CA1026704A - Electroetching thin noble metal film - Google Patents
Electroetching thin noble metal filmInfo
- Publication number
- CA1026704A CA1026704A CA170,822A CA170822A CA1026704A CA 1026704 A CA1026704 A CA 1026704A CA 170822 A CA170822 A CA 170822A CA 1026704 A CA1026704 A CA 1026704A
- Authority
- CA
- Canada
- Prior art keywords
- electroetching
- metal film
- noble metal
- thin noble
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/07—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process being removed electrolytically
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/02—Etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- ing And Chemical Polishing (AREA)
- Weting (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29885672A | 1972-10-19 | 1972-10-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1026704A true CA1026704A (en) | 1978-02-21 |
Family
ID=23152265
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA170,822A Expired CA1026704A (en) | 1972-10-19 | 1973-05-09 | Electroetching thin noble metal film |
Country Status (9)
Country | Link |
---|---|
US (1) | US3798141A (en) |
JP (1) | JPS4974140A (en) |
BE (1) | BE806230A (en) |
CA (1) | CA1026704A (en) |
DE (1) | DE2351664B2 (en) |
FR (1) | FR2203890B1 (en) |
GB (1) | GB1408352A (en) |
IT (1) | IT999661B (en) |
NL (1) | NL157062B (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3898141A (en) * | 1974-02-08 | 1975-08-05 | Bell Telephone Labor Inc | Electrolytic oxidation and etching of III-V compound semiconductors |
NL7609816A (en) * | 1976-09-03 | 1978-03-07 | Philips Nv | PROCESS OF MANUFACTURING A BODY PROVIDED WITH A GOLD PATTERN AND BODY MANUFACTURED BY THE PROCESS. |
US4206028A (en) * | 1976-12-14 | 1980-06-03 | Inoue-Japax Research Incorporated | Electrochemical polishing system |
GB1539309A (en) * | 1976-12-14 | 1979-01-31 | Inoue Japax Res | Electrochemical polishing |
DE3029277C2 (en) * | 1980-08-01 | 1983-10-20 | Siemens AG, 1000 Berlin und 8000 München | Build-up of metal layers |
WO2002030401A2 (en) | 2000-10-11 | 2002-04-18 | Microchips, Inc. | Microchip reservoir devices and facilitated corrosion of electrodes |
WO2002099457A1 (en) | 2001-05-31 | 2002-12-12 | Massachusetts Inst Technology | Microchip devices with improved reservoir opening |
US7175752B2 (en) * | 2002-05-24 | 2007-02-13 | Federal-Mogul Worldwide, Inc. | Method and apparatus for electrochemical machining |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3566358A (en) * | 1968-03-19 | 1971-02-23 | Bevier Hasbrouck | Integrated multi-computer system |
-
1972
- 1972-10-19 US US00298856A patent/US3798141A/en not_active Expired - Lifetime
-
1973
- 1973-05-09 CA CA170,822A patent/CA1026704A/en not_active Expired
- 1973-10-15 NL NL7314162.A patent/NL157062B/en unknown
- 1973-10-15 DE DE2351664A patent/DE2351664B2/en not_active Withdrawn
- 1973-10-18 FR FR7337216A patent/FR2203890B1/fr not_active Expired
- 1973-10-18 IT IT70089/73A patent/IT999661B/en active
- 1973-10-18 BE BE136820A patent/BE806230A/en unknown
- 1973-10-19 GB GB4878373A patent/GB1408352A/en not_active Expired
- 1973-10-19 JP JP48116978A patent/JPS4974140A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JPS4974140A (en) | 1974-07-17 |
DE2351664A1 (en) | 1974-05-02 |
FR2203890B1 (en) | 1976-07-23 |
FR2203890A1 (en) | 1974-05-17 |
BE806230A (en) | 1974-02-15 |
NL157062B (en) | 1978-06-15 |
GB1408352A (en) | 1975-10-01 |
US3798141A (en) | 1974-03-19 |
DE2351664B2 (en) | 1975-09-18 |
NL7314162A (en) | 1974-04-23 |
IT999661B (en) | 1976-03-10 |
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