BR112012021580A2 - sínetese de óxidos de metal por evaporação reativa por acaso catódico. - Google Patents
sínetese de óxidos de metal por evaporação reativa por acaso catódico.Info
- Publication number
- BR112012021580A2 BR112012021580A2 BR112012021580A BR112012021580A BR112012021580A2 BR 112012021580 A2 BR112012021580 A2 BR 112012021580A2 BR 112012021580 A BR112012021580 A BR 112012021580A BR 112012021580 A BR112012021580 A BR 112012021580A BR 112012021580 A2 BR112012021580 A2 BR 112012021580A2
- Authority
- BR
- Brazil
- Prior art keywords
- reactive
- target surface
- partial pressure
- oxygen partial
- evaporation
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
sínetese de óxidos de metal por evaporação reativa por acaso catódico. a presente invenção refere-se à evaporação reativa poor arco catódico dos alvos compostos de al-cr e a nucleação e formação de fases das camadas sintetizadas de al-cr-o. a pressão parcial de oxigênio e a operação pulsada da corrente do arco influenciam a formação de fases intermetálicas e de soluções sólidas na superfície do alvo. a nucleação dos óxidos ternários no sítio do substrato parece parece ser controlável, em alguma medida, pelos intermetálicos e soluções sólidas, formados na superfície do alvo. um processo específico de nucleação no sítio do substrato pode, portanto, ser induzido pela escolha livre da composição allvo em combinação com a pressão parcial do gás reativo de oxigênio. além disso, permite o controle sobre o crescimento de ilhas de óxidos na superfície alvo, que ocorre ocasionalmente na pressão parcial mais alta de oxigênio. isto é apoiado pela análise por direção de raios-x das camadas, bem como da superfície do alvo.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP10002039A EP2363509A1 (en) | 2010-02-28 | 2010-02-28 | Synthesis of metal oxides by reactive cathodic arc evaporation |
| US32823810P | 2010-04-27 | 2010-04-27 | |
| PCT/EP2011/000383 WO2011103955A1 (en) | 2010-02-28 | 2011-02-10 | Synthesis of metal oxides by reactive cathodic arc evaporation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BR112012021580A2 true BR112012021580A2 (pt) | 2016-08-23 |
Family
ID=43066916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BR112012021580A BR112012021580A2 (pt) | 2010-02-28 | 2011-02-10 | sínetese de óxidos de metal por evaporação reativa por acaso catódico. |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US10711341B2 (pt) |
| EP (2) | EP2363509A1 (pt) |
| JP (1) | JP2013521406A (pt) |
| KR (1) | KR20120138755A (pt) |
| CN (1) | CN102782178B (pt) |
| BR (1) | BR112012021580A2 (pt) |
| CA (1) | CA2791197C (pt) |
| MX (1) | MX340906B (pt) |
| SG (2) | SG10201501357QA (pt) |
| WO (1) | WO2011103955A1 (pt) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8652589B2 (en) | 2008-01-25 | 2014-02-18 | Oerlikon Trading Ag, Truebbach | Permeation barrier layer |
| DE102013006633A1 (de) * | 2013-04-18 | 2014-10-23 | Oerlikon Trading Ag, Trübbach | Funkenverdampfen von metallischen, intermetallischen und keramischen Targetmaterialien um Al-Cr-N Beschichtungen herzustellen |
| EP2980267B1 (en) * | 2014-07-28 | 2019-05-01 | Oerlikon Surface Solutions AG, Trübbach | Corundum-type fe-doped cathodic arc evaporated al-cr-o coatings |
| DE102016212874A1 (de) * | 2016-07-14 | 2018-01-18 | Oerlikon Surface Solutions Ag, Pfäffikon | Schutzbeschichtung für eine thermisch beanspruchte Struktur |
| JP7315931B2 (ja) * | 2017-09-15 | 2023-07-27 | エリコン サーフェス ソリューションズ アーゲー、 プフェフィコン | より高い熱安定性を有するＡｌ－ＣｒＯ系コーティングおよびその製造方法 |
| CN111534799B (zh) * | 2020-05-29 | 2021-11-12 | 四川大学 | 一种抗氧化和隔热的陶瓷涂层及其制备方法 |
| US20240327308A1 (en) * | 2021-07-13 | 2024-10-03 | Oerlikon Surface Solutions Ag, Pfäffikon | Overlay coating resistant to molten calcium-magnesium-alumino-silicate |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH688863A5 (de) * | 1994-06-24 | 1998-04-30 | Balzers Hochvakuum | Verfahren zum Beschichten mindestens eines Werkstueckes und Anlage hierfuer. |
| SE522736C2 (sv) * | 2001-02-16 | 2004-03-02 | Sandvik Ab | Aluminiumoxidbelagt skärverktyg och metod för att framställa detsamma |
| US6548192B2 (en) * | 2001-04-05 | 2003-04-15 | Vapor Technologies, Inc. | Coated article having the appearance of stainless steel |
| JP4950499B2 (ja) * | 2006-02-03 | 2012-06-13 | 株式会社神戸製鋼所 | 硬質皮膜およびその成膜方法 |
| US7939181B2 (en) * | 2006-10-11 | 2011-05-10 | Oerlikon Trading Ag, Trubbach | Layer system with at least one mixed crystal layer of a multi-oxide |
| US8652589B2 (en) * | 2008-01-25 | 2014-02-18 | Oerlikon Trading Ag, Truebbach | Permeation barrier layer |
| JP5153439B2 (ja) * | 2008-04-25 | 2013-02-27 | 株式会社神戸製鋼所 | 硬質皮膜およびその形成方法ならびに硬質皮膜被覆部材 |
| PT2166128E (pt) * | 2008-09-19 | 2012-01-17 | Oerlikon Trading Ag | Método para produzir revestimentos de óxidos metálicos através de nebulização por descarga eléctrica |
