CA1038736A - Copper and copper alloy etching solutions and process - Google Patents

Copper and copper alloy etching solutions and process

Info

Publication number
CA1038736A
CA1038736A CA209,480A CA209480A CA1038736A CA 1038736 A CA1038736 A CA 1038736A CA 209480 A CA209480 A CA 209480A CA 1038736 A CA1038736 A CA 1038736A
Authority
CA
Canada
Prior art keywords
ppm
copper
concentration
etching
salts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA209,480A
Other languages
English (en)
French (fr)
Other versions
CA209480S (en
Inventor
Katsutoshi Itani
Akira Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Adeka Corp
Original Assignee
Tokai Denka Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai Denka Industrial Co Ltd filed Critical Tokai Denka Industrial Co Ltd
Application granted granted Critical
Publication of CA1038736A publication Critical patent/CA1038736A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/18—Acidic compositions for etching copper or alloys thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Manufacture And Refinement Of Metals (AREA)
CA209,480A 1973-10-17 1974-09-18 Copper and copper alloy etching solutions and process Expired CA1038736A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11571173A JPS533975B2 (enExample) 1973-10-17 1973-10-17

Publications (1)

Publication Number Publication Date
CA1038736A true CA1038736A (en) 1978-09-19

Family

ID=14669289

Family Applications (1)

Application Number Title Priority Date Filing Date
CA209,480A Expired CA1038736A (en) 1973-10-17 1974-09-18 Copper and copper alloy etching solutions and process

Country Status (7)

Country Link
US (1) US3939089A (enExample)
JP (1) JPS533975B2 (enExample)
CA (1) CA1038736A (enExample)
DE (1) DE2449545A1 (enExample)
FR (1) FR2248329B1 (enExample)
GB (1) GB1466778A (enExample)
IT (1) IT1022771B (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4233111A (en) * 1979-06-25 1980-11-11 Dart Industries Inc. Dissolution of metals utilizing an aqueous H2 SO4 -H2 O2 -3-sulfopropyldithiocarbamate etchant
US4236957A (en) * 1979-06-25 1980-12-02 Dart Industries Inc. Dissolution of metals utilizing an aqueous H2 SOY --H2 O.sub. -mercapto containing heterocyclic nitrogen etchant
US4233112A (en) * 1979-06-25 1980-11-11 Dart Industries Inc. Dissolution of metals utilizing an aqueous H2 SO4 -H2 O2 -polysulfide etchant
US4233113A (en) * 1979-06-25 1980-11-11 Dart Industries Inc. Dissolution of metals utilizing an aqueous H2 O2 -H2 SO4 -thioamide etchant
JPS5933743U (ja) * 1982-08-26 1984-03-02 村上　進 接着テ−プ
US4973380A (en) * 1983-10-06 1990-11-27 Olin Corporation Process for etching copper base materials
US4725374A (en) * 1983-10-06 1988-02-16 Olin Corporation Process and apparatus for etching copper base materials
US5248386A (en) * 1991-02-08 1993-09-28 Aluminum Company Of America Milling solution and method
DE4402788A1 (de) * 1994-01-31 1995-08-10 Emil Krechen Industrievertretu Verfahren zum Abtragen von Metallen
JP3400558B2 (ja) * 1994-08-12 2003-04-28 メック株式会社 銅および銅合金のエッチング液
DE69509124T2 (de) * 1994-12-23 1999-11-25 Cookson Group Plc, London Verfahren zur korrosionshemmung von kupfer- und kupferlegierungen
DE10150445A1 (de) * 2001-10-12 2003-04-17 Beiersdorf Ag Verwendung einer oder mehreren Substanzen, gewählt aus der Gruppe der Pyrimidine und Purine in kosmetischen Zubereitungen zur Haarfärbung
JP5604056B2 (ja) * 2009-05-15 2014-10-08 関東化学株式会社 銅含有積層膜用エッチング液

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3216873A (en) * 1961-08-04 1965-11-09 Fmc Corp Method of etching photoengraving plates and etching solution used therefor
US3410802A (en) * 1966-02-21 1968-11-12 Fmc Corp Process and composition for etching of copper metal
JPS5221460B1 (enExample) * 1971-04-26 1977-06-10

Also Published As

Publication number Publication date
DE2449545A1 (de) 1975-04-30
JPS5066422A (enExample) 1975-06-04
JPS533975B2 (enExample) 1978-02-13
FR2248329B1 (enExample) 1978-06-09
IT1022771B (it) 1978-04-20
US3939089A (en) 1976-02-17
FR2248329A1 (enExample) 1975-05-16
GB1466778A (en) 1977-03-09

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