ZA200301531B - Method and device for continuous cold plasma deposition of metal coatings. - Google Patents
Method and device for continuous cold plasma deposition of metal coatings. Download PDFInfo
- Publication number
- ZA200301531B ZA200301531B ZA200301531A ZA200301531A ZA200301531B ZA 200301531 B ZA200301531 B ZA 200301531B ZA 200301531 A ZA200301531 A ZA 200301531A ZA 200301531 A ZA200301531 A ZA 200301531A ZA 200301531 B ZA200301531 B ZA 200301531B
- Authority
- ZA
- South Africa
- Prior art keywords
- metal
- holding tank
- enclosure
- liquid metal
- substrate
- Prior art date
Links
- 229910052751 metal Inorganic materials 0.000 title claims description 135
- 239000002184 metal Substances 0.000 title claims description 135
- 238000000576 coating method Methods 0.000 title claims description 47
- 238000000034 method Methods 0.000 title claims description 39
- 230000005495 cold plasma Effects 0.000 title claims description 15
- 230000008021 deposition Effects 0.000 title description 48
- 229910001338 liquidmetal Inorganic materials 0.000 claims description 110
- 239000000758 substrate Substances 0.000 claims description 100
- 238000000151 deposition Methods 0.000 claims description 52
- 239000011248 coating agent Substances 0.000 claims description 43
- 238000007667 floating Methods 0.000 claims description 17
- 230000001105 regulatory effect Effects 0.000 claims description 17
- 230000006698 induction Effects 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 14
- 230000000694 effects Effects 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 12
- 238000005303 weighing Methods 0.000 claims description 9
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 239000011701 zinc Substances 0.000 description 32
- 229910052725 zinc Inorganic materials 0.000 description 27
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 26
- 239000007789 gas Substances 0.000 description 20
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 14
- 229910000831 Steel Inorganic materials 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 238000007789 sealing Methods 0.000 description 9
- 239000010959 steel Substances 0.000 description 9
- 229910052786 argon Inorganic materials 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- 239000000835 fiber Substances 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000007935 neutral effect Effects 0.000 description 6
- 239000013307 optical fiber Substances 0.000 description 6
- 229910001220 stainless steel Inorganic materials 0.000 description 6
- 239000010935 stainless steel Substances 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 239000004411 aluminium Substances 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000011109 contamination Methods 0.000 description 5
- 239000011135 tin Substances 0.000 description 5
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000010292 electrical insulation Methods 0.000 description 3
- 238000005265 energy consumption Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 241000894007 species Species 0.000 description 3
- 229910052718 tin Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 241000196324 Embryophyta Species 0.000 description 2
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000005246 galvanizing Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000010298 pulverizing process Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 241001239362 Periandra coccinea Species 0.000 description 1
- 229910052774 Proactinium Inorganic materials 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000003042 antagnostic effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 150000003751 zinc Chemical class 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3432—Target-material dispenser
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
- H01J37/3408—Planar magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Surface Treatment Of Glass Fibres Or Filaments (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP00202942A EP1182272A1 (fr) | 2000-08-23 | 2000-08-23 | Procédé et dispositif permettant le dépôt de couches métalliques en continu par plasma froid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ZA200301531B true ZA200301531B (en) | 2004-02-25 |
