AU5201090A - Aqueous colloidal dispersion of fumed silica, acid and stabilizer - Google Patents

Aqueous colloidal dispersion of fumed silica, acid and stabilizer

Info

Publication number
AU5201090A
AU5201090A AU52010/90A AU5201090A AU5201090A AU 5201090 A AU5201090 A AU 5201090A AU 52010/90 A AU52010/90 A AU 52010/90A AU 5201090 A AU5201090 A AU 5201090A AU 5201090 A AU5201090 A AU 5201090A
Authority
AU
Australia
Prior art keywords
stabilizer
acid
fumed silica
colloidal dispersion
aqueous colloidal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
AU52010/90A
Other versions
AU625980B2 (en
Inventor
Dennis G. Miller
William F. Moll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cabot Corp
CMC Materials LLC
Original Assignee
Cabot Corp
Cabot Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cabot Corp, Cabot Microelectronics Corp filed Critical Cabot Corp
Publication of AU5201090A publication Critical patent/AU5201090A/en
Application granted granted Critical
Publication of AU625980B2 publication Critical patent/AU625980B2/en
Assigned to CABOT MICROELECTRONICS CORPORATION, CABOT CORPORATION reassignment CABOT MICROELECTRONICS CORPORATION Alteration of Name(s) in Register under S187 Assignors: CABOT CORPORATION
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/113Silicon oxides; Hydrates thereof
    • C01B33/12Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/14Colloidal silica, e.g. dispersions, gels, sols
    • C01B33/141Preparation of hydrosols or aqueous dispersions
    • C01B33/1415Preparation of hydrosols or aqueous dispersions by suspending finely divided silica in water
    • C01B33/1417Preparation of hydrosols or aqueous dispersions by suspending finely divided silica in water an aqueous dispersion being obtained
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/113Silicon oxides; Hydrates thereof
    • C01B33/12Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/14Colloidal silica, e.g. dispersions, gels, sols

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Colloid Chemistry (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Treatments For Attaching Organic Compounds To Fibrous Goods (AREA)
  • Paper (AREA)
  • Curing Cements, Concrete, And Artificial Stone (AREA)
  • Treating Waste Gases (AREA)
AU52010/90A 1989-03-21 1990-03-21 Aqueous colloidal dispersion of fumed silica, acid and stabilizer Ceased AU625980B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US326890 1981-12-02
US32689089A 1989-03-21 1989-03-21

Publications (2)

Publication Number Publication Date
AU5201090A true AU5201090A (en) 1990-09-27
AU625980B2 AU625980B2 (en) 1992-07-23

Family

ID=23274175

Family Applications (1)

Application Number Title Priority Date Filing Date
AU52010/90A Ceased AU625980B2 (en) 1989-03-21 1990-03-21 Aqueous colloidal dispersion of fumed silica, acid and stabilizer

Country Status (11)

Country Link
JP (1) JP2949633B2 (en)
KR (1) KR0148692B1 (en)
CN (1) CN1027162C (en)
AU (1) AU625980B2 (en)
BE (1) BE1002854A3 (en)
BR (1) BR9001302A (en)
CA (1) CA2012719C (en)
DE (1) DE4006392A1 (en)
FR (1) FR2644768B1 (en)
GB (1) GB2229432B (en)
IT (1) IT1239546B (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2816076B2 (en) * 1993-01-21 1998-10-27 日本ペイント株式会社 Dispersion of colloidal particles and aqueous coating composition
DE69611653T2 (en) 1995-11-10 2001-05-03 Tokuyama Corp Polishing suspensions and processes for their manufacture
KR19990023544A (en) * 1997-08-19 1999-03-25 마쯔모또 에이찌 Aqueous dispersion of inorganic particles and preparation method thereof
US5944866A (en) * 1997-09-26 1999-08-31 Lucent Technologies Inc. Fabrication including sol-gel processing
US6132298A (en) * 1998-11-25 2000-10-17 Applied Materials, Inc. Carrier head with edge control for chemical mechanical polishing
CN1089077C (en) * 1998-11-04 2002-08-14 中国科学院山西煤炭化学研究所 Surficial modification process for SiO2 sol particles
JP4428473B2 (en) * 1999-01-18 2010-03-10 株式会社東芝 Method for producing water-containing solid substance of vapor-phase inorganic oxide particles and polishing slurry
JP3721497B2 (en) 1999-07-15 2005-11-30 株式会社フジミインコーポレーテッド Method for producing polishing composition
DE19936478A1 (en) * 1999-08-03 2001-02-15 Degussa Sintered materials
JP5154731B2 (en) * 2000-11-15 2013-02-27 キャボット コーポレイション Process for producing fumed metal oxide dispersion
JP4426192B2 (en) * 2003-02-14 2010-03-03 ニッタ・ハース株式会社 Method for producing polishing composition
JP2005286047A (en) 2004-03-29 2005-10-13 Nitta Haas Inc Abrasive composition for semiconductor
JP5164129B2 (en) * 2004-03-29 2013-03-13 ニッタ・ハース株式会社 Semiconductor polishing composition
GB0407198D0 (en) 2004-03-30 2004-05-05 British Telecomm Joint fault detection
DE102004021092A1 (en) * 2004-04-29 2005-11-24 Degussa Ag Use of a cationic silica dispersion as a textile finishing agent
DE102005012409A1 (en) * 2005-03-17 2006-09-21 Wacker Chemie Ag Aqueous dispersions of partially hydrophobic silicic acids
JP4837483B2 (en) * 2006-08-04 2011-12-14 住友大阪セメント株式会社 Silica fume slurry for high-strength concrete
DE102008041466A1 (en) * 2008-08-22 2010-02-25 Wacker Chemie Ag Aqueous dispersions of hydrophobic silicic acids
CN102905887B8 (en) * 2009-12-29 2016-06-22 格雷斯公司 Composite inorganic granule and preparation and their method of use
NO342672B1 (en) * 2016-09-13 2018-06-25 Elkem As Microsilica slurry and method for producing such slurry
KR20200027549A (en) * 2017-08-09 2020-03-12 와커 헤미 아게 Aqueous dispersions, methods of making aqueous dispersions, water-in-oil type emulsions, methods of making water-in-oil type emulsions, and design methods

