BR9901357A - Resistor elétrico, material eletricamente resistivo, estrutura, estrutura em duas camadas, estrutura de resistor elétrico embutida, estrutura em três camadas para a formação de resistores distintos, processos para formar uma camada moldada de material resistivo em contato elétrico com uma camada de material eletricamente condutor, para formar um resistor elétrico e formar um molde de material resistivo sobre um substrato isolante, e, solução de precursor para formação de um material eletricamente resistivo - Google Patents

Resistor elétrico, material eletricamente resistivo, estrutura, estrutura em duas camadas, estrutura de resistor elétrico embutida, estrutura em três camadas para a formação de resistores distintos, processos para formar uma camada moldada de material resistivo em contato elétrico com uma camada de material eletricamente condutor, para formar um resistor elétrico e formar um molde de material resistivo sobre um substrato isolante, e, solução de precursor para formação de um material eletricamente resistivo

Info

Publication number
BR9901357A
BR9901357A BR9901357-6A BR9901357A BR9901357A BR 9901357 A BR9901357 A BR 9901357A BR 9901357 A BR9901357 A BR 9901357A BR 9901357 A BR9901357 A BR 9901357A
Authority
BR
Brazil
Prior art keywords
resistive material
forming
layer
electrical resistor
electrically
Prior art date
Application number
BR9901357-6A
Other languages
English (en)
Inventor
Andrew T Hunt
Tzyy Jiuan Hwang
Hong Shao
Joe Thomas
Wen-Yi Lin
Shara S Shoup
Henry A Luten
John Eric Mcentyre
Richard W Carpenter
Stephen E Bottomley
Michelle Hendrick
Original Assignee
Morton Int Inc
Microcoating Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/069,640 external-priority patent/US6193911B1/en
Priority claimed from US09/069,427 external-priority patent/US6208234B1/en
Priority claimed from US09/069,679 external-priority patent/US6210592B1/en
Priority claimed from US09/198,954 external-priority patent/US6329899B1/en
Application filed by Morton Int Inc, Microcoating Technologies Inc filed Critical Morton Int Inc
Publication of BR9901357A publication Critical patent/BR9901357A/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/18—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material comprising a plurality of layers stacked between terminals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/20—Resistors
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/20—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by pyrolytic processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
    • H01C17/2416—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by chemical etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • H05K1/167—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed resistors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0302—Properties and characteristics in general
    • H05K2201/0317—Thin film conductor layer; Thin film passive component
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0335—Layered conductors or foils
    • H05K2201/0355—Metal foils
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03—Metal processing
    • H05K2203/0338—Transferring metal or conductive material other than a circuit pattern, e.g. bump, solder, printed component
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/13—Moulding and encapsulation; Deposition techniques; Protective layers
    • H05K2203/1333—Deposition techniques, e.g. coating
    • H05K2203/1338—Chemical vapour deposition
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061—Etching masks
    • H05K3/064—Photoresists

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Computer Hardware Design (AREA)
  • Inorganic Chemistry (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Chemical Vapour Deposition (AREA)
  • Non-Adjustable Resistors (AREA)
  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

