BR8701853A - Folha composita,processo para a sua producao e filtro compreendendo tal folha - Google Patents

Folha composita,processo para a sua producao e filtro compreendendo tal folha

Info

Publication number
BR8701853A
BR8701853A BR8701853A BR8701853A BR8701853A BR 8701853 A BR8701853 A BR 8701853A BR 8701853 A BR8701853 A BR 8701853A BR 8701853 A BR8701853 A BR 8701853A BR 8701853 A BR8701853 A BR 8701853A
Authority
BR
Brazil
Prior art keywords
sheet
understanding
filter
production
composite sheet
Prior art date
Application number
BR8701853A
Other languages
English (en)
Inventor
Ernest Paul Butler
Rowena Roshanthi Landham
Michael Patrick Thomas
Original Assignee
Alcan Int Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB868609248A external-priority patent/GB8609248D0/en
Priority claimed from GB878704252A external-priority patent/GB8704252D0/en
Application filed by Alcan Int Ltd filed Critical Alcan Int Ltd
Publication of BR8701853A publication Critical patent/BR8701853A/pt

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D69/00Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12Composite membranes; Ultra-thin membranes
    • B01D69/122Separate manufacturing of ultra-thin membranes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D67/00Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039Inorganic membrane manufacture
    • B01D67/0046Inorganic membrane manufacture by slurry techniques, e.g. die or slip-casting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D67/00Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039Inorganic membrane manufacture
    • B01D67/0048Inorganic membrane manufacture by sol-gel transition
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D69/00Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12Composite membranes; Ultra-thin membranes
    • B01D69/125In situ manufacturing by polymerisation, polycondensation, cross-linking or chemical reaction
    • B01D69/127In situ manufacturing by polymerisation, polycondensation, cross-linking or chemical reaction using electrical discharge or plasma-polymerisation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D71/00Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02Inorganic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208Oxides, e.g. ceramics
    • C23C18/1216Metal oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125Process of deposition of the inorganic material
    • C23C18/1254Sol or sol-gel processing
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • C25D11/045Anodisation of aluminium or alloys based thereon for forming AAO templates
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • C25D11/18After-treatment, e.g. pore-sealing
    • C25D11/24Chemical after-treatment
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • C25D11/18After-treatment, e.g. pore-sealing
    • C25D11/24Chemical after-treatment
    • C25D11/246Chemical after-treatment for sealing layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2325/00Details relating to properties of membranes
    • B01D2325/04Characteristic thickness

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Dispersion Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
BR8701853A 1986-04-16 1987-04-15 Folha composita,processo para a sua producao e filtro compreendendo tal folha BR8701853A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB868609248A GB8609248D0 (en) 1986-04-16 1986-04-16 Composite membranes
GB878704252A GB8704252D0 (en) 1987-02-24 1987-02-24 Composite membrane

Publications (1)

Publication Number Publication Date
BR8701853A true BR8701853A (pt) 1988-01-26

Family

ID=26290632

Family Applications (1)

Application Number Title Priority Date Filing Date
BR8701853A BR8701853A (pt) 1986-04-16 1987-04-15 Folha composita,processo para a sua producao e filtro compreendendo tal folha

Country Status (10)

Country Link
US (2) US4938870A (pt)
EP (2) EP0397216A1 (pt)
KR (1) KR870009744A (pt)
CN (1) CN1010380B (pt)
AU (1) AU597641B2 (pt)
BR (1) BR8701853A (pt)
DE (1) DE3771111D1 (pt)
DK (1) DK193287A (pt)
ES (1) ES2022890B3 (pt)
NO (1) NO871596L (pt)