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2984629A (en) * 1957-11-04 1961-05-16 Cabot Corp Aqueous dispersions of pyrogenic silica
US3291626A (en) * 1962-12-26 1966-12-13 Huber Corp J M Stabilized pigment slurries
DE1442656C3 (en) * 1964-09-25 1975-07-17 Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler, 6000 Frankfurt Process for the production of a stable dispersion of pyrogenically obtained finely divided silicon dioxide
GB1326574A (en) * 1970-10-30 1973-08-15 Degussa Production of stabilised dispersions of pyrogenic silica
FR2094790A5 (en) * 1970-11-24 1972-02-04 Degussa Stable aqs silicon dioxide dispersions prepn
US4042361A (en) * 1976-04-26 1977-08-16 Corning Glass Works Method of densifying metal oxides
DE2844052A1 (en) * 1978-10-10 1980-04-30 Degussa AQUEOUS DISPERSION OF A HYDROPHOBIC SILICA
US4321243A (en) * 1980-08-05 1982-03-23 Cornwell Charles E Method of producing stabilized aqueous dispersions of silica fume

Also Published As

Publication number Publication date
CA2012719C (en) 1999-06-08
JPH0360420A (en) 1991-03-15
CN1045754A (en) 1990-10-03
IT9019748A0 (en) 1990-03-21
FR2644768A1 (en) 1990-09-28
GB9006122D0 (en) 1990-05-16
DE4006392A1 (en) 1990-09-27
FR2644768B1 (en) 1994-02-11
GB2229432B (en) 1992-09-23
IT9019748A1 (en) 1991-09-21
GB2229432A (en) 1990-09-26
AU625980B2 (en) 1992-07-23
CN1027162C (en) 1994-12-28
KR0148692B1 (en) 1998-08-17
BE1002854A3 (en) 1991-07-02
JP2949633B2 (en) 1999-09-20
CA2012719A1 (en) 1990-09-21
BR9001302A (en) 1991-04-02
IT1239546B (en) 1993-11-05
KR900014248A (en) 1990-10-23

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Legal Events

Date Code Title Description
PC Assignment registered

Owner name: CABOT MICROELECTRONICS CORPORATION

Free format text: FORMER OWNER WAS: CABOT CORPORATION

TH Corrigenda

Free format text: IN VOL 14, NO 48, PAGE(S) 8941 UNDER THE HEADING ASSIGNMENTS REGISTERED. THE NAME OF THE ASSIGNEE IN REGARD TO PATENT NUMBER 625980 SHOULD READ CABOT CORPORATION AND CABOT MICROELECTRONICS CORPORATION

TH Corrigenda

Free format text: IN VOL 14, NO 48, PAGE(S) 8941 UNDER THE HEADING ASSIGNMENTS REGISTERED. THE NAME OF THE ASSIGNEE IN REGARD TO PATENT NUMBERS 625980 AND 631847 SHOULD READ CABOT CORPORATION AND CABOT MICROELECTRONICS CORPORATION