CN102471076B - 氯硅烷类的提纯方法 - Google Patents

氯硅烷类的提纯方法 Download PDF

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Publication number
CN102471076B
CN102471076B CN201080035441.5A CN201080035441A CN102471076B CN 102471076 B CN102471076 B CN 102471076B CN 201080035441 A CN201080035441 A CN 201080035441A CN 102471076 B CN102471076 B CN 102471076B
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China
Prior art keywords
chlorosilanes
solid
impurities
purification
aromatic
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Expired - Fee Related
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CN201080035441.5A
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English (en)
Chinese (zh)
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CN102471076A (zh
Inventor
永井直树
清水孝明
上原克浩
久保田透
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Shin Etsu Chemical Co Ltd
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Shin Etsu Chemical Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10778—Purification

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
CN201080035441.5A 2009-08-12 2010-07-07 氯硅烷类的提纯方法 Expired - Fee Related CN102471076B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009-187302 2009-08-12
JP2009187302A JP5368909B2 (ja) 2009-08-12 2009-08-12 クロロシラン類の精製方法
PCT/JP2010/004441 WO2011018875A1 (ja) 2009-08-12 2010-07-07 クロロシラン類の精製方法

Publications (2)

Publication Number Publication Date
CN102471076A CN102471076A (zh) 2012-05-23
CN102471076B true CN102471076B (zh) 2014-03-12

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ID=43586060

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CN201080035441.5A Expired - Fee Related CN102471076B (zh) 2009-08-12 2010-07-07 氯硅烷类的提纯方法

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US (1) US9193597B2 (enExample)
EP (1) EP2465819B1 (enExample)
JP (1) JP5368909B2 (enExample)
CN (1) CN102471076B (enExample)
AU (1) AU2010283420B2 (enExample)
WO (1) WO2011018875A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5507498B2 (ja) * 2011-06-21 2014-05-28 信越化学工業株式会社 クロロシラン類の精製方法
TWI574915B (zh) 2011-10-20 2017-03-21 陝西有色天宏瑞科矽材料有限責任公司 在製造氫氯矽烷中積垢的減少
JP5914240B2 (ja) * 2012-08-07 2016-05-11 株式会社トクヤマ 多結晶シリコンの製造方法
US10584035B2 (en) * 2017-02-24 2020-03-10 Shin-Etsu Chemical Co., Ltd. Purification system of trichlorosilane and silicon crystal
DE102017125221A1 (de) * 2017-10-27 2019-05-02 Nexwafe Gmbh Verfahren und Vorrichtung zur Entfernung von Verunreinigungen aus Chlorsilanen
KR20240134866A (ko) 2022-01-18 2024-09-10 가부시키가이샤 도쿠야마 다결정 실리콘 로드 제조용 반응로, 가스공급 노즐, 다결정 실리콘 로드의 제조방법 및 다결정 실리콘 로드

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3252752A (en) * 1958-01-11 1966-05-24 Licentia Gmbh Method for producing pure silane and chlorinated silanes
CN1807433A (zh) * 2005-10-31 2006-07-26 杭州师范学院 一种化学提纯甲基苯基二氯硅烷的方法
CN101065324A (zh) * 2004-11-19 2007-10-31 Memc电子材料有限公司 提纯三氯硅烷和四氯化硅的方法和设备
US20090068081A1 (en) * 2007-09-05 2009-03-12 Shin -Etsu Chemical Co., Ltd. Method for purifying chlorosilanes

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3126248A (en) 1964-03-24 Process for producing purified
US4374110A (en) 1981-06-15 1983-02-15 Motorola, Inc. Purification of silicon source materials
JP2005067979A (ja) 2003-08-27 2005-03-17 Tokuyama Corp クロロシラン類の精製方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3252752A (en) * 1958-01-11 1966-05-24 Licentia Gmbh Method for producing pure silane and chlorinated silanes
CN101065324A (zh) * 2004-11-19 2007-10-31 Memc电子材料有限公司 提纯三氯硅烷和四氯化硅的方法和设备
CN1807433A (zh) * 2005-10-31 2006-07-26 杭州师范学院 一种化学提纯甲基苯基二氯硅烷的方法
US20090068081A1 (en) * 2007-09-05 2009-03-12 Shin -Etsu Chemical Co., Ltd. Method for purifying chlorosilanes

Also Published As

Publication number Publication date
US9193597B2 (en) 2015-11-24
EP2465819A4 (en) 2013-05-01
WO2011018875A1 (ja) 2011-02-17
EP2465819A1 (en) 2012-06-20
US20120121493A1 (en) 2012-05-17
JP5368909B2 (ja) 2013-12-18
CN102471076A (zh) 2012-05-23
AU2010283420B2 (en) 2013-04-18
JP2011037670A (ja) 2011-02-24
AU2010283420A1 (en) 2012-02-09
EP2465819B1 (en) 2016-06-29

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Granted publication date: 20140312

Termination date: 20170707