Families Citing this family (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8702759A (nl) * 1987-11-19 1989-06-16 Hoogovens Groep Bv Werkwijze voor het vervaardigen van een micro-permeabel membraan en inrichting voor het aanbrengen van deze membraan op een drager.
EP0332789B1 (fr) * 1988-03-17 1994-02-23 Societe Des Ceramiques Techniques Membrane de filtration et procédé de fabrication
DE68902595T2 (de) * 1988-05-24 1993-03-04 Ceramesh Ltd Komposit-membranen.
US5605628A (en) * 1988-05-24 1997-02-25 North West Water Group Plc Composite membranes
GB8812217D0 (en) * 1988-05-24 1988-06-29 Alcan Int Ltd Composite membranes
US4929406A (en) * 1988-05-27 1990-05-29 Ngk Insulators, Ltd. Process for producing an inorganic porous membrane
GB8823417D0 (en) * 1988-10-05 1988-11-09 Alcan Int Ltd Treating porous anodic aluminium oxide membrane
US5030351A (en) * 1989-06-09 1991-07-09 Massachusetts Institute Of Technology Process for the preparation of a binary membrane top layer
US5711884A (en) * 1990-08-22 1998-01-27 University Of Pittsburgh Of The Commonwealth System Of Higher Education Method of filtering submicron particles with gel lattice membrane filter
US5130166A (en) * 1990-12-14 1992-07-14 E. I. Du Pont De Nemours And Company Method for reducing the pore size of sintered metal filters by application of an alcoholic solution of a metal alkoxide which is converted to an insoluble hydrous metal oxide
DE4117284A1 (de) * 1991-05-27 1992-12-03 Studiengesellschaft Kohle Mbh Verfahren zur herstellung von mikroporoesen keramikmembranen fuer die trennung von gas- und fluessigkeitsgemischen
ATE339249T1 (de) * 1993-04-23 2006-10-15 Exxonmobil Res & Eng Co Molekularsiebschichten und verfahren zu ihrer herstellung
US6071419A (en) 1993-10-20 2000-06-06 Products Unlimited, Inc. Fluid filter, method of making and using thereof
US6923911B1 (en) 1993-10-20 2005-08-02 Scott B. Beier Method of filtering air through an air passageway
US6284314B1 (en) * 1993-12-09 2001-09-04 Agency Of Industrial Science & Technology, Ministry Of International Trade & Industry Porous ceramic thin film and method for production thereof
FR2727103B1 (fr) * 1994-11-23 1996-12-27 Kodak Pathe Procede de preparation des halogenures metalliques par voie sol-gel
US5607778A (en) * 1995-07-20 1997-03-04 Purolator Products Company Method of manufacturing a porous metal mat
US5772735A (en) * 1995-11-02 1998-06-30 University Of New Mexico Supported inorganic membranes
US6464881B2 (en) 1996-10-21 2002-10-15 Orelis Inorganic nanofiltration membrane and its application in the sugar industry
JP3341278B2 (ja) * 1997-03-31 2002-11-05 株式会社豊田中央研究所 メソポア材料及びその製造方法
IL123326A (en) * 1998-02-16 2001-10-31 Bpt Biopure Technologies Ltd Selective membrane and process for its preparation
NL1010097C2 (nl) * 1998-09-15 2000-03-17 Univ Twente Scheidingsinrichting met keramisch membraan.
US6649255B1 (en) * 1999-03-04 2003-11-18 Douglas E. Fain, Sr. Article and method for producing extremely small pore inorganic membranes
DE60126265T2 (de) * 2000-05-12 2007-10-31 Novalar Pharmaceuticals, Inc. Zusammensetzung bestehend aus Phentolaminmesylat und deren Verwendung
KR100369118B1 (ko) * 2000-05-13 2003-01-24 한국과학기술연구원 스크린 프린팅에 의한 고밀도 세라믹 후막 제조방법
US6676904B1 (en) * 2000-07-12 2004-01-13 Us Gov Sec Navy Nanoporous membrane immunosensor
DE10222568B4 (de) 2002-05-17 2007-02-08 W.C. Heraeus Gmbh Kompositmembran und Verfahren zu deren Herstellung
JP4027218B2 (ja) * 2002-12-13 2007-12-26 キヤノン株式会社 濾過膜の製造方法
US7625840B2 (en) * 2003-09-17 2009-12-01 Uchicago Argonne, Llc. Catalytic nanoporous membranes
CN1306989C (zh) * 2004-01-13 2007-03-28 中南大学 孔径梯度均质钛铝金属间化合物过滤膜的制备方法
GB0500035D0 (en) 2005-01-04 2005-02-09 Nanotecture Ltd Filter
CN100337991C (zh) * 2005-12-23 2007-09-19 北京蓝景创新科技有限公司 超细金属粉烧结基复合膜及其制备方法和海水淡化系统
US8210360B2 (en) * 2006-05-07 2012-07-03 Synkera Technologies, Inc. Composite membranes and methods for making same
US20100219079A1 (en) * 2006-05-07 2010-09-02 Synkera Technologies, Inc. Methods for making membranes based on anodic aluminum oxide structures
KR20080078096A (ko) * 2007-02-22 2008-08-27 한국과학기술연구원 알루미나 코팅층 형성 방법
KR100856746B1 (ko) * 2007-03-20 2008-09-04 명지대학교 산학협력단 티타니아 박막의 제조방법
US7771517B2 (en) * 2007-05-14 2010-08-10 Global Finishing Solutions, L.L.C. Filtering method
US8622223B2 (en) * 2008-12-17 2014-01-07 General Electric Company Membrane assemblies and methods of making and using the same
WO2011101626A1 (en) * 2010-02-16 2011-08-25 Glysure Ltd Barrier layer for glusose sensor
US8512872B2 (en) * 2010-05-19 2013-08-20 Dupalectpa-CHN, LLC Sealed anodic coatings
US10214827B2 (en) 2010-05-19 2019-02-26 Sanford Process Corporation Microcrystalline anodic coatings and related methods therefor
KR101201469B1 (ko) * 2010-08-19 2012-11-14 포항공과대학교 산학협력단 마스크 및 그의 제조 방법
US8992696B2 (en) * 2011-05-23 2015-03-31 GM Global Technology Operations LLC Method of bonding a metal to a substrate
US8852359B2 (en) * 2011-05-23 2014-10-07 GM Global Technology Operations LLC Method of bonding a metal to a substrate
KR101807018B1 (ko) * 2016-07-12 2017-12-08 현대자동차 주식회사 다공성 단열 코팅층 제조방법, 다공성 단열 코팅층 및 이를 이용한 내연 기관
CN107681113B (zh) * 2016-08-01 2020-07-28 宁德时代新能源科技股份有限公司 正极片及其制备方法以及二次电池
CN108392961B (zh) * 2018-03-27 2021-05-18 鑫蓝环保科技(昆山)有限公司 纳米气泡有机废气处理方法及系统
CN111068520A (zh) * 2020-02-14 2020-04-28 惠州市科近离子膜材料研究院 一种基于重离子微孔膜的亚微米孔径复合膜及其制备方法与应用
CN114249603A (zh) * 2021-11-10 2022-03-29 湖南大学 一种氧化铝隔膜及其制备方法和应用

