AU625980B2 - Aqueous colloidal dispersion of fumed silica, acid and stabilizer - Google Patents

Aqueous colloidal dispersion of fumed silica, acid and stabilizer

Info

Publication number
AU625980B2
AU625980B2 AU52010/90A AU5201090A AU625980B2 AU 625980 B2 AU625980 B2 AU 625980B2 AU 52010/90 A AU52010/90 A AU 52010/90A AU 5201090 A AU5201090 A AU 5201090A AU 625980 B2 AU625980 B2 AU 625980B2
Authority
AU
Australia
Prior art keywords
stabilizer
acid
fumed silica
colloidal dispersion
aqueous colloidal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU52010/90A
Other languages
English (en)
Other versions
AU5201090A (en
Inventor
Dennis G. Miller
William F. Moll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cabot Corp
CMC Materials LLC
Original Assignee
Cabot Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cabot Corp filed Critical Cabot Corp
Publication of AU5201090A publication Critical patent/AU5201090A/en
Application granted granted Critical
Publication of AU625980B2 publication Critical patent/AU625980B2/en
Assigned to CABOT CORPORATION, CABOT MICROELECTRONICS CORPORATION reassignment CABOT CORPORATION Alteration of Name(s) in Register under S187 Assignors: CABOT CORPORATION
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/113—Silicon oxides; Hydrates thereof
    • C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/14—Colloidal silica, e.g. dispersions, gels, sols
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/113—Silicon oxides; Hydrates thereof
    • C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/14—Colloidal silica, e.g. dispersions, gels, sols
    • C01B33/141—Preparation of hydrosols or aqueous dispersions
    • C01B33/1415—Preparation of hydrosols or aqueous dispersions by suspending finely divided silica in water
    • C01B33/1417—Preparation of hydrosols or aqueous dispersions by suspending finely divided silica in water an aqueous dispersion being obtained

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Colloid Chemistry (AREA)
  • Curing Cements, Concrete, And Artificial Stone (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Treatments For Attaching Organic Compounds To Fibrous Goods (AREA)
  • Paper (AREA)
  • Treating Waste Gases (AREA)
AU52010/90A 1989-03-21 1990-03-21 Aqueous colloidal dispersion of fumed silica, acid and stabilizer Ceased AU625980B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US326890 1981-12-02
US32689089A 1989-03-21 1989-03-21

Publications (2)

Publication Number Publication Date
AU5201090A AU5201090A (en) 1990-09-27
AU625980B2 true AU625980B2 (en) 1992-07-23

Family

ID=23274175

Family Applications (1)

Application Number Title Priority Date Filing Date
AU52010/90A Ceased AU625980B2 (en) 1989-03-21 1990-03-21 Aqueous colloidal dispersion of fumed silica, acid and stabilizer

Country Status (11)

Country Link
JP (1) JP2949633B2 (ko)
KR (1) KR0148692B1 (ko)
CN (1) CN1027162C (ko)
AU (1) AU625980B2 (ko)
BE (1) BE1002854A3 (ko)
BR (1) BR9001302A (ko)
CA (1) CA2012719C (ko)
DE (1) DE4006392A1 (ko)
FR (1) FR2644768B1 (ko)
GB (1) GB2229432B (ko)
IT (1) IT1239546B (ko)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2816076B2 (ja) * 1993-01-21 1998-10-27 日本ペイント株式会社 コロイダル粒子の分散体および水性塗料組成物
DE69611653T2 (de) 1995-11-10 2001-05-03 Tokuyama Corp Poliersuspensionen und Verfahren zu ihrer Herstellung
KR19990023544A (ko) * 1997-08-19 1999-03-25 마쯔모또 에이찌 무기 입자의 수성 분산체와 그의 제조 방법
US5944866A (en) * 1997-09-26 1999-08-31 Lucent Technologies Inc. Fabrication including sol-gel processing
US6132298A (en) * 1998-11-25 2000-10-17 Applied Materials, Inc. Carrier head with edge control for chemical mechanical polishing
CN1089077C (zh) * 1998-11-04 2002-08-14 中国科学院山西煤炭化学研究所 一种二氧化硅溶胶胶粒表面修饰方法
JP4428473B2 (ja) 1999-01-18 2010-03-10 株式会社東芝 気相法無機酸化物粒子の含水固体状物質及び研磨用スラリーの製造方法
JP3721497B2 (ja) * 1999-07-15 2005-11-30 株式会社フジミインコーポレーテッド 研磨用組成物の製造方法
DE19936478A1 (de) * 1999-08-03 2001-02-15 Degussa Sinterwerkstoffe
ATE390386T1 (de) * 2000-11-15 2008-04-15 Cabot Corp Verfahren zur herstellung einer dispersion pyrogener metalloxide
JP4426192B2 (ja) * 2003-02-14 2010-03-03 ニッタ・ハース株式会社 研磨用組成物の製造方法
JP2005286047A (ja) 2004-03-29 2005-10-13 Nitta Haas Inc 半導体研磨用組成物
JP5164129B2 (ja) * 2004-03-29 2013-03-13 ニッタ・ハース株式会社 半導体研磨用組成物
GB0407198D0 (en) 2004-03-30 2004-05-05 British Telecomm Joint fault detection
DE102004021092A1 (de) * 2004-04-29 2005-11-24 Degussa Ag Verwendung einer kationischen Siliciumdioxid-Dispersion als Textilveredlungsmittel
DE102005012409A1 (de) * 2005-03-17 2006-09-21 Wacker Chemie Ag Wäßrige Dispersionen teilhydrophober Kieselsäuren
JP4837483B2 (ja) * 2006-08-04 2011-12-14 住友大阪セメント株式会社 高強度コンクリート用シリカフュームスラリー
DE102008041466A1 (de) * 2008-08-22 2010-02-25 Wacker Chemie Ag Wäßrige Dispersionen hydrophober Kieselsäuren
EP2555920B1 (en) * 2009-12-29 2017-09-13 W. R. Grace & Co.-Conn Composite inorganic particles and methods of making and using the same
NO342672B1 (en) * 2016-09-13 2018-06-25 Elkem As Microsilica slurry and method for producing such slurry
KR20200027549A (ko) * 2017-08-09 2020-03-12 와커 헤미 아게 수성 분산액, 수성 분산액의 제조 방법, 수-중-유 유형 에멀젼, 수-중-유 유형 에멀젼의 제조 방법, 및 디자인 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2984629A (en) * 1957-11-04 1961-05-16 Cabot Corp Aqueous dispersions of pyrogenic silica
GB1126572A (en) * 1964-09-25 1968-09-05 Degussa Stable dispersions of finely divided silica
US4042361A (en) * 1976-04-26 1977-08-16 Corning Glass Works Method of densifying metal oxides