Family
ID=8171943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ZA200301531A ZA200301531B (en) | 2000-08-23 | 2003-02-25 | Method and device for continuous cold plasma deposition of metal coatings. |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7156960B2 (pt) |
| EP (2) | EP1182272A1 (pt) |
| JP (1) | JP2004507617A (pt) |
| AU (1) | AU2001283725A1 (pt) |
| BR (1) | BR0113560A (pt) |
| CA (1) | CA2420243A1 (pt) |
| WO (1) | WO2002016664A1 (pt) |
| ZA (1) | ZA200301531B (pt) |
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| JP4359131B2 (ja) * | 2003-12-08 | 2009-11-04 | 株式会社日立ハイテクノロジーズ | 液体金属イオン銃、及びイオンビーム装置 |
| BRPI0418685B1 (pt) * | 2004-03-31 | 2014-04-08 | Pirelli | Processo para produzir um fio de metal |
| US20050229856A1 (en) * | 2004-04-20 | 2005-10-20 | Malik Roger J | Means and method for a liquid metal evaporation source with integral level sensor and external reservoir |
| WO2008040329A1 (de) * | 2006-09-29 | 2008-04-10 | Von Ardenne Anlagentechnik Gmbh | Vakuumbeschichtungsverfahren und anordnung zur durchführung des verfahrens |
| US8951632B2 (en) * | 2007-01-03 | 2015-02-10 | Applied Nanostructured Solutions, Llc | CNT-infused carbon fiber materials and process therefor |
| US8951631B2 (en) * | 2007-01-03 | 2015-02-10 | Applied Nanostructured Solutions, Llc | CNT-infused metal fiber materials and process therefor |
| US20100279569A1 (en) * | 2007-01-03 | 2010-11-04 | Lockheed Martin Corporation | Cnt-infused glass fiber materials and process therefor |
| US8158217B2 (en) * | 2007-01-03 | 2012-04-17 | Applied Nanostructured Solutions, Llc | CNT-infused fiber and method therefor |
| US20120189846A1 (en) * | 2007-01-03 | 2012-07-26 | Lockheed Martin Corporation | Cnt-infused ceramic fiber materials and process therefor |
| US9005755B2 (en) | 2007-01-03 | 2015-04-14 | Applied Nanostructured Solutions, Llc | CNS-infused carbon nanomaterials and process therefor |
| EP1972699A1 (fr) * | 2007-03-20 | 2008-09-24 | ArcelorMittal France | Procede de revetement d'un substrat et installation de depot sous vide d'alliage metallique |
| US10039927B2 (en) | 2007-04-23 | 2018-08-07 | Plasmology4, Inc. | Cold plasma treatment devices and associated methods |
| US20090081441A1 (en) * | 2007-09-20 | 2009-03-26 | Lockheed Martin Corporation | Fiber Tow Comprising Carbon-Nanotube-Infused Fibers |
| US20090081383A1 (en) * | 2007-09-20 | 2009-03-26 | Lockheed Martin Corporation | Carbon Nanotube Infused Composites via Plasma Processing |
| EP2048261A1 (fr) * | 2007-10-12 | 2009-04-15 | ArcelorMittal France | Générateur de vapeur industriel pour le dépôt d'un revêtement d'alliage sur une bande métallique |
| BE1017852A3 (fr) * | 2007-11-19 | 2009-09-01 | Ind Plasma Services & Technologies Ipst Gmbh | Procede et installation de galvanisation par evaporation plasma. |
| US8323408B2 (en) * | 2007-12-10 | 2012-12-04 | Solopower, Inc. | Methods and apparatus to provide group VIA materials to reactors for group IBIIIAVIA film formation |
| JP5740552B2 (ja) * | 2007-12-21 | 2015-06-24 | アドヴァンスト ガルヴァニゼイション アーゲー | 真空蒸発法における蒸気流を制御するための方法及び装置 |
| BE1017912A3 (fr) * | 2007-12-21 | 2009-11-03 | Ind Plasma Services & Technolo | Procede et dispositifs de controle d'un flux de vapeur en evaporation sous vide. |
| CN102264942B (zh) * | 2008-12-26 | 2014-03-19 | 佳能安内华股份有限公司 | 成膜装置和使用该成膜装置的基板的制造方法 |
| BRPI1007300A2 (pt) * | 2009-02-17 | 2019-09-24 | Applied Nanostructured Sols | compósitos compreendendo nanotubos de carbono sobre fibra |
| BRPI1008131A2 (pt) * | 2009-02-27 | 2016-03-08 | Applied Nanostructured Sols | "crescimento de nanotubo de carbono de baixa temperatura usando método de preaquecimento de gás". |
| US20100224129A1 (en) * | 2009-03-03 | 2010-09-09 | Lockheed Martin Corporation | System and method for surface treatment and barrier coating of fibers for in situ cnt growth |
