BRPI0505264A - processo para aplicar em particular revestimentos óticos - Google Patents

processo para aplicar em particular revestimentos óticos

Info

Publication number
BRPI0505264A
BRPI0505264A BRPI0505264-5A BRPI0505264A BRPI0505264A BR PI0505264 A BRPI0505264 A BR PI0505264A BR PI0505264 A BRPI0505264 A BR PI0505264A BR PI0505264 A BRPI0505264 A BR PI0505264A
Authority
BR
Brazil
Prior art keywords
sputtering
vacuum chamber
precursors
deposition
supplied
Prior art date
Application number
BRPI0505264-5A
Other languages
English (en)
Inventor
Frank Breme
Original Assignee
Satisloh Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Satisloh Ag filed Critical Satisloh Ag
Publication of BRPI0505264A publication Critical patent/BRPI0505264A/pt
Publication of BRPI0505264B1 publication Critical patent/BRPI0505264B1/pt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Physical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)

Abstract

"PROCESSO PARA APLICAR EM PARTICULAR REVESTIMENTOS óTICOS". A presente invenção refere-se a um processo realizado por meio do aparelho, uma camada de transição (12) que é utilizada para corresponder propriedades mecânicas de um substrato (10) a propriedades mecânicas de um sistema de camadas (16) a ser aplicado acima da camada de transição (12), é depositada sobre uma superfície frontal (20) do substrato (10). Para esta finalidade, durante um processo de salpico realizado em uma câmara de vácuo (18), produtos de reação (14) são incorporados no mínimo virtualmente de maneira exclusiva na camada de transição (12). Isto impede que outras superfícies na câmara de vácuo (18) e o lado traseiro (34) do substrato (10) sejam contaminados com os produtos de reação (14) e/ou seus precursores.
BRPI0505264-5A 2004-11-05 2005-11-07 Processo para aplicar em particular revestimentos óticos e aparelho para realizar esse processo. BRPI0505264B1 (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP04026247A EP1655385B1 (de) 2004-11-05 2004-11-05 Verfahren zum Aufbringen optischer Beschichtungen

Publications (2)

Publication Number Publication Date
BRPI0505264A true BRPI0505264A (pt) 2006-07-11
BRPI0505264B1 BRPI0505264B1 (pt) 2015-03-24

Family

ID=34927246

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI0505264-5A BRPI0505264B1 (pt) 2004-11-05 2005-11-07 Processo para aplicar em particular revestimentos óticos e aparelho para realizar esse processo.

Country Status (10)

Country Link
US (1) US7820018B2 (pt)
EP (1) EP1655385B1 (pt)
JP (1) JP5046074B2 (pt)
KR (1) KR101338675B1 (pt)
CN (1) CN1793420B (pt)
AT (1) ATE494400T1 (pt)
BR (1) BRPI0505264B1 (pt)
CA (1) CA2525061C (pt)
DE (1) DE502004012093D1 (pt)
SG (1) SG122046A1 (pt)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0717921D0 (en) * 2007-09-14 2007-10-24 Teer Coatings Ltd Coatings to resist and protect against aquatic biofouling
ES2302661B1 (es) * 2008-02-14 2009-10-29 Indo Internacional S.A. Lente de base polimerica que comprende una capa endurecedora, una multicapa interferencial y una capa dura intercalada entre ambas, y procedimiento de fabricacion correspondiente.
ES2324148B1 (es) * 2009-03-20 2010-07-08 Indo Internacional, S.A Lente de base polimerica que comprende una capa endurecedora, una capa absorbente y multicapa interferencial y procedimiento de fabricacion correspondiente.
FR2985255B1 (fr) * 2011-12-28 2015-08-07 Ecole Polytech Article revetu d'un revetement interferentiel ayant des proprietes stables dans le temps.
CN107089802A (zh) * 2017-04-27 2017-08-25 浙江水晶光电科技股份有限公司 一种解决蓝玻璃基板涂胶后易脱胶的方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3537973A (en) * 1967-09-15 1970-11-03 Varian Associates Sequential sputtering with movable targets
US4737379A (en) * 1982-09-24 1988-04-12 Energy Conversion Devices, Inc. Plasma deposited coatings, and low temperature plasma method of making same
JPH10230558A (ja) * 1996-12-17 1998-09-02 Asahi Glass Co Ltd 光吸収性反射防止膜付き有機基体とその製造方法
JP2000026139A (ja) * 1998-07-06 2000-01-25 Nippon Sheet Glass Co Ltd 絶縁膜の被覆方法およびそれを用いた画像表示用ガラス基板
JP2001073130A (ja) * 1999-08-31 2001-03-21 Sumitomo Chem Co Ltd リアクティブ・スパッタリング装置
CH693907A5 (de) * 1999-10-14 2004-04-15 Satis Vacuum Ind Vetriebs Ag Verfahren zum Beschichten von Kunststoff-Oberflächen unter Vakuum.
EP1275751A1 (de) 2001-07-13 2003-01-15 Satis Vacuum Industries Vertriebs - AG Verfahren und Vorrichtung zur Herstellung eines optisch wirksamen Schichtsystems
DE10159907B4 (de) * 2001-12-06 2008-04-24 Interpane Entwicklungs- Und Beratungsgesellschaft Mbh & Co. Beschichtungsverfahren

Also Published As

Publication number Publication date
US20060096852A1 (en) 2006-05-11
EP1655385A1 (de) 2006-05-10
BRPI0505264B1 (pt) 2015-03-24
CN1793420B (zh) 2011-12-14
KR20060052490A (ko) 2006-05-19
CA2525061A1 (en) 2006-05-05
SG122046A1 (en) 2006-05-26
CN1793420A (zh) 2006-06-28
KR101338675B1 (ko) 2013-12-06
ATE494400T1 (de) 2011-01-15
EP1655385B1 (de) 2011-01-05
JP5046074B2 (ja) 2012-10-10
CA2525061C (en) 2014-02-25
US7820018B2 (en) 2010-10-26
JP2006132002A (ja) 2006-05-25
DE502004012093D1 (de) 2011-02-17

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Legal Events

Date Code Title Description
B07A Application suspended after technical examination (opinion) [chapter 7.1 patent gazette]
B09A Decision: intention to grant [chapter 9.1 patent gazette]
B09X Republication of the decision to grant [chapter 9.1.3 patent gazette]
B16A Patent or certificate of addition of invention granted [chapter 16.1 patent gazette]

Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 07/11/2005, OBSERVADAS AS CONDICOES LEGAIS.

B21F Lapse acc. art. 78, item iv - on non-payment of the annual fees in time

Free format text: REFERENTE A 15A ANUIDADE.

B24J Lapse because of non-payment of annual fees (definitively: art 78 iv lpi, resolution 113/2013 art. 12)

Free format text: EM VIRTUDE DA EXTINCAO PUBLICADA NA RPI 2603 DE 24-11-2020 E CONSIDERANDO AUSENCIA DE MANIFESTACAO DENTRO DOS PRAZOS LEGAIS, INFORMO QUE CABE SER MANTIDA A EXTINCAO DA PATENTE E SEUS CERTIFICADOS, CONFORME O DISPOSTO NO ARTIGO 12, DA RESOLUCAO 113/2013.