BR0113560A - Método para depósito contìnuo de camadas metálicas por meio de plasma frio e dispositivo para depósito contìnuo de camadas metálicas por meio de plasma frio - Google Patents

Método para depósito contìnuo de camadas metálicas por meio de plasma frio e dispositivo para depósito contìnuo de camadas metálicas por meio de plasma frio

Info

Publication number
BR0113560A
BR0113560A BR0113560-0A BR0113560A BR0113560A BR 0113560 A BR0113560 A BR 0113560A BR 0113560 A BR0113560 A BR 0113560A BR 0113560 A BR0113560 A BR 0113560A
Authority
BR
Brazil
Prior art keywords
cold plasma
metal
chamber
metal layers
substrate
Prior art date
Application number
BR0113560-0A
Other languages
English (en)
Inventor
Pierre Vanden Brande
Alain Weymeersch
Original Assignee
Cold Plasma Applic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=8171943&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=BR0113560(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Cold Plasma Applic filed Critical Cold Plasma Applic
Publication of BR0113560A publication Critical patent/BR0113560A/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3432—Target-material dispenser
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H01J37/3408—Planar magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass Fibres Or Filaments (AREA)

Abstract

"MéTODO PARA DEPóSITO CONTìNUO DE CAMADAS METáLICAS POR MEIO DE PLASMA FRIO E DISPOSITIVO PARA DEPóSITO CONTìNUO DE CAMADAS METáLICAS POR MEIO DE PLASMA FRIO". Sendo que a presente invenção refere-se a um método e um dispositivo para depositar uma camada de metal em um substrato (1) que consiste de uma deposição com plasma frio dentro de uma câmara de confinamento aquecido (7) de modo a evitar a formação de um depósito de metal em sua superfície, dita câmara (7) possuindo um orifício de entrada (21) e um orifício de saída (22) através do qual o substrato a ser revestido entra e deixa dita câmara, uma fonte de vapor formando um eletrodo, sendo provida em dita câmara permitindo a formação de plasma (6) na mesma, um contra-eletrodo sendo formado pelo substrato (1) ou por um elemento eletricamente condutor separado. A invenção é caracterizada pelo fato de que consiste na introdução de metal, com o qual é formada uma camada de metal no substrato (1), em estado derretido em um tanque de retenção (8) comunicando-se com a câmara de confinamento (7) e mantendo o metal derretido em dito tanque (8) a um nível substancialmente constante enquanto a camada de metal está sendo formada.
BR0113560-0A 2000-08-23 2001-08-23 Método para depósito contìnuo de camadas metálicas por meio de plasma frio e dispositivo para depósito contìnuo de camadas metálicas por meio de plasma frio BR0113560A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP00202942A EP1182272A1 (fr) 2000-08-23 2000-08-23 Procédé et dispositif permettant le dépôt de couches métalliques en continu par plasma froid
PCT/BE2001/000142 WO2002016664A1 (fr) 2000-08-23 2001-08-23 Procede et dispositif permettant le depot de couches metalliques en continu par plasma froid

Publications (1)

Publication Number Publication Date
BR0113560A true BR0113560A (pt) 2003-07-08

Family

ID=8171943

Family Applications (1)

Application Number Title Priority Date Filing Date
BR0113560-0A BR0113560A (pt) 2000-08-23 2001-08-23 Método para depósito contìnuo de camadas metálicas por meio de plasma frio e dispositivo para depósito contìnuo de camadas metálicas por meio de plasma frio

Country Status (8)

Country Link
US (1) US7156960B2 (pt)
EP (2) EP1182272A1 (pt)
JP (1) JP2004507617A (pt)
AU (1) AU2001283725A1 (pt)
BR (1) BR0113560A (pt)
CA (1) CA2420243A1 (pt)
WO (1) WO2002016664A1 (pt)
ZA (1) ZA200301531B (pt)

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Also Published As

Publication number Publication date
US7156960B2 (en) 2007-01-02
EP1182272A1 (fr) 2002-02-27
EP1313889A1 (fr) 2003-05-28
WO2002016664A1 (fr) 2002-02-28
CA2420243A1 (fr) 2002-02-28
JP2004507617A (ja) 2004-03-11
US20040026234A1 (en) 2004-02-12
ZA200301531B (en) 2004-02-25
AU2001283725A1 (en) 2002-03-04

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