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1605248A (en) * 1943-12-10 1986-03-05 Mond Nickel Co Ltd Production of articles from powdered metals
US3944658A (en) 1972-08-17 1976-03-16 Owens-Illinois, Inc. Transparent activated nonparticulate alumina and method of preparing same
US3850762A (en) * 1973-08-13 1974-11-26 Boeing Co Process for producing an anodic aluminum oxide membrane
US3923654A (en) * 1974-05-30 1975-12-02 Owens Illinois Inc Ultrafiltration membrane
FR2286851A1 (fr) * 1974-10-02 1976-04-30 Inst Nat Rech Chimique Membranes en polyacrylamide reticule ou en polyacrylamide substitue reticule, leur fabrication et leur application
FR2575396B2 (fr) * 1977-04-12 1987-04-30 Commissariat Energie Atomique Procede de fabrication de membranes minerales poreuses et permeables
FR2550953B1 (fr) * 1977-04-12 1987-02-20 Commissariat Energie Atomique Procede de fabrication de membranes minerales permeables
US4214020A (en) * 1977-11-17 1980-07-22 Monsanto Company Processes for coating bundles of hollow fiber membranes
JPS5817143B2 (ja) * 1979-02-22 1983-04-05 鳴海製陶株式会社 セラミツクテ−プの製造方法
DE3067421D1 (en) * 1980-05-21 1984-05-17 Sfec Process for the production of a dry inorganic ultrafiltration membrane and membrane produced by such a method
NL8303079A (nl) * 1983-09-05 1985-04-01 Stichting Energie Werkwijze voor de bereiding van scheurvrije semi-permeabele anorganische membranen.
US4562021A (en) * 1983-09-06 1985-12-31 Ceraver, S.A. Method of manufacturing a medium for microfiltration, for ultrafiltration, or for reverse osmosis
JPS60180979A (ja) 1984-02-27 1985-09-14 浅枝 正司 凝縮成分分離用セラミツク膜の製造方法
GB8426264D0 (en) * 1984-10-17 1984-11-21 Alcan Int Ltd Porous films
FR2575459B1 (fr) * 1984-12-28 1991-10-04 Commissariat Energie Atomique Procede de fabrication de membranes minerales, poreuses et permeables
US4689150A (en) * 1985-03-07 1987-08-25 Ngk Insulators, Ltd. Separation membrane and process for manufacturing the same
FR2587231B1 (fr) * 1985-09-13 1990-05-11 Centre Nat Rech Scient Couches minces microporeuses a porosite ouverte ayant des proprietes de conduction, leur preparation et leur application a l'analyse chimique
ES2014249B3 (es) * 1985-11-25 1990-07-01 Alusuisse-Lonza Services Ag Procedimiento para fabricar una membrana parcialmente permeable.
GB8609249D0 (en) * 1986-04-16 1986-05-21 Alcan Int Ltd Anodic oxide membrane catalyst support
JP2532887B2 (ja) * 1987-09-11 1996-09-11 四国化成工業株式会社 二酸化塩素の徐放性組成物

Also Published As

Publication number Publication date
DK193287D0 (da) 1987-04-14
DK193287A (da) 1987-10-17
EP0397216A1 (en) 1990-11-14
AU7155287A (en) 1987-10-22
US5137634A (en) 1992-08-11
AU597641B2 (en) 1990-06-07
CN87103503A (zh) 1988-03-23
CN1010380B (zh) 1990-11-14
KR870009744A (ko) 1987-11-30
NO871596D0 (no) 1987-04-15
EP0242208B1 (en) 1991-07-03
NO871596L (no) 1987-10-19
DE3771111D1 (de) 1991-08-08
US4938870A (en) 1990-07-03
EP0242208A1 (en) 1987-10-21
ES2022890B3 (es) 1991-12-16

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Legal Events

Date Code Title Description
B15K Others concerning applications: alteration of classification

Free format text: PROCEDIMENTO AUTOMATICO DE RECLASSIFICACAO. A CLASSIFICACAO IPC ANTERIOR ERA B01D 13/04.

Ipc: B01D 67/00 (2006.01), B01D 71/02 (2006.01), C23C 1

Ipc: B01D 67/00 (2006.01), B01D 71/02 (2006.01), C23C 1