AU2006298957B2 - Crucible for the crystallization of silicon and process for making the same - Google Patents
Crucible for the crystallization of silicon and process for making the same Download PDFInfo
- Publication number
- AU2006298957B2 AU2006298957B2 AU2006298957A AU2006298957A AU2006298957B2 AU 2006298957 B2 AU2006298957 B2 AU 2006298957B2 AU 2006298957 A AU2006298957 A AU 2006298957A AU 2006298957 A AU2006298957 A AU 2006298957A AU 2006298957 B2 AU2006298957 B2 AU 2006298957B2
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- Australia
- Prior art keywords
- silicon
- crucible
- silicon nitride
- silica
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 45
- 239000010703 silicon Substances 0.000 title claims abstract description 44
- 238000000034 method Methods 0.000 title claims description 26
- 238000002425 crystallisation Methods 0.000 title claims description 9
- 230000008025 crystallization Effects 0.000 title claims description 9
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 49
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 48
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 44
- 239000011230 binding agent Substances 0.000 claims abstract description 36
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 31
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 31
- 239000001301 oxygen Substances 0.000 claims abstract description 31
- 239000011253 protective coating Substances 0.000 claims abstract description 18
- 229910052500 inorganic mineral Inorganic materials 0.000 claims abstract description 17
- 239000011707 mineral Substances 0.000 claims abstract description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 67
- 239000000377 silicon dioxide Substances 0.000 claims description 31
- 239000002245 particle Substances 0.000 claims description 12
- 238000010438 heat treatment Methods 0.000 claims description 11
- 230000003647 oxidation Effects 0.000 claims description 11
- 238000007254 oxidation reaction Methods 0.000 claims description 11
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 claims description 10
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 9
- 239000000725 suspension Substances 0.000 claims description 8
- 238000005507 spraying Methods 0.000 claims description 7
- 239000002105 nanoparticle Substances 0.000 claims description 6
- 150000002902 organometallic compounds Chemical class 0.000 claims description 6
- 229920002545 silicone oil Polymers 0.000 claims description 6
- 239000005046 Chlorosilane Substances 0.000 claims description 5
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 claims description 5
- 229920000555 poly(dimethylsilanediyl) polymer Polymers 0.000 claims description 5
- 239000000084 colloidal system Substances 0.000 claims description 4
- 238000002360 preparation method Methods 0.000 claims description 2
- 239000011362 coarse particle Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 abstract description 55
- 239000011248 coating agent Substances 0.000 abstract description 48
- 238000007711 solidification Methods 0.000 abstract description 4
- 230000008023 solidification Effects 0.000 abstract description 4
- 239000012768 molten material Substances 0.000 abstract description 3
- 239000000843 powder Substances 0.000 description 19
- 238000006243 chemical reaction Methods 0.000 description 15
- 239000000203 mixture Substances 0.000 description 14
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 150000004767 nitrides Chemical class 0.000 description 8
- 229910052799 carbon Inorganic materials 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 229920002451 polyvinyl alcohol Polymers 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 239000008119 colloidal silica Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 229920001223 polyethylene glycol Polymers 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 2
- 101000687323 Homo sapiens Rabenosyn-5 Proteins 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 102100024910 Rabenosyn-5 Human genes 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 230000001680 brushing effect Effects 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 239000001768 carboxy methyl cellulose Substances 0.000 description 2
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 2
- 239000008112 carboxymethyl-cellulose Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000008199 coating composition Substances 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000003517 fume Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- OBNDGIHQAIXEAO-UHFFFAOYSA-N [O].[Si] Chemical compound [O].[Si] OBNDGIHQAIXEAO-UHFFFAOYSA-N 0.000 description 1