-
2010
- 2010-02-28 EP EP10002039A patent/EP2363509A1/en not_active Ceased
-
2011
- 2011-02-10 JP JP2012555313A patent/JP2013521406A/ja active Pending
- 2011-02-10 WO PCT/EP2011/000383 patent/WO2011103955A1/en active Application Filing
- 2011-02-10 SG SG10201501357QA patent/SG10201501357QA/en unknown
- 2011-02-10 SG SG2012060950A patent/SG183362A1/en unknown
- 2011-02-10 EP EP11708979A patent/EP2539477A1/en not_active Ceased
- 2011-02-10 MX MX2012009977A patent/MX340906B/es active IP Right Grant
- 2011-02-10 CA CA2791197A patent/CA2791197C/en not_active Expired - Fee Related
- 2011-02-10 US US13/579,956 patent/US10711341B2/en active Active
- 2011-02-10 BR BR112012021580A patent/BR112012021580A2/pt not_active IP Right Cessation
- 2011-02-10 KR KR1020127022456A patent/KR20120138755A/ko active Search and Examination
- 2011-02-10 CN CN201180011431.2A patent/CN102782178B/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013521406A (ja) | 2013-06-10 |
| KR20120138755A (ko) | 2012-12-26 |
| WO2011103955A1 (en) | 2011-09-01 |
| MX2012009977A (es) | 2013-01-25 |
| US20130048490A1 (en) | 2013-02-28 |
| EP2539477A1 (en) | 2013-01-02 |
| SG183362A1 (en) | 2012-09-27 |
| MX340906B (es) | 2016-07-29 |
| CA2791197A1 (en) | 2011-09-01 |
| SG10201501357QA (en) | 2015-04-29 |
| EP2363509A1 (en) | 2011-09-07 |
| CA2791197C (en) | 2018-04-24 |
| CN102782178A (zh) | 2012-11-14 |
| US10711341B2 (en) | 2020-07-14 |
| CN102782178B (zh) | 2016-08-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| BR112012021580A2 (pt) | sínetese de óxidos de metal por evaporação reativa por acaso catódico. | |
| Zhang et al. | Growth behavior of lanthanum conversion coating on hot-dip galvanized steel | |
| MX2010011496A (es) | Metodo para producir capas de oxido metalico de estructura predeterminada por medio de evaporacion de arco. | |
| JP2012256444A5 (pt) | ||
| BR112013027022A2 (pt) | fonte de pulverização de alta potência | |
| ES2379518T3 (es) | Un procedimiento para fabricar una diana de óxido mediante depósito por pulverización catódica que comprende una primera fase y una segunda fase | |
| AR083508A1 (es) | Anodo para generacion electrolitica de cloro | |
| BR112014013648A8 (pt) | mancal deslizante | |
| PE20142156A1 (es) | Anodo para la generacion de oxigeno y procedimiento de fabricacion del mismo | |
| EP2133921B8 (en) | method to prepare a stable transparent electrode | |
| EP2480509A4 (en) | GLASS OF LOW EMISSIVITY WITH A DIELECTRIC LAYER AND METHOD FOR THEIR PRODUCTION | |
| Sanche | Role of secondary low energy electrons in radiobiology and chemoradiation therapy of cancer | |
| UA112024C2 (uk) | Цирконієві композиції попередньої обробки, які містять молібден, відповідні способи обробки металевих субстратів та відповідні металеві субстрати з покриттям | |
| WO2012093807A3 (ko) | 내지문 코팅 방법 및 장치 | |
| BR112013020682A2 (pt) | ligas de lítio de alumínio da série 2xxx | |
| AR076883A1 (es) | Catodo para procesos electroliticos | |
| PE20142157A1 (es) | Anodo duradero de carga elevada para generacion de oxigeno y procedimiento de fabricacion del mismo | |
| BR112014026231A2 (pt) | revestimentos de al-cr-o depositados por arco tendo propriedades acentuadas de revestimento | |
| Brögelmann et al. | Incorporation of oxygen at column boundaries in (Cr, Al) ON hard coatings | |
| BR112013020654A2 (pt) | material de camada de liga ferro-zinco | |
| Mukherjee et al. | Influence of thickness on the structural properties of radio-frequency and direct-current magnetron sputtered TiO2 anatase thin films | |
| Li et al. | Microstructure and corrosion characteristics of CrN/NiP sputtering thin films | |
| BR112014002193A2 (pt) | catalisador de ptxmy nanoestruturado para células pemfc tendo uma atividade alta e uma produção de h2o2 moderada | |
| Chang et al. | Deposition of yttria-stablized zirconia films using arc ion plating | |
| BR112012020665A2 (pt) | artigo depilatório |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| B25G | Requested change of headquarter approved |
Owner name: OERLIKON TRADING AG, TRUEBBACH (CH) |
|
| B06F | Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette] | ||
| B08F | Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette] |
Free format text: REFERENTE A 8A ANUIDADE. |
|
| B08K | Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette] |
Free format text: EM VIRTUDE DO ARQUIVAMENTO PUBLICADO NA RPI 2500 DE 04-12-2018 E CONSIDERANDO AUSENCIA DE MANIFESTACAO DENTRO DOS PRAZOS LEGAIS, INFORMO QUE CABE SER MANTIDO O ARQUIVAMENTO DO PEDIDO DE PATENTE, CONFORME O DISPOSTO NO ARTIGO 12, DA RESOLUCAO 113/2013. |
|
| B350 | Update of information on the portal [chapter 15.35 patent gazette] |