MX2012009977A - Sintesis de oxidos de metal mediante evaporacion por arco catodico reactivo. - Google Patents

Sintesis de oxidos de metal mediante evaporacion por arco catodico reactivo.

Info

Publication number
MX2012009977A
MX2012009977A MX2012009977A MX2012009977A MX2012009977A MX 2012009977 A MX2012009977 A MX 2012009977A MX 2012009977 A MX2012009977 A MX 2012009977A MX 2012009977 A MX2012009977 A MX 2012009977A MX 2012009977 A MX2012009977 A MX 2012009977A
Authority
MX
Mexico
Prior art keywords
target surface
partial pressure
nucleation
arc evaporation
cathodic arc
Prior art date
Application number
MX2012009977A
Other languages
English (en)
Other versions
MX340906B (es
Inventor
Juergen Ramm
Benno Widrig
Original Assignee
Oerlikon Trading Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Trading Ag filed Critical Oerlikon Trading Ag
Publication of MX2012009977A publication Critical patent/MX2012009977A/es
Publication of MX340906B publication Critical patent/MX340906B/es

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Esta solicitud se refiere a la evaporación por arco catódico reactivo de los objetos compuestos de Al-Cr y a la nucleación y formación de fase de las capas sintetizadas de Al-Cr-O. La presión parcial de oxígeno y operación pulsada de la corriente de arco influye en la formación de fases de compuestos intermetálicos y de las soluciones sólidas en la superficie del objeto. La nucleación de los óxidos ternarios en el sitio del sustrato parece ser, a un cierto grado, controlable por los compuestos intermetálicos o soluciones sólidas formadas en la superficie del objeto. Un proceso de nucleación específico en el sitio del sustrato puede, por lo tanto, inducirse por la elección libre de la composición del objeto en combinación con la presión parcial del gas reactivo del oxígeno. También permite el control sobre el aumento del área del óxido en la superficie del objeto que ocurre ocasionalmente en la presión parcial más alta del oxígeno. Esto es apoyado por el análisis de la difracción de rayos-X de las capas así como de la superficie del objeto.
MX2012009977A 2010-02-28 2011-02-10 Sintesis de oxidos de metal mediante evaporacion por arco catodico reactivo. MX340906B (es)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP10002039A EP2363509A1 (en) 2010-02-28 2010-02-28 Synthesis of metal oxides by reactive cathodic arc evaporation
US32823810P 2010-04-27 2010-04-27
PCT/EP2011/000383 WO2011103955A1 (en) 2010-02-28 2011-02-10 Synthesis of metal oxides by reactive cathodic arc evaporation

Publications (2)

Publication Number Publication Date
MX2012009977A true MX2012009977A (es) 2013-01-25
MX340906B MX340906B (es) 2016-07-29

Family

ID=43066916

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2012009977A MX340906B (es) 2010-02-28 2011-02-10 Sintesis de oxidos de metal mediante evaporacion por arco catodico reactivo.

Country Status (10)

Country Link
US (1) US10711341B2 (es)
EP (2) EP2363509A1 (es)
JP (1) JP2013521406A (es)
KR (1) KR20120138755A (es)
CN (1) CN102782178B (es)
BR (1) BR112012021580A2 (es)
CA (1) CA2791197C (es)
MX (1) MX340906B (es)
SG (2) SG10201501357QA (es)
WO (1) WO2011103955A1 (es)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8652589B2 (en) 2008-01-25 2014-02-18 Oerlikon Trading Ag, Truebbach Permeation barrier layer
DE102013006633A1 (de) * 2013-04-18 2014-10-23 Oerlikon Trading Ag, Trübbach Funkenverdampfen von metallischen, intermetallischen und keramischen Targetmaterialien um Al-Cr-N Beschichtungen herzustellen
EP2980267B1 (en) * 2014-07-28 2019-05-01 Oerlikon Surface Solutions AG, Trübbach Corundum-type fe-doped cathodic arc evaporated al-cr-o coatings
DE102016212874A1 (de) * 2016-07-14 2018-01-18 Oerlikon Surface Solutions Ag, Pfäffikon Schutzbeschichtung für eine thermisch beanspruchte Struktur
EP3682040B1 (en) * 2017-09-15 2024-06-05 Oerlikon Surface Solutions AG, Pfäffikon Al-cr-o-based coatings with higher thermal stability and producing method thereof
CN111534799B (zh) * 2020-05-29 2021-11-12 四川大学 一种抗氧化和隔热的陶瓷涂层及其制备方法
CA3221962A1 (en) * 2021-07-13 2023-01-19 Oerlikon Surface Solutions Ag, Pfaffikon Overlay coating resistant to molten calcium-magnesium-alumino-silicate

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH688863A5 (de) * 1994-06-24 1998-04-30 Balzers Hochvakuum Verfahren zum Beschichten mindestens eines Werkstueckes und Anlage hierfuer.
SE522736C2 (sv) * 2001-02-16 2004-03-02 Sandvik Ab Aluminiumoxidbelagt skärverktyg och metod för att framställa detsamma
US6548192B2 (en) * 2001-04-05 2003-04-15 Vapor Technologies, Inc. Coated article having the appearance of stainless steel
JP4950499B2 (ja) * 2006-02-03 2012-06-13 株式会社神戸製鋼所 硬質皮膜およびその成膜方法
US7939181B2 (en) * 2006-10-11 2011-05-10 Oerlikon Trading Ag, Trubbach Layer system with at least one mixed crystal layer of a multi-oxide
US8652589B2 (en) * 2008-01-25 2014-02-18 Oerlikon Trading Ag, Truebbach Permeation barrier layer
EP2166128B1 (de) * 2008-09-19 2011-11-09 Oerlikon Trading AG, Trübbach Verfahren zum Herstellen von Metalloxidschichten durch Funkenverdampfung
JP5153439B2 (ja) * 2008-04-25 2013-02-27 株式会社神戸製鋼所 硬質皮膜およびその形成方法ならびに硬質皮膜被覆部材

Also Published As

Publication number Publication date
US10711341B2 (en) 2020-07-14
BR112012021580A2 (pt) 2016-08-23
SG10201501357QA (en) 2015-04-29
KR20120138755A (ko) 2012-12-26
CA2791197A1 (en) 2011-09-01
WO2011103955A1 (en) 2011-09-01
SG183362A1 (en) 2012-09-27
JP2013521406A (ja) 2013-06-10
EP2539477A1 (en) 2013-01-02
CN102782178B (zh) 2016-08-03
US20130048490A1 (en) 2013-02-28
EP2363509A1 (en) 2011-09-07
CA2791197C (en) 2018-04-24
MX340906B (es) 2016-07-29
CN102782178A (zh) 2012-11-14

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