BR112015007867A2 - bomba de absorção - Google Patents

bomba de absorção

Info

Publication number
BR112015007867A2
BR112015007867A2 BR112015007867A BR112015007867A BR112015007867A2 BR 112015007867 A2 BR112015007867 A2 BR 112015007867A2 BR 112015007867 A BR112015007867 A BR 112015007867A BR 112015007867 A BR112015007867 A BR 112015007867A BR 112015007867 A2 BR112015007867 A2 BR 112015007867A2
Authority
BR
Brazil
Prior art keywords
revolution
axis
absorption pump
central support
absorbent
Prior art date
Application number
BR112015007867A
Other languages
English (en)
Other versions
BR112015007867B1 (pt
Inventor
Bonucci Antonio
Viale Luca
Original Assignee
Getters Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Getters Spa filed Critical Getters Spa
Publication of BR112015007867A2 publication Critical patent/BR112015007867A2/pt
Publication of BR112015007867B1 publication Critical patent/BR112015007867B1/pt

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F04B37/04—Selection of specific absorption or adsorption materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H01J7/183—Composition or manufacture of getters

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Compressor (AREA)

Abstract

resumo patente de invenção: "bomba de absorção". a presente invenção refere-se a uma bomba de absorção que compreende um invólucro (21, 21’), cujo formato é um sólido de revolução com um eixo de revolução (24), e vários cartuchos absorventes (22, 23) montados dentro do dito invólucro de bomba de absorção (21, 21’), cada cartucho (22, 23) compreendendo um suporte central linear (221, 231) e elementos absorventes espaçados montados no dito suporte central linear (221, 231), um plano, contendo um suporte central linear (221, 231) e paralelo ao eixo de revolução (24) e paralelo ao eixo de revolução (24) sendo definido um plano de orientação de cartucho absorvente, e um plano ortogonal ao eixo de revolução (24) e interceptando o ponto médio de um suporte central linear (221, 231) sendo definido um plano de posicionamento de cartucho absorvente (222, 232), os ângulos (?, ?’) formados pelos ditos planos de posicionamento (222, 232) com os suportes centrais lineares (221, 231) são iguais a ou menores que 30°.
BR112015007867-2A 2012-10-15 2013-09-24 bomba de absorção e uso de uma bomba de absorção BR112015007867B1 (pt)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IT001732A ITMI20121732A1 (it) 2012-10-15 2012-10-15 Pompa getter
ITMI2012A001732 2012-10-15
PCT/IB2013/058802 WO2014060879A1 (en) 2012-10-15 2013-09-24 Getter pump

Publications (2)

Publication Number Publication Date
BR112015007867A2 true BR112015007867A2 (pt) 2017-07-04
BR112015007867B1 BR112015007867B1 (pt) 2021-02-23

Family

ID=47324273

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112015007867-2A BR112015007867B1 (pt) 2012-10-15 2013-09-24 bomba de absorção e uso de uma bomba de absorção

Country Status (12)

Country Link
US (1) US9638183B2 (pt)
EP (1) EP2791960B1 (pt)
JP (1) JP6121549B2 (pt)
KR (1) KR101947226B1 (pt)
CN (1) CN104685601B (pt)
BR (1) BR112015007867B1 (pt)
CA (1) CA2886111C (pt)
ES (1) ES2540580T3 (pt)
IT (1) ITMI20121732A1 (pt)
RU (1) RU2639293C2 (pt)
TW (1) TWI614404B (pt)
WO (1) WO2014060879A1 (pt)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITMI20121732A1 (it) 2012-10-15 2014-04-16 Getters Spa Pompa getter
TWI660125B (zh) * 2014-04-03 2019-05-21 義大利商沙斯格特斯公司 吸氣泵
US9685308B2 (en) 2014-06-26 2017-06-20 Saes Getters S.P.A. Getter pumping system
JP5855294B1 (ja) * 2015-02-06 2016-02-09 株式会社日立製作所 イオンポンプおよびそれを用いた荷電粒子線装置
WO2024028240A1 (en) 2022-08-01 2024-02-08 Saes Getters S.P.A. Snap-on getter pump assembly and its use