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3291626A (en) * 1962-12-26 1966-12-13 Huber Corp J M Stabilized pigment slurries
GB1326574A (en) * 1970-10-30 1973-08-15 Degussa Production of stabilised dispersions of pyrogenic silica
FR2094790A5 (fr) * 1970-11-24 1972-02-04 Degussa Procede pour la preparation de dispersions aqueuses stables de dioxydes de silicium par voie ignee
DE2844052A1 (de) * 1978-10-10 1980-04-30 Degussa Waessrige dispersion einer hydrophoben kieselsaeure
US4321243A (en) * 1980-08-05 1982-03-23 Cornwell Charles E Method of producing stabilized aqueous dispersions of silica fume

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2984629A (en) * 1957-11-04 1961-05-16 Cabot Corp Aqueous dispersions of pyrogenic silica
GB1126572A (en) * 1964-09-25 1968-09-05 Degussa Stable dispersions of finely divided silica
US4042361A (en) * 1976-04-26 1977-08-16 Corning Glass Works Method of densifying metal oxides

Also Published As

Publication number Publication date
GB9006122D0 (en) 1990-05-16
AU5201090A (en) 1990-09-27
IT1239546B (it) 1993-11-05
JP2949633B2 (ja) 1999-09-20
IT9019748A1 (it) 1991-09-21
GB2229432B (en) 1992-09-23
BR9001302A (pt) 1991-04-02
CN1045754A (zh) 1990-10-03
DE4006392A1 (de) 1990-09-27
KR0148692B1 (ko) 1998-08-17
JPH0360420A (ja) 1991-03-15
IT9019748A0 (it) 1990-03-21
CN1027162C (zh) 1994-12-28
CA2012719A1 (en) 1990-09-21
GB2229432A (en) 1990-09-26
FR2644768B1 (fr) 1994-02-11
BE1002854A3 (fr) 1991-07-02
KR900014248A (ko) 1990-10-23
FR2644768A1 (fr) 1990-09-28
CA2012719C (en) 1999-06-08

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Legal Events

Date Code Title Description
PC Assignment registered

Owner name: CABOT MICROELECTRONICS CORPORATION

Free format text: FORMER OWNER WAS: CABOT CORPORATION

TH Corrigenda

Free format text: IN VOL 14, NO 48, PAGE(S) 8941 UNDER THE HEADING ASSIGNMENTS REGISTERED. THE NAME OF THE ASSIGNEE IN REGARD TO PATENT NUMBER 625980 SHOULD READ CABOT CORPORATION AND CABOT MICROELECTRONICS CORPORATION

TH Corrigenda

Free format text: IN VOL 14, NO 48, PAGE(S) 8941 UNDER THE HEADING ASSIGNMENTS REGISTERED. THE NAME OF THE ASSIGNEE IN REGARD TO PATENT NUMBERS 625980 AND 631847 SHOULD READ CABOT CORPORATION AND CABOT MICROELECTRONICS CORPORATION