WO2008025352A3 - Vorrichtung und verfahren zur ausbildung dünner schichten auf substratoberflächen - Google Patents

Vorrichtung und verfahren zur ausbildung dünner schichten auf substratoberflächen Download PDF

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Publication number
WO2008025352A3
WO2008025352A3 PCT/DE2007/001579 DE2007001579W WO2008025352A3 WO 2008025352 A3 WO2008025352 A3 WO 2008025352A3 DE 2007001579 W DE2007001579 W DE 2007001579W WO 2008025352 A3 WO2008025352 A3 WO 2008025352A3
Authority
WO
WIPO (PCT)
Prior art keywords
thin layers
substrate surfaces
forming thin
electromagnetic radiation
disposed
Prior art date
Application number
PCT/DE2007/001579
Other languages
English (en)
French (fr)
Other versions
WO2008025352A2 (de
Inventor
Birte Dresler
Volkmar Hopfe
Ines Dani
Original Assignee
Fraunhofer Ges Forschung
Birte Dresler
Volkmar Hopfe
Ines Dani
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung, Birte Dresler, Volkmar Hopfe, Ines Dani filed Critical Fraunhofer Ges Forschung
Priority to US12/377,658 priority Critical patent/US20100233385A1/en
Priority to EP07801316A priority patent/EP2069551A2/de
Publication of WO2008025352A2 publication Critical patent/WO2008025352A2/de
Publication of WO2008025352A3 publication Critical patent/WO2008025352A3/de

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/452—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45519—Inert gas curtains
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45595—Atmospheric CVD gas inlets with no enclosed reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Die Erfindung betrifft eine Vorrichtung und ein Verfahren zur Ausbildung dünner Schichten auf Substratoberflächen. Es ist Aufgabe der Erfindung Möglichkeiten zur Verfügung zu stellen, mit denen dünne Schichten auf Substratoberflächen hergestellt werden können, die eine bestimmte Schichtwerkstoffausbildung mit gewünschten Eigenschaften aufweisen. Die erfindungsgemäße Vorrichtung ist dabei so ausgebildet, dass an einem Reaktionskammerbereich oberhalb einer zu beschichtenden Substratoberfläche eine Zuführung für mindestens einen gasförmigen Precursor vorhanden ist, der zur Schichtbildung beiträgt. Außerdem ist eine elektromagnetische Strahlung emittierende Quelle, die eine Plasmaquelle ist, so angeordnet, dass mit der emittierten elektromagnetischen Strahlung eine photolytische Aktivierung von Atomen und/oder Molekülen des/der Precursor (en) erfolgt. Die Plasmaquelle sollte dabei so angeordnet sein und soll auch so betrieben werden, dass kein unmittelbarer Einfluss des Plasma auf die Substratoberfläche und die zur Schichtausbildung führenden Precursoren auftritt.
PCT/DE2007/001579 2006-09-01 2007-08-29 Vorrichtung und verfahren zur ausbildung dünner schichten auf substratoberflächen WO2008025352A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/377,658 US20100233385A1 (en) 2006-09-01 2007-08-29 Apparatus and method of forming thin layers on substrate surfaces
EP07801316A EP2069551A2 (de) 2006-09-01 2007-08-29 Vorrichtung und verfahren zur ausbildung dünner schichten auf substratoberflächen

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006042328A DE102006042328B4 (de) 2006-09-01 2006-09-01 Verfahren zur Ausbildung dünner Schichten auf Substratoberflächen
DE102006042328.3 2006-09-01

Publications (2)

Publication Number Publication Date
WO2008025352A2 WO2008025352A2 (de) 2008-03-06
WO2008025352A3 true WO2008025352A3 (de) 2008-04-10

Family

ID=39007012

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2007/001579 WO2008025352A2 (de) 2006-09-01 2007-08-29 Vorrichtung und verfahren zur ausbildung dünner schichten auf substratoberflächen

Country Status (4)

Country Link
US (1) US20100233385A1 (de)
EP (1) EP2069551A2 (de)
DE (1) DE102006042328B4 (de)
WO (1) WO2008025352A2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100272891A1 (en) * 2009-04-10 2010-10-28 Lockheed Martin Corporation Apparatus and method for the production of carbon nanotubes on a continuously moving substrate
DE102009024319B4 (de) * 2009-06-02 2014-08-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur photoinduzierten Aushärtung mittels elektromagnetischer Strahlung aushärtbarer Polymere
US20160190382A1 (en) * 2014-08-12 2016-06-30 Solexel, Inc. Amorphous silicon based laser doped solar cells
DE102018211108B4 (de) 2018-07-05 2023-06-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Modifizieren und anschließendem Ausbilden einer Oberflächenbeschichtung auf einem metallischen Bauteil

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3926023A1 (de) * 1988-09-06 1990-03-15 Schott Glaswerke Cvd-beschichtungsverfahren zur herstellung von schichten und vorrichtung zur durchfuehrung des verfahrens
EP1394283A1 (de) * 2002-08-29 2004-03-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur grossflächigen Beschichtung von Substraten bei Atmosphärendruckbedingungen
WO2005093125A1 (de) * 2004-03-23 2005-10-06 Fraunhofer-Gesellschaft Zür Förderung Der Angewandten Forschung E.V. Verfahren und vorrichtung zur ausbildung dünner schichten aus siliziumnitrid auf substratoberflächen

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4454835A (en) * 1982-09-13 1984-06-19 The United States Of America As Represented By The Secretary Of The Navy Internal photolysis reactor
JPS6227575A (ja) * 1985-07-30 1987-02-05 Yasuo Tarui 成膜方法
JPH04157159A (ja) * 1990-10-19 1992-05-29 Olympus Optical Co Ltd 立方晶窒化硼素の合成方法および装置
US20050227017A1 (en) * 2003-10-31 2005-10-13 Yoshihide Senzaki Low temperature deposition of silicon nitride

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3926023A1 (de) * 1988-09-06 1990-03-15 Schott Glaswerke Cvd-beschichtungsverfahren zur herstellung von schichten und vorrichtung zur durchfuehrung des verfahrens
EP1394283A1 (de) * 2002-08-29 2004-03-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur grossflächigen Beschichtung von Substraten bei Atmosphärendruckbedingungen
WO2005093125A1 (de) * 2004-03-23 2005-10-06 Fraunhofer-Gesellschaft Zür Förderung Der Angewandten Forschung E.V. Verfahren und vorrichtung zur ausbildung dünner schichten aus siliziumnitrid auf substratoberflächen

Also Published As

Publication number Publication date
US20100233385A1 (en) 2010-09-16
DE102006042328B4 (de) 2012-07-05
DE102006042328A1 (de) 2008-03-20
EP2069551A2 (de) 2009-06-17
WO2008025352A2 (de) 2008-03-06

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