AU679237B2 - Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure - Google Patents

Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure Download PDF

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Publication number
AU679237B2
AU679237B2 AU69623/94A AU6962394A AU679237B2 AU 679237 B2 AU679237 B2 AU 679237B2 AU 69623/94 A AU69623/94 A AU 69623/94A AU 6962394 A AU6962394 A AU 6962394A AU 679237 B2 AU679237 B2 AU 679237B2
Authority
AU
Australia
Prior art keywords
electrodes
plasma
glow discharge
gas
discharge plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU69623/94A
Other languages
English (en)
Other versions
AU6962394A (en
Inventor
Mounir Laroussi
Chaoyu Liu
John Reece Roth
Paul D Spence
Peter Ping-Yi Tsai
Larry C Wadsworth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Tennessee Research Foundation
Original Assignee
University of Tennessee Research Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/068,508 external-priority patent/US5387842A/en
Priority claimed from US08/068,739 external-priority patent/US5456972A/en
Priority claimed from US08/145,349 external-priority patent/US5403453A/en
Priority claimed from US08/145,786 external-priority patent/US5414324A/en
Application filed by University of Tennessee Research Foundation filed Critical University of Tennessee Research Foundation
Publication of AU6962394A publication Critical patent/AU6962394A/en
Application granted granted Critical
Publication of AU679237B2 publication Critical patent/AU679237B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/24—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64C—AEROPLANES; HELICOPTERS
    • B64C23/00—Influencing air flow over aircraft surfaces, not otherwise provided for
    • B64C23/005—Influencing air flow over aircraft surfaces, not otherwise provided for by other means not covered by groups B64C23/02 - B64C23/08, e.g. by electric charges, magnetic panels, piezoelectric elements, static charges or ultrasounds
    • D—TEXTILES; PAPER
    • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
    • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
    • D04H1/00—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres
    • D04H1/40—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties
    • D04H1/54—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties by welding together the fibres, e.g. by partially melting or dissolving
    • D04H1/56—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties by welding together the fibres, e.g. by partially melting or dissolving in association with fibre formation, e.g. immediately following extrusion of staple fibres
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
    • H01J37/32761—Continuous moving
    • H01J37/3277—Continuous moving of continuous material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/16—Heating by glow discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • B29C2059/145—Atmospheric plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2023/00—Use of polyalkenes or derivatives thereof as moulding material
    • B29K2023/10—Polymers of propylene
    • B29K2023/12—PP, i.e. polypropylene
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/336—Changing physical properties of treated surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Textile Engineering (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
AU69623/94A 1993-05-28 1994-05-26 Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure Ceased AU679237B2 (en)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
US08/068,508 US5387842A (en) 1993-05-28 1993-05-28 Steady-state, glow discharge plasma
US068508 1993-05-28
US068739 1993-05-28
US08/068,739 US5456972A (en) 1993-05-28 1993-05-28 Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure
US08/145,349 US5403453A (en) 1993-05-28 1993-10-29 Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure
US145349 1993-10-29
US08/145,786 US5414324A (en) 1993-05-28 1993-10-29 One atmosphere, uniform glow discharge plasma
US145786 1993-10-29
PCT/US1994/006151 WO1994028568A1 (en) 1993-05-28 1994-05-26 Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure

Publications (2)

Publication Number Publication Date
AU6962394A AU6962394A (en) 1994-12-20
AU679237B2 true AU679237B2 (en) 1997-06-26

Family

ID=27490710

Family Applications (1)

Application Number Title Priority Date Filing Date
AU69623/94A Ceased AU679237B2 (en) 1993-05-28 1994-05-26 Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure

Country Status (6)

