AU2010283420B2 - Method for purifying chlorosilanes - Google Patents

Method for purifying chlorosilanes Download PDF

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Publication number
AU2010283420B2
AU2010283420B2 AU2010283420A AU2010283420A AU2010283420B2 AU 2010283420 B2 AU2010283420 B2 AU 2010283420B2 AU 2010283420 A AU2010283420 A AU 2010283420A AU 2010283420 A AU2010283420 A AU 2010283420A AU 2010283420 B2 AU2010283420 B2 AU 2010283420B2
Authority
AU
Australia
Prior art keywords
chlorosilanes
product formation
solid
impurities
distillation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU2010283420A
Other languages
English (en)
Other versions
AU2010283420A1 (en
Inventor
Tohru Kubota
Naoki Nagai
Takaaki Shimizu
Katsuhiro Uehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Publication of AU2010283420A1 publication Critical patent/AU2010283420A1/en
Application granted granted Critical
Publication of AU2010283420B2 publication Critical patent/AU2010283420B2/en
Ceased legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10778—Purification

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
AU2010283420A 2009-08-12 2010-07-07 Method for purifying chlorosilanes Ceased AU2010283420B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009-187302 2009-08-12
JP2009187302A JP5368909B2 (ja) 2009-08-12 2009-08-12 クロロシラン類の精製方法
PCT/JP2010/004441 WO2011018875A1 (ja) 2009-08-12 2010-07-07 クロロシラン類の精製方法

Publications (2)

Publication Number Publication Date
AU2010283420A1 AU2010283420A1 (en) 2012-02-09
AU2010283420B2 true AU2010283420B2 (en) 2013-04-18

Family

ID=43586060

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2010283420A Ceased AU2010283420B2 (en) 2009-08-12 2010-07-07 Method for purifying chlorosilanes

Country Status (6)

Country Link
US (1) US9193597B2 (enExample)
EP (1) EP2465819B1 (enExample)
JP (1) JP5368909B2 (enExample)
CN (1) CN102471076B (enExample)
AU (1) AU2010283420B2 (enExample)
WO (1) WO2011018875A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5507498B2 (ja) * 2011-06-21 2014-05-28 信越化学工業株式会社 クロロシラン類の精製方法
CN104080738B (zh) 2011-10-20 2015-12-23 瑞科硅公司 氢氯硅烷生产中结垢的降低
JP5914240B2 (ja) * 2012-08-07 2016-05-11 株式会社トクヤマ 多結晶シリコンの製造方法
US10584035B2 (en) * 2017-02-24 2020-03-10 Shin-Etsu Chemical Co., Ltd. Purification system of trichlorosilane and silicon crystal
DE102017125221A1 (de) * 2017-10-27 2019-05-02 Nexwafe Gmbh Verfahren und Vorrichtung zur Entfernung von Verunreinigungen aus Chlorsilanen
CN118541331A (zh) 2022-01-18 2024-08-23 株式会社德山 多晶硅棒制造用反应炉、气体供给喷嘴、多晶硅棒的制造方法以及多晶硅棒
CN118561275A (zh) * 2024-05-06 2024-08-30 新特能源股份有限公司 原子级Lewis酸碱位修饰的功能碳材料的制备方法及应用

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3252752A (en) * 1958-01-11 1966-05-24 Licentia Gmbh Method for producing pure silane and chlorinated silanes

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3126248A (en) 1964-03-24 Process for producing purified
US4374110A (en) * 1981-06-15 1983-02-15 Motorola, Inc. Purification of silicon source materials
JP2005067979A (ja) * 2003-08-27 2005-03-17 Tokuyama Corp クロロシラン類の精製方法
ITRM20040570A1 (it) 2004-11-19 2005-02-19 Memc Electronic Materials Procedimento e impianto di purificazione di triclorosilano e di tetracloruro di silicio.
CN100413872C (zh) 2005-10-31 2008-08-27 杭州师范学院 一种化学提纯甲基苯基二氯硅烷的方法
JP4714198B2 (ja) * 2007-09-05 2011-06-29 信越化学工業株式会社 クロロシラン類の精製方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3252752A (en) * 1958-01-11 1966-05-24 Licentia Gmbh Method for producing pure silane and chlorinated silanes

Also Published As

Publication number Publication date
WO2011018875A1 (ja) 2011-02-17
US9193597B2 (en) 2015-11-24
JP2011037670A (ja) 2011-02-24
JP5368909B2 (ja) 2013-12-18
EP2465819B1 (en) 2016-06-29
US20120121493A1 (en) 2012-05-17
EP2465819A4 (en) 2013-05-01
EP2465819A1 (en) 2012-06-20
AU2010283420A1 (en) 2012-02-09
CN102471076B (zh) 2014-03-12
CN102471076A (zh) 2012-05-23

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MK14 Patent ceased section 143(a) (annual fees not paid) or expired