CA1041226A - P-type-epitaxial-base transistor with base-collector schottky diode clamp - Google Patents
P-type-epitaxial-base transistor with base-collector schottky diode clampInfo
- Publication number
- CA1041226A CA1041226A CA255,056A CA255056A CA1041226A CA 1041226 A CA1041226 A CA 1041226A CA 255056 A CA255056 A CA 255056A CA 1041226 A CA1041226 A CA 1041226A
- Authority
- CA
- Canada
- Prior art keywords
- region
- layer
- base
- transistor
- collector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012535 impurity Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 230000004888 barrier function Effects 0.000 claims description 2
- 238000005468 ion implantation Methods 0.000 abstract description 6
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000009792 diffusion process Methods 0.000 description 8
- 238000002955 isolation Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 230000000873 masking effect Effects 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000010420 art technique Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000010405 reoxidation reaction Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/07—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common
- H01L27/0744—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common without components of the field effect type
- H01L27/075—Bipolar transistors in combination with diodes, or capacitors, or resistors, e.g. lateral bipolar transistor, and vertical bipolar transistor and resistor
- H01L27/0755—Vertical bipolar transistor in combination with diodes, or capacitors, or resistors
- H01L27/0761—Vertical bipolar transistor in combination with diodes only
- H01L27/0766—Vertical bipolar transistor in combination with diodes only with Schottky diodes only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
- H01L21/743—Making of internal connections, substrate contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1004—Base region of bipolar transistors
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/588,918 US4005469A (en) | 1975-06-20 | 1975-06-20 | P-type-epitaxial-base transistor with base-collector Schottky diode clamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1041226A true CA1041226A (en) | 1978-10-24 |
Family
ID=24355851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA255,056A Expired CA1041226A (en) | 1975-06-20 | 1976-06-16 | P-type-epitaxial-base transistor with base-collector schottky diode clamp |
Country Status (7)
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2733615A1 (de) * | 1977-07-26 | 1979-02-01 | Ibm Deutschland | Hochintegrierte halbleiteranordnung enthaltend eine dioden-/widerstandskonfiguration |
| US4159915A (en) * | 1977-10-25 | 1979-07-03 | International Business Machines Corporation | Method for fabrication vertical NPN and PNP structures utilizing ion-implantation |
| US4282538A (en) * | 1977-11-11 | 1981-08-04 | Rca Corporation | Method of integrating semiconductor components |
| US4329703A (en) * | 1978-07-21 | 1982-05-11 | Monolithic Memories, Inc. | Lateral PNP transistor |
| JPS58223345A (ja) * | 1982-06-21 | 1983-12-24 | Toshiba Corp | 半導体装置 |
| US4503521A (en) * | 1982-06-25 | 1985-03-05 | International Business Machines Corporation | Non-volatile memory and switching device |
| US4538490A (en) * | 1983-05-02 | 1985-09-03 | Celanese Corporation | Staple fiber cutter |
| US4586071A (en) * | 1984-05-11 | 1986-04-29 | International Business Machines Corporation | Heterostructure bipolar transistor |
| US7329940B2 (en) * | 2005-11-02 | 2008-02-12 | International Business Machines Corporation | Semiconductor structure and method of manufacture |
| US7718481B2 (en) * | 2006-04-17 | 2010-05-18 | International Business Machines Corporation | Semiconductor structure and method of manufacture |
| US7538409B2 (en) * | 2006-06-07 | 2009-05-26 | International Business Machines Corporation | Semiconductor devices |
| US7242071B1 (en) | 2006-07-06 | 2007-07-10 | International Business Machine Corporation | Semiconductor structure |
| US7936041B2 (en) | 2006-09-15 | 2011-05-03 | International Business Machines Corporation | Schottky barrier diodes for millimeter wave SiGe BICMOS applications |
| US9853643B2 (en) | 2008-12-23 | 2017-12-26 | Schottky Lsi, Inc. | Schottky-CMOS asynchronous logic cells |
| US11342916B2 (en) | 2008-12-23 | 2022-05-24 | Schottky Lsi, Inc. | Schottky-CMOS asynchronous logic cells |
| US8476689B2 (en) | 2008-12-23 | 2013-07-02 | Augustine Wei-Chun Chang | Super CMOS devices on a microelectronics system |
| US11955476B2 (en) | 2008-12-23 | 2024-04-09 | Schottky Lsi, Inc. | Super CMOS devices on a microelectronics system |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3463975A (en) * | 1964-12-31 | 1969-08-26 | Texas Instruments Inc | Unitary semiconductor high speed switching device utilizing a barrier diode |
| US3506893A (en) * | 1968-06-27 | 1970-04-14 | Ibm | Integrated circuits with surface barrier diodes |
| US3571674A (en) * | 1969-01-10 | 1971-03-23 | Fairchild Camera Instr Co | Fast switching pnp transistor |
| US3699362A (en) * | 1971-05-27 | 1972-10-17 | Ibm | Transistor logic circuit |
| US3861968A (en) * | 1972-06-19 | 1975-01-21 | Ibm | Method of fabricating integrated circuit device structure with complementary elements utilizing selective thermal oxidation and selective epitaxial deposition |
| US3878552A (en) * | 1972-11-13 | 1975-04-15 | Thurman J Rodgers | Bipolar integrated circuit and method |
-
1975
- 1975-06-20 US US05/588,918 patent/US4005469A/en not_active Expired - Lifetime
-
1976
- 1976-04-12 IT IT22177/76A patent/IT1064219B/it active
- 1976-05-06 GB GB18558/76A patent/GB1516034A/en not_active Expired
- 1976-05-06 FR FR7614187A patent/FR2315171A1/fr active Granted
- 1976-05-15 DE DE19762621791 patent/DE2621791A1/de not_active Withdrawn
- 1976-05-19 JP JP51056774A patent/JPS522288A/ja active Granted
- 1976-06-16 CA CA255,056A patent/CA1041226A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| IT1064219B (it) | 1985-02-18 |
| DE2621791A1 (de) | 1976-12-30 |
| JPS5724935B2 (US07122547-20061017-C00032.png) | 1982-05-26 |
| FR2315171B1 (US07122547-20061017-C00032.png) | 1978-11-17 |
| US4005469A (en) | 1977-01-25 |
| JPS522288A (en) | 1977-01-08 |
| GB1516034A (en) | 1978-06-28 |
| FR2315171A1 (fr) | 1977-01-14 |
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