ltd | Semiconductor device with an inversion preventing layer formed in a diffused region |
| US3653988A (en) * | 1968-02-05 | 1972-04-04 | Bell Telephone Labor Inc | Method of forming monolithic semiconductor integrated circuit devices |
| US3631311A (en) * | 1968-03-26 | 1971-12-28 | Telefunken Patent | Semiconductor circuit arrangement with integrated base leakage resistance |
| US3964705A (en) * | 1970-12-23 | 1976-06-22 | Bassani S.P.A. | Frame for the mounting of interchangeable electrical units |
| US3697827A (en) * | 1971-02-09 | 1972-10-10 | Unitrode Corp | Structure and formation of semiconductors with transverse conductivity gradients |
| US3760239A (en) * | 1971-06-09 | 1973-09-18 | Cress S | Coaxial inverted geometry transistor having buried emitter |
| DE2241600A1 (de) * | 1971-08-26 | 1973-03-01 | Dionics Inc | Hochspannungs-p-n-uebergang und seine anwendung in halbleiterschaltelementen, sowie verfahren zu seiner herstellung |
| US3921199A (en) * | 1973-07-31 | 1975-11-18 | Texas Instruments Inc | Junction breakdown voltage by means of ion implanted compensation guard ring |
| US4021270A (en) * | 1976-06-28 | 1977-05-03 | Motorola, Inc. | Double master mask process for integrated circuit manufacture |
-
1976
- 1976-10-28 US US05/736,646 patent/US4113512A/en not_active Expired - Lifetime
-
1977
- 1977-08-31 JP JP10373377A patent/JPS5354490A/ja active Granted
- 1977-09-09 FR FR7727688A patent/FR2369687A1/fr active Granted
- 1977-09-20 IT IT27706/77A patent/IT1114162B/it active
- 1977-09-26 CA CA287,528A patent/CA1057419A/en not_active Expired
- 1977-09-30 GB GB40835/77A patent/GB1584990A/en not_active Expired
- 1977-10-05 CH CH1215777A patent/CH619072A5/de not_active IP Right Cessation
- 1977-10-07 BR BR7706777A patent/BR7706777A/pt unknown
- 1977-10-14 NL NL7711278A patent/NL7711278A/xx not_active Application Discontinuation
- 1977-10-18 DE DE19772746700 patent/DE2746700A1/de active Granted
- 1977-10-25 SE SE7711985A patent/SE431272B/sv unknown
- 1977-10-27 ES ES463621A patent/ES463621A1/es not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CH619072A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-08-29 |
| ES463621A1 (es) | 1978-07-01 |
| NL7711278A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1978-05-03 |
| GB1584990A (en) | 1981-02-18 |
| JPS5354490A (en) | 1978-05-17 |
| DE2746700A1 (de) | 1978-05-11 |
| SE7711985L (sv) | 1978-04-29 |
| SE431272B (sv) | 1984-01-23 |
| JPS5424270B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1979-08-20 |
| FR2369687A1 (fr) | 1978-05-26 |
| IT1114162B (it) | 1986-01-27 |
| BR7706777A (pt) | 1978-08-22 |
| FR2369687B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-08-01 |
| US4113512A (en) | 1978-09-12 |
| DE2746700C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-12-22 |
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