| CN102388172B (zh) * | 2009-04-10 | 2015-02-11 | 应用纳米结构方案公司 | 使用立式加热炉将碳纳米管并入纤维的方法和设备 |
| US20100272891A1 (en) * | 2009-04-10 | 2010-10-28 | Lockheed Martin Corporation | Apparatus and method for the production of carbon nanotubes on a continuously moving substrate |
| DK2417286T3 (en) * | 2009-04-10 | 2015-08-17 | Applied Nanostructured Solutions Inc | Device and method for producing carbon nanotubes on a substrate that moves continuously |
| US20100260998A1 (en) * | 2009-04-10 | 2010-10-14 | Lockheed Martin Corporation | Fiber sizing comprising nanoparticles |
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| WO2010124260A1 (en) * | 2009-04-24 | 2010-10-28 | Lockheed Martin Corporation | Cnt-infused emi shielding composite and coating |
| KR101696207B1 (ko) * | 2009-04-27 | 2017-01-13 | 어플라이드 나노스트럭처드 솔루션스, 엘엘씨. | 복합 구조물 제빙을 위한 ｃｎｔ계 저항 가열 |
| BRPI1014624A2 (pt) * | 2009-04-30 | 2016-04-05 | Applied Nanostructured Sols | método e sistema para catálise bem próxima para síntese de nanotubos de carbono |
| CN102470546B (zh) * | 2009-08-03 | 2014-08-13 | 应用纳米结构方案公司 | 纳米颗粒在复合材料纤维中的结合 |
| WO2011054008A2 (en) * | 2009-11-02 | 2011-05-05 | Applied Nanostructured Solutions, Llc | Cnt-infused aramid fiber materials and process therefor |
| JP5643835B2 (ja) * | 2009-11-23 | 2014-12-17 | アプライド ナノストラクチャード ソリューションズ リミテッド ライアビリティー カンパニーＡｐｐｌｉｅｄ Ｎａｎｏｓｔｒｕｃｔｕｒｅｄｓｏｌｕｔｉｏｎｓ， Ｌｌｃ | Ｃｎｔを適合された海ベース複合材料構造体 |
| BR112012010907A2 (pt) * | 2009-11-23 | 2019-09-24 | Applied Nanostructured Sols | "materiais compósitos de cerâmica contendo materiais de fibra infundidos em nanotubo de carbono e métodos para a produção dos mesmos" |
| US20110123735A1 (en) * | 2009-11-23 | 2011-05-26 | Applied Nanostructured Solutions, Llc | Cnt-infused fibers in thermoset matrices |
| CA2780354A1 (en) * | 2009-12-14 | 2011-11-17 | Applied Nanostructured Solutions, Llc | Flame-resistant composite materials and articles containing carbon nanotube-infused fiber materials |
| US9167736B2 (en) * | 2010-01-15 | 2015-10-20 | Applied Nanostructured Solutions, Llc | CNT-infused fiber as a self shielding wire for enhanced power transmission line |
| EP2531558B1 (en) * | 2010-02-02 | 2018-08-22 | Applied NanoStructured Solutions, LLC | Carbon nanotube-infused fiber materials containing parallel-aligned carbon nanotubes, methods for production thereof, and composite materials derived therefrom |
| WO2011109485A1 (en) * | 2010-03-02 | 2011-09-09 | Applied Nanostructured Solutions,Llc | Electrical devices containing carbon nanotube-infused fibers and methods for production thereof |
| US8665581B2 (en) | 2010-03-02 | 2014-03-04 | Applied Nanostructured Solutions, Llc | Spiral wound electrical devices containing carbon nanotube-infused electrode materials and methods and apparatuses for production thereof |
| US8361229B2 (en) * | 2010-04-22 | 2013-01-29 | Primestar Solar, Inc. | Seal configuration for a system for continuous deposition of a thin film layer on a substrate |
| US8780526B2 (en) | 2010-06-15 | 2014-07-15 | Applied Nanostructured Solutions, Llc | Electrical devices containing carbon nanotube-infused fibers and methods for production thereof |
| US9017854B2 (en) | 2010-08-30 | 2015-04-28 | Applied Nanostructured Solutions, Llc | Structural energy storage assemblies and methods for production thereof |
| WO2012037042A1 (en) | 2010-09-14 | 2012-03-22 | Applied Nanostructured Solutions, Llc | Glass substrates having carbon nanotubes grown thereon and methods for production thereof |
| AU2011305809A1 (en) | 2010-09-22 | 2013-02-28 | Applied Nanostructured Solutions, Llc | Carbon fiber substrates having carbon nanotubes grown thereon and processes for production thereof |
| AU2011305751A1 (en) | 2010-09-23 | 2012-06-21 | Applied Nanostructured Solutions, Llc | CNT-infused fiber as a self shielding wire for enhanced power transmission line |
| JP5797275B2 (ja) * | 2010-12-13 | 2015-10-21 | ポスコ | 連続コーティング装置 |
| US9027609B2 (en) | 2011-05-03 | 2015-05-12 | United Technologies Corporation | Argon gas level controller |