''RESISTOR ELéTRICO, MATERIAL ELETRICAMENTE RESISTIDO, ESTRUTURA, ESTRUTURA EM DUAS CAMADAS, ESTRUTURA DE RESISTOR ELéTRICO EMBUTIDA, ESTRUTURA EM TRêS CAMADAS PARA A FORMAçãO DE RESISTORES DISTINTOS, PROCESSOS PARA FORMAR UMA CAMADA MOLDADA DE MATERIAL RESISTIVO EM CONTATO ELéTRICO COM UMA CAMADA DE MATERIAL ELETRICAMENTE CONDUTOR, PARA FORMAR UM RESISTOR ELéTRICO E FORMAR UM MOLDE DE MATERIAL RESISTIVO SOBRE UM SUBSTRATO ISOLANTE, E, SOLUçãO DE PRECURSOR PARA A FORMAçãO DE UM MATERIAL ELETRICAMENTE RESISTIVO'' A invenção é dirigida a resistores de filme delgado, que podem ser embutidos em placas de circuito impresso de multi-camadas. A invenção é também dirigida a estruturas para a formação de tais resistores de filme delgado e a processos para a formação de tais estruturas, incluindo o uso de deposição de vapor químico de combustão. A invenção é também dirigida a soluções de precursor químico, pelas quais os materiais resitivos podem ser depositados sobre um substrato por técnicas de deposição de vapor químico de combustão.
BR9901357-6A 1998-04-29 1999-04-28 Resistor elétrico, material eletricamente resistivo, estrutura, estrutura em duas camadas, estrutura de resistor elétrico embutida, estrutura em três camadas para a formação de resistores distintos, processos para formar uma camada moldada de material resistivo em contato elétrico com uma camada de material eletricamente condutor, para formar um resistor elétrico e formar um molde de material resistivo sobre um substrato isolante, e, solução de precursor para formação de um material eletricamente resistivo BR9901357A (pt)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US09/069,640 US6193911B1 (en) 1998-04-29 1998-04-29 Precursor solution compositions for electronic devices using CCVD
US09/069,427 US6208234B1 (en) 1998-04-29 1998-04-29 Resistors for electronic packaging
US09/069,679 US6210592B1 (en) 1998-04-29 1998-04-29 Deposition of resistor materials directly on insulating substrates
US09/198,954 US6329899B1 (en) 1998-04-29 1998-11-24 Formation of thin film resistors

Publications (1)

Publication Number Publication Date
BR9901357A true BR9901357A (pt) 2001-03-20

Family

ID=27490767

Family Applications (1)

Application Number Title Priority Date Filing Date
BR9901357-6A BR9901357A (pt) 1998-04-29 1999-04-28 Resistor elétrico, material eletricamente resistivo, estrutura, estrutura em duas camadas, estrutura de resistor elétrico embutida, estrutura em três camadas para a formação de resistores distintos, processos para formar uma camada moldada de material resistivo em contato elétrico com uma camada de material eletricamente condutor, para formar um resistor elétrico e formar um molde de material resistivo sobre um substrato isolante, e, solução de precursor para formação de um material eletricamente resistivo

Country Status (8)

Country Link
EP (1) EP0955642A3 (pt)
JP (1) JPH11340003A (pt)
KR (1) KR100322287B1 (pt)
CN (5) CN1521769A (pt)
BR (1) BR9901357A (pt)
CA (1) CA2267492C (pt)
IL (1) IL129493A (pt)
SG (1) SG68713A1 (pt)

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IL132834A (en) * 1998-11-23 2006-06-11 Micro Coating Technologies Production of capacitors with a thin layer
US6606792B1 (en) * 2000-05-25 2003-08-19 Oak-Mitsui, Inc. Process to manufacturing tight tolerance embedded elements for printed circuit boards
US7241691B2 (en) * 2005-03-28 2007-07-10 Freescale Semiconductor, Inc. Conducting metal oxide with additive as p-MOS device electrode
CN101399101B (zh) * 2007-09-29 2011-11-09 财团法人工业技术研究院 薄膜电阻结构及其制造方法
FI20085085A0 (fi) * 2008-01-31 2008-01-31 Jyrki Maekelae Rullalta rullalle -menetelmä ja pinnoituslaite
KR101016729B1 (ko) * 2009-02-20 2011-02-25 삼성전기주식회사 세라믹-금속 나노복합체를 이용한 박막 내장형 저항체
CN104379805A (zh) * 2012-06-23 2015-02-25 福瑞托-雷北美有限公司 超薄无机氧化物涂层在包装上的沉积
DE102014222998B4 (de) * 2014-11-11 2018-08-02 Heraeus Deutschland GmbH & Co. KG Zusammensetzung, Schichtstruktur, deren Vorläufer, Trägerstruktur, sowie Verfahren zur Herstellung der Schichtstruktur
DE102014222996B4 (de) * 2014-11-11 2018-05-09 Heraeus Deutschland GmbH & Co. KG Zusammensetzung, Schichtstruktur, deren Vorläufer, Trägerstruktur, sowie Verfahren zur Herstellung der Schichtstruktur
CN106787942B (zh) * 2016-12-05 2019-11-15 大连民族大学 一种运动场地发电装置及发电方法
DE102017101262A1 (de) 2017-01-24 2018-07-26 Deutsches Zentrum für Luft- und Raumfahrt e.V. Ultradünne Folienthermistoren
CN110612579A (zh) * 2017-05-09 2019-12-24 株式会社Flosfia 热敏电阻膜及其成膜方法
CN107393669B (zh) * 2017-06-27 2019-03-08 应城和天电子科技有限公司 一种陶瓷电阻碳化工艺
KR20210120990A (ko) 2018-11-09 2021-10-07 소프레시 인코포레이티드 블로운 필름 재료 및 그것의 제조를 위한 프로세스들 및 그것의 용도들
CN110718341A (zh) * 2019-10-18 2020-01-21 江苏弘银合金科技有限公司 导线表面电阻可调绝缘层的制作方法
CN110726809A (zh) * 2019-10-19 2020-01-24 北京工业大学 高可靠性可燃气体状态监测及报警设备设计方法
CN111417256A (zh) * 2020-03-18 2020-07-14 浙江万正电子科技有限公司 一种埋平面电阻线路板的平面电阻膜的蚀刻工艺
CN115466949B (zh) * 2022-09-30 2023-08-04 成都银河动力有限公司 一种确保活塞销孔粗糙度≤Ra0.4的磷化工艺
CN116782494B (zh) * 2023-07-25 2024-02-20 广州方邦电子股份有限公司 一种复合基材及其制备方法与电路板