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1106970A (en) * 1964-08-04 1968-03-20 Cons Vacuum Corp Improvements in or relating to sources of vaporized material
DE2034633C3 (de) 1969-07-24 1979-10-25 S.A.E.S. Getters S.P.A., Mailand (Italien) Kartusche für eine Getterpumpe
US4137012A (en) 1976-11-03 1979-01-30 S.A.E.S. Getters S.P.A. Modular getter pumps
IT1255438B (it) * 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
IT1255439B (it) 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
IT1274478B (it) * 1995-05-11 1997-07-17 Getters Spa Insieme di riscaldamento per pompe getter e purificatori di gas
IT237018Y1 (it) 1995-07-10 2000-08-31 Getters Spa Pompa getter perfezionata in particolare per uno strumento dianalisi chimiche portatile
IT1292175B1 (it) 1997-06-17 1999-01-25 Getters Spa Pompa getter particolarmente adatta per l'uso a monte,in prossimita' e coassialmente ad una pompa turbomolecolare
IT1295340B1 (it) * 1997-10-15 1999-05-12 Getters Spa Pompa getter ad elevata velocita' di assorbimento di gas
IT1297013B1 (it) 1997-12-23 1999-08-03 Getters Spa Sistema getter per la purificazione dell'atmosfera di lavoro nei processi di deposizione fisica da vapore
IT1302694B1 (it) * 1998-10-19 2000-09-29 Getters Spa Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea.
IT1312248B1 (it) * 1999-04-12 2002-04-09 Getters Spa Metodo per aumentare la produttivita' di processi di deposizione distrati sottili su un substrato e dispositivi getter per la
US7045958B2 (en) * 2003-04-14 2006-05-16 Hewlett-Packard Development Company, L.P. Vacuum device having a getter
ITMI20080282A1 (it) 2008-02-22 2009-08-23 Getters Spa Apparato per litografia con radiazione nell'uv estremo con un elemento assorbitore di idrocarburi comprendente un materiale getter
US8342813B2 (en) 2008-03-28 2013-01-01 Saes Getters S.P.A. Combined pumping system comprising a getter pump and an ion pump
ITMI20090402A1 (it) 2009-03-17 2010-09-18 Getters Spa Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica
ITMI20121732A1 (it) 2012-10-15 2014-04-16 Getters Spa Pompa getter

Also Published As

Publication number Publication date
TW201433693A (zh) 2014-09-01
CA2886111C (en) 2018-12-04
CN104685601A (zh) 2015-06-03
JP6121549B2 (ja) 2017-04-26
ES2540580T3 (es) 2015-07-10
RU2015118130A (ru) 2016-12-10
KR20150070123A (ko) 2015-06-24
US9638183B2 (en) 2017-05-02
US20140369856A1 (en) 2014-12-18
RU2639293C2 (ru) 2017-12-21
BR112015007867B1 (pt) 2021-02-23
ITMI20121732A1 (it) 2014-04-16
TWI614404B (zh) 2018-02-11
EP2791960B1 (en) 2015-04-01
WO2014060879A1 (en) 2014-04-24
KR101947226B1 (ko) 2019-02-12
JP2015531457A (ja) 2015-11-02
CN104685601B (zh) 2016-08-24
CA2886111A1 (en) 2014-04-24
EP2791960A1 (en) 2014-10-22

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Legal Events

Date Code Title Description
B06F Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette]
B06U Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette]
B09A Decision: intention to grant [chapter 9.1 patent gazette]
B16A Patent or certificate of addition of invention granted [chapter 16.1 patent gazette]

Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 24/09/2013, OBSERVADAS AS CONDICOES LEGAIS.