| EP2756740B1 (en) * | 2011-09-15 | 2018-04-11 | Cold Plasma Medical Technologies, Inc. | Cold plasma treatment devices and associated methods |
| US9085464B2 (en) | 2012-03-07 | 2015-07-21 | Applied Nanostructured Solutions, Llc | Resistance measurement system and method of using the same |
| KR20130119107A (ko) * | 2012-04-23 | 2013-10-31 | 삼성에스디아이 주식회사 | 증착장치 |
| DE102013109663A1 (de) * | 2013-09-04 | 2015-03-05 | Fhr Anlagenbau Gmbh | Bedampfungseinrichtung zum Beschichten flächenförmiger Substrate |
| US10654953B2 (en) | 2016-12-29 | 2020-05-19 | Chevron Phillips Chemical Company Lp | Methods of preparing a catalyst |
| US11267914B2 (en) | 2016-12-29 | 2022-03-08 | Chevron Phillips Chemical Company Lp | Methods of preparing a catalyst |
| US20200369803A1 (en) | 2016-12-29 | 2020-11-26 | Chevron Phillips Chemical Company Lp | Methods of Preparing a Catalyst |
| WO2018217914A1 (en) * | 2017-05-23 | 2018-11-29 | Starfire Industries, Llc | Atmospheric cold plasma jet coating and surface treatment |
| CN107938369B (zh) * | 2017-11-06 | 2019-01-01 | 北京梦之墨科技有限公司 | 一种导电织物及其制备方法 |
| DE102018215102A1 (de) * | 2018-05-28 | 2019-11-28 | Sms Group Gmbh | Vakuumbeschichtungsanlage, und Verfahren zum Beschichten eines bandförmigen Materials |
| DE102021109537A1 (de) | 2021-04-15 | 2022-10-20 | Leibniz-Institut für Oberflächenmodifizierung e.V. | Lichtbogenplasmaquelle mit flüssiger Kathode |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3799862A (en) * | 1971-11-19 | 1974-03-26 | United Aircraft Corp | Apparatus for sputtering |
| US4188467A (en) * | 1975-10-31 | 1980-02-12 | A. H. Robins Company, Incorporated | Process for tempering tissue for heparin production |
| US4480585A (en) * | 1983-06-23 | 1984-11-06 | Energy Conversion Devices, Inc. | External isolation module |
| JPS63199868A (ja) * | 1987-02-13 | 1988-08-18 | Mitsubishi Heavy Ind Ltd | 真空蒸発装置内の溶融金属レベル制御装置 |
| US5178743A (en) * | 1989-06-15 | 1993-01-12 | Microelectronics And Computer Technology Corporation | Cylindrical magnetron sputtering system |
| JPH03274264A (ja) * | 1990-03-22 | 1991-12-05 | Matsushita Electric Ind Co Ltd | 溶融材料あるいは昇華性材料の重量監視装置及びその重量制御装置 |
| US5415757A (en) * | 1991-11-26 | 1995-05-16 | Leybold Aktiengesellschaft | Apparatus for coating a substrate with electrically nonconductive coatings |
| BE1008303A3 (fr) * | 1994-06-02 | 1996-04-02 | Cockerill Rech & Dev | Procede et dispositif pour la formation d'un revetement sur un substrat par pulverisation cathodique. |
| US6432281B2 (en) * | 1995-12-20 | 2002-08-13 | Recherche Et Developpement Due Groupe Cockerill Sambre | Process for formation of a coating on a substrate |
| BE1009838A3 (fr) * | 1995-12-20 | 1997-10-07 | Cockerill Rech & Dev | Procede et dispositif pour la formation d'un revetement sur un substrat. |
| PT908924E (pt) * | 1997-10-08 | 2003-09-30 | Cockerill Rech & Dev | Dispositivo para a formacao de um revestimento sobre um substrato por condensacao |
-
2000
- 2000-08-23 EP EP00202942A patent/EP1182272A1/fr not_active Withdrawn
-
2001
- 2001-08-23 CA CA002420243A patent/CA2420243A1/fr not_active Abandoned
- 2001-08-23 EP EP01962497A patent/EP1313889A1/fr not_active Withdrawn
- 2001-08-23 AU AU2001283725A patent/AU2001283725A1/en not_active Abandoned
- 2001-08-23 WO PCT/BE2001/000142 patent/WO2002016664A1/fr active Application Filing
- 2001-08-23 BR BR0113560-0A patent/BR0113560A/pt not_active Application Discontinuation
- 2001-08-23 US US10/362,585 patent/US7156960B2/en not_active Expired - Lifetime
- 2001-08-23 JP JP2002522334A patent/JP2004507617A/ja active Pending
-
2003
- 2003-02-25 ZA ZA200301531A patent/ZA200301531B/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| US7156960B2 (en) | 2007-01-02 |
| EP1182272A1 (fr) | 2002-02-27 |
| EP1313889A1 (fr) | 2003-05-28 |
| WO2002016664A1 (fr) | 2002-02-28 |
| CA2420243A1 (fr) | 2002-02-28 |
| JP2004507617A (ja) | 2004-03-11 |
| US20040026234A1 (en) | 2004-02-12 |
| BR0113560A (pt) | 2003-07-08 |
| AU2001283725A1 (en) | 2002-03-04 |
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