BE806230A - Procede de traitement de films minces par attaque electrochimique - Google Patents

Procede de traitement de films minces par attaque electrochimique

Info

Publication number
BE806230A
BE806230A BE136820A BE136820A BE806230A BE 806230 A BE806230 A BE 806230A BE 136820 A BE136820 A BE 136820A BE 136820 A BE136820 A BE 136820A BE 806230 A BE806230 A BE 806230A
Authority
BE
Belgium
Prior art keywords
thin films
treating thin
electrochemical attack
electrochemical
attack
Prior art date
Application number
BE136820A
Other languages
English (en)
French (fr)
Inventor
J Yahalom
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Publication of BE806230A publication Critical patent/BE806230A/xx

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/07—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process being removed electrolytically
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
BE136820A 1972-10-19 1973-10-18 Procede de traitement de films minces par attaque electrochimique BE806230A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29885672A 1972-10-19 1972-10-19

Publications (1)

Publication Number Publication Date
BE806230A true BE806230A (fr) 1974-02-15

Family

ID=23152265

Family Applications (1)

Application Number Title Priority Date Filing Date
BE136820A BE806230A (fr) 1972-10-19 1973-10-18 Procede de traitement de films minces par attaque electrochimique

Country Status (9)

Country Link
US (1) US3798141A (sv)
JP (1) JPS4974140A (sv)
BE (1) BE806230A (sv)
CA (1) CA1026704A (sv)
DE (1) DE2351664B2 (sv)
FR (1) FR2203890B1 (sv)
GB (1) GB1408352A (sv)
IT (1) IT999661B (sv)
NL (1) NL157062B (sv)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3898141A (en) * 1974-02-08 1975-08-05 Bell Telephone Labor Inc Electrolytic oxidation and etching of III-V compound semiconductors
NL7609816A (nl) * 1976-09-03 1978-03-07 Philips Nv Werkwijze voor het vervaardigen van een lichaam voorzien met een goudpatroon en lichaam ver- vaardigd volgens de werkwijze.
US4206028A (en) * 1976-12-14 1980-06-03 Inoue-Japax Research Incorporated Electrochemical polishing system
GB1539309A (en) * 1976-12-14 1979-01-31 Inoue Japax Res Electrochemical polishing
DE3029277C2 (de) * 1980-08-01 1983-10-20 Siemens AG, 1000 Berlin und 8000 München Aufbau von Metallschichten
WO2002030401A2 (en) 2000-10-11 2002-04-18 Microchips, Inc. Microchip reservoir devices and facilitated corrosion of electrodes
AU2002326304A1 (en) 2001-05-31 2002-12-16 Massachusetts Institute Of Technology Microchip devices with improved reservoir opening
US7175752B2 (en) * 2002-05-24 2007-02-13 Federal-Mogul Worldwide, Inc. Method and apparatus for electrochemical machining

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3566358A (en) * 1968-03-19 1971-02-23 Bevier Hasbrouck Integrated multi-computer system

Also Published As

Publication number Publication date
NL157062B (nl) 1978-06-15
NL7314162A (sv) 1974-04-23
CA1026704A (en) 1978-02-21
IT999661B (it) 1976-03-10
FR2203890A1 (sv) 1974-05-17
JPS4974140A (sv) 1974-07-17
FR2203890B1 (sv) 1976-07-23
US3798141A (en) 1974-03-19
GB1408352A (en) 1975-10-01
DE2351664A1 (de) 1974-05-02
DE2351664B2 (de) 1975-09-18

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