SG10201501357QA - Synthesis of metal oxides by reactive cathodic arc evaporation - Google Patents

Synthesis of metal oxides by reactive cathodic arc evaporation

Info

Publication number
SG10201501357QA
SG10201501357QA SG10201501357QA SG10201501357QA SG10201501357QA SG 10201501357Q A SG10201501357Q A SG 10201501357QA SG 10201501357Q A SG10201501357Q A SG 10201501357QA SG 10201501357Q A SG10201501357Q A SG 10201501357QA SG 10201501357Q A SG10201501357Q A SG 10201501357QA
Authority
SG
Singapore
Prior art keywords
synthesis
metal oxides
arc evaporation
cathodic arc
reactive cathodic
Prior art date
Application number
SG10201501357QA
Inventor
Jürgen Ramm
Benno Widrig
Original Assignee
Oerlikon Trading Ag Trübbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Trading Ag Trübbach filed Critical Oerlikon Trading Ag Trübbach
Publication of SG10201501357QA publication Critical patent/SG10201501357QA/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
SG10201501357QA 2010-02-28 2011-02-10 Synthesis of metal oxides by reactive cathodic arc evaporation SG10201501357QA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP10002039A EP2363509A1 (en) 2010-02-28 2010-02-28 Synthesis of metal oxides by reactive cathodic arc evaporation
US32823810P 2010-04-27 2010-04-27

Publications (1)

Publication Number Publication Date
SG10201501357QA true SG10201501357QA (en) 2015-04-29

Family

ID=43066916

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201501357QA SG10201501357QA (en) 2010-02-28 2011-02-10 Synthesis of metal oxides by reactive cathodic arc evaporation
SG2012060950A SG183362A1 (en) 2010-02-28 2011-02-10 Synthesis of metal oxides by reactive cathodic arc evaporation

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG2012060950A SG183362A1 (en) 2010-02-28 2011-02-10 Synthesis of metal oxides by reactive cathodic arc evaporation

Country Status (10)

Country Link
US (1) US10711341B2 (en)
EP (2) EP2363509A1 (en)
JP (1) JP2013521406A (en)
KR (1) KR20120138755A (en)
CN (1) CN102782178B (en)
BR (1) BR112012021580A2 (en)
CA (1) CA2791197C (en)
MX (1) MX340906B (en)
SG (2) SG10201501357QA (en)
WO (1) WO2011103955A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8652589B2 (en) 2008-01-25 2014-02-18 Oerlikon Trading Ag, Truebbach Permeation barrier layer
DE102013006633A1 (en) * 2013-04-18 2014-10-23 Oerlikon Trading Ag, Trübbach Spark vaporization of metallic, intermetallic and ceramic target materials to produce Al-Cr-N coatings
EP2980267B1 (en) * 2014-07-28 2019-05-01 Oerlikon Surface Solutions AG, Trübbach Corundum-type fe-doped cathodic arc evaporated al-cr-o coatings
DE102016212874A1 (en) * 2016-07-14 2018-01-18 Oerlikon Surface Solutions Ag, Pfäffikon Protective coating for a thermally stressed structure
EP3682040B1 (en) * 2017-09-15 2024-06-05 Oerlikon Surface Solutions AG, Pfäffikon Al-cr-o-based coatings with higher thermal stability and producing method thereof
CN111534799B (en) * 2020-05-29 2021-11-12 四川大学 Oxidation-resistant and heat-insulating ceramic coating and preparation method thereof
CA3221962A1 (en) * 2021-07-13 2023-01-19 Oerlikon Surface Solutions Ag, Pfaffikon Overlay coating resistant to molten calcium-magnesium-alumino-silicate

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH688863A5 (en) * 1994-06-24 1998-04-30 Balzers Hochvakuum A method of coating at least a Werkstueckes and investment here for.
SE522736C2 (en) * 2001-02-16 2004-03-02 Sandvik Ab Aluminum-coated cutting tool and method for making the same
US6548192B2 (en) * 2001-04-05 2003-04-15 Vapor Technologies, Inc. Coated article having the appearance of stainless steel
JP4950499B2 (en) * 2006-02-03 2012-06-13 株式会社神戸製鋼所 Hard coating and method for forming the same
US7939181B2 (en) * 2006-10-11 2011-05-10 Oerlikon Trading Ag, Trubbach Layer system with at least one mixed crystal layer of a multi-oxide
US8652589B2 (en) * 2008-01-25 2014-02-18 Oerlikon Trading Ag, Truebbach Permeation barrier layer
EP2166128B1 (en) * 2008-09-19 2011-11-09 Oerlikon Trading AG, Trübbach Method for producing metal oxide coatings by means of spark nebulisation
JP5153439B2 (en) * 2008-04-25 2013-02-27 株式会社神戸製鋼所 Hard film, method for forming the same, and hard film coated member

Also Published As

Publication number Publication date
US10711341B2 (en) 2020-07-14
BR112012021580A2 (en) 2016-08-23
KR20120138755A (en) 2012-12-26
CA2791197A1 (en) 2011-09-01
WO2011103955A1 (en) 2011-09-01
SG183362A1 (en) 2012-09-27
JP2013521406A (en) 2013-06-10
EP2539477A1 (en) 2013-01-02
CN102782178B (en) 2016-08-03
MX2012009977A (en) 2013-01-25
US20130048490A1 (en) 2013-02-28
EP2363509A1 (en) 2011-09-07
CA2791197C (en) 2018-04-24
MX340906B (en) 2016-07-29
CN102782178A (en) 2012-11-14

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