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Also Published As

Publication number Publication date
EP0955642A2 (en) 1999-11-10
SG68713A1 (en) 1999-11-16
CN1521768A (zh) 2004-08-18
CN1521769A (zh) 2004-08-18
CN100336139C (zh) 2007-09-05
CN1234588A (zh) 1999-11-10
KR19990083589A (ko) 1999-11-25
CN1503276A (zh) 2004-06-09
IL129493A (en) 2004-12-15
IL129493A0 (en) 2000-02-29
CN1302488C (zh) 2007-02-28
CN1324617C (zh) 2007-07-04
CA2267492A1 (en) 1999-10-29
CN1503277A (zh) 2004-06-09
CA2267492C (en) 2003-09-23
KR100322287B1 (ko) 2002-03-25
EP0955642A3 (en) 2001-12-05
JPH11340003A (ja) 1999-12-10

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Legal Events

Date Code Title Description
B25F Entry of change of name and/or headquarter and transfer of application, patent and certif. of addition of invention: change of name on requirement

Owner name: MORTON INTERNATIONAL, INC. (US) , MICROCOATING TEC

Free format text: A FIM DE ATENDER O SOLICITADO NA PETICAO DE ALTERACAO DE NOME E SEDE NO 020040000931/RJ DE 07/10/2004, QUEIRA REAPRESENTAR O DOCUMENTO DE ALTERACAO DE NOME COM A RESPECTIVA NOTARIZACAO E LEGALIZACAO CONSULAR, BEM COMO PROCURACAO EMITIDA PELA INTERESSADA CONSTANDO NOME E ENDERECO ATUALIZADOS.

B25E Requested change of name of applicant rejected

Owner name: MORTON INTERNATIONAL, INC. (US) , MICROCOATING TEC

Free format text: INDEFERIDA A ALTERACAO DE NOME REQUERIDA ATRAVES DA PETICAO NO 20040000931/RJ DE 07/10/2004, POR FALTA DE CUMPRIMENTO DA EXIGENCIA PUBLICADA NA RPI 1877 DE 26/12/2006.

B07A Application suspended after technical examination (opinion) [chapter 7.1 patent gazette]
B09B Patent application refused [chapter 9.2 patent gazette]

Free format text: INDEFIRO O PEDIDO DE ACORDO COM O(S) ARTIGO(S) 8O E 13 DA LPI

B09B Patent application refused [chapter 9.2 patent gazette]

Free format text: MANTIDO O INDEFERIMENTO UMA VEZ QUE NAO FOI APRESENTADO RECURSO DENTRO DO PRAZO LEGAL.