Country Link
EP (1) EP0700577A4 (de)
JP (1) JPH08511898A (de)
KR (1) KR960702844A (de)
AU (1) AU679237B2 (de)
CA (1) CA2163967C (de)
WO (1) WO1994028568A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5714308A (en) 1996-02-13 1998-02-03 Eastman Kodak Company Atmospheric pressure glow discharge treatment of polymeric supports to promote adhesion for photographic applications
US5789145A (en) * 1996-07-23 1998-08-04 Eastman Kodak Company Atmospheric pressure glow discharge treatment of base material for photographic applications
US5872426A (en) * 1997-03-18 1999-02-16 Stevens Institute Of Technology Glow plasma discharge device having electrode covered with perforated dielectric
US6900592B2 (en) 1997-03-18 2005-05-31 The Trustees Of The Stevens Institute Of Technology Method and apparatus for stabilizing of the glow plasma discharges
US6879103B1 (en) 1997-03-18 2005-04-12 The Trustees Of The Stevens Institute Of Technology Glow plasma discharge device
DE19713127C1 (de) * 1997-03-27 1998-11-12 Brueckner Maschbau Coronaelektroden-Anordnung
US5888713A (en) * 1997-05-19 1999-03-30 Eastman Kodak Company Atmospheric pressure glow discharge treatment of paper base material for imaging applications
FR2782837B1 (fr) * 1998-08-28 2000-09-29 Air Liquide Procede et dispositif de traitement de surface par plasma a pression atmospherique
DE69929271T2 (de) * 1998-10-26 2006-09-21 Matsushita Electric Works, Ltd., Kadoma Apparat und Verfahren zur Plasmabehandlung
US6149985A (en) 1999-07-07 2000-11-21 Eastman Kodak Company High-efficiency plasma treatment of imaging supports
EP1067432A1 (de) * 1999-07-07 2001-01-10 Eastman Kodak Company Hocheffiziente Plasmabehandlung von Polyolefinen
DE10011274A1 (de) * 2000-03-08 2001-09-13 Wolff Walsrode Ag Plasmabehandelte bahnförmige Werkstoffe
JP4930913B2 (ja) * 2005-09-12 2012-05-16 東レバッテリーセパレータフィルム合同会社 多孔性素材のプラズマ処理方法及び処理装置
CN101277726B (zh) 2005-10-05 2012-05-30 Sca卫生用品公司 含亲水区和疏水区的吸收性制品
AU2005337071B2 (en) 2005-10-05 2011-11-24 Sca Hygiene Products Ab Absorbent article comprising a thin film including an active agent
GB0615644D0 (en) 2006-08-07 2006-09-13 Airbus Uk Ltd Method of manufacturing composite material
FR3013625B1 (fr) 2013-11-28 2016-06-24 Michelin & Cie Element de renfort a section aplatie
FR3013622B1 (fr) 2013-11-28 2016-06-24 Michelin & Cie Procede de traitement d'un element de renfort a section aplatie
EP3089721A1 (de) * 2013-12-31 2016-11-09 Dow Global Technologies LLC Verfahren zur herstellung einer hydrophilen vliesstruktur, dadurch hergestellte vliesstruktur und artikel mit der vliesstruktur

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58200529A (ja) * 1982-05-19 1983-11-22 Hitachi Ltd プラズマ処理装置
JPS61177374A (ja) * 1985-01-30 1986-08-09 Shimadzu Corp プラズマｃｖｄ装置及びプラズマｃｖｄによる成膜方法
JPH02312223A (ja) * 1989-05-26 1990-12-27 Mitsubishi Electric Corp プラズマ処理方法およびプラズマ処理装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB891469A (en) * 1957-05-27 1962-03-14 Minnesota Mining & Mfg Improvements in polymers
FR2463975A1 (fr) * 1979-08-22 1981-02-27 Onera (Off Nat Aerospatiale) Procede et appareil pour la gravure chimique par voie seche des circuits integres
JPS5747873A (en) * 1980-09-03 1982-03-18 Toshiba Corp Plasma etching method
JPS6344965A (ja) * 1986-04-22 1988-02-25 Nippon Paint Co Ltd 多層塗膜の形成法
JP3016821B2 (ja) * 1990-06-15 2000-03-06 東京エレクトロン株式会社 プラズマ処理方法
JPH0582114A (ja) * 1991-09-18 1993-04-02 Fuji Photo Film Co Ltd 二次電池

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58200529A (ja) * 1982-05-19 1983-11-22 Hitachi Ltd プラズマ処理装置
JPS61177374A (ja) * 1985-01-30 1986-08-09 Shimadzu Corp プラズマｃｖｄ装置及びプラズマｃｖｄによる成膜方法
JPH02312223A (ja) * 1989-05-26 1990-12-27 Mitsubishi Electric Corp プラズマ処理方法およびプラズマ処理装置

Also Published As

Publication number Publication date
JPH08511898A (ja) 1996-12-10
CA2163967A1 (en) 1994-12-08
CA2163967C (en) 2008-11-04
EP0700577A4 (de) 1996-12-27
EP0700577A1 (de) 1996-03-13
AU6962394A (en) 1994-12-20
KR960702844A (ko) 1996-05-23
WO1994028568A1 (en) 1994-12-08

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