- 238000005903 acid hydrolysis reaction Methods 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 235000019270 ammonium chloride Nutrition 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000012295 chemical reaction liquid Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- IDGUHHHQCWSQLU-UHFFFAOYSA-N ethanol;hydrate Chemical compound O.CCO IDGUHHHQCWSQLU-UHFFFAOYSA-N 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000001033 granulometry Methods 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000010128 melt processing Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000004530 micro-emulsion Substances 0.000 description 1
- 239000006082 mold release agent Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 230000010399 physical interaction Effects 0.000 description 1
- 238000007750 plasma spraying Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000012047 saturated solution Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000000935 solvent evaporation Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
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- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
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- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
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- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Metallurgy (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Ceramic Products (AREA)
- Glass Compositions (AREA)
- Optical Elements Other Than Lenses (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP05447224 | 2005-10-06 | ||
| EP05447224.6 | 2005-10-06 | ||
| PCT/EP2006/009671 WO2007039310A1 (en) | 2005-10-06 | 2006-10-06 | Crucible for the crystallization of silicon and process for making the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| AU2006298957A1 AU2006298957A1 (en) | 2007-04-12 |
| AU2006298957B2 true AU2006298957B2 (en) | 2010-06-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU2006298957A Ceased AU2006298957B2 (en) | 2005-10-06 | 2006-10-06 | Crucible for the crystallization of silicon and process for making the same |
Country Status (18)
| Country | Link |
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| US (1) | US8298333B2 (enExample) |
| EP (1) | EP1954856B1 (enExample) |
| JP (1) | JP4917607B2 (enExample) |
| KR (1) | KR101212924B1 (enExample) |
| CN (1) | CN101278078B (enExample) |
| AT (1) | ATE439461T1 (enExample) |
| AU (1) | AU2006298957B2 (enExample) |
| BR (1) | BRPI0616485A2 (enExample) |
| CA (1) | CA2624887C (enExample) |
| DE (1) | DE602006008498D1 (enExample) |
| ES (1) | ES2327570T3 (enExample) |
| NO (1) | NO20082102L (enExample) |
| PL (1) | PL1954856T3 (enExample) |
| RU (1) | RU2401889C2 (enExample) |
| TW (1) | TWI400369B (enExample) |
| UA (1) | UA89284C2 (enExample) |
| WO (1) | WO2007039310A1 (enExample) |
| ZA (1) | ZA200803754B (enExample) |
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| DE102005050593A1 (de) * | 2005-10-21 | 2007-04-26 | Esk Ceramics Gmbh & Co. Kg | Dauerhafte siliciumnitridhaltige Hartbeschichtung |
| EP1811064A1 (fr) | 2006-01-12 | 2007-07-25 | Vesuvius Crucible Company | Creuset pour le traitement de silicium à l'état fondu |
| EP1985594B1 (de) * | 2007-04-25 | 2011-10-12 | ESK Ceramics GmbH & Co.KG | Formkörper mit einer dauerhaften siliciumnitridhaltigen Hartbeschichtung, Verfahren zu dessen Herstellung und dessen Verwendung |
| US8048365B2 (en) * | 2007-04-30 | 2011-11-01 | General Electric Company | Crucibles for melting titanium alloys |
| US8236232B2 (en) | 2007-04-30 | 2012-08-07 | General Electric Company | Methods for making reinforced refractory crucibles for melting titanium alloys |
| BE1017674A3 (fr) * | 2007-07-05 | 2009-03-03 | Fib Services Internat | Composition de traitement de chambre a parois refractaires et son procede de mise en oeuvre. |
| DE102007053284A1 (de) * | 2007-11-08 | 2009-05-20 | Esk Ceramics Gmbh & Co. Kg | Fest haftende siliciumnitridhaltige Trennschicht |
| DE102008031766A1 (de) | 2008-07-04 | 2009-10-15 | Schott Ag | Verfahren zur Herstellung eines beschichteten Tiegels aus einem Tiegelgrünkörper oder aus einem zwischengebrannten Tiegelkörper sowie die Verwendung solch eines beschichteten Tiegels |
| CN101433890B (zh) * | 2008-12-05 | 2010-12-29 | 江阴海润太阳能电力有限公司 | 低压下在石英坩埚内壁上喷涂氮化硅涂层的方法及装置 |
| RU2384410C1 (ru) * | 2008-12-11 | 2010-03-20 | Открытое акционерное общество Научно-производственное объединение "Искра" | Способ подготовки к работе формообразующей оправки |
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| CN101508590B (zh) * | 2009-03-20 | 2012-07-04 | 江西赛维Ldk太阳能高科技有限公司 | 一种多晶硅铸锭用坩埚涂层以及制备方法 |
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| JP5518584B2 (ja) * | 2010-06-16 | 2014-06-11 | 電気化学工業株式会社 | 離型剤用窒化珪素粉末。 |
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| FR2964117B1 (fr) * | 2010-08-27 | 2012-09-28 | Commissariat Energie Atomique | Creuset pour la solidification de lingot de silicium |
| WO2012046673A1 (ja) * | 2010-10-08 | 2012-04-12 | Jx日鉱日石金属株式会社 | シリコンインゴット製造用容器 |
| WO2012090541A1 (ja) * | 2010-12-28 | 2012-07-05 | 宇部興産株式会社 | 多結晶シリコンインゴット鋳造用鋳型及びその製造方法並びに多結晶シリコンインゴット鋳造用鋳型の離型材用窒化珪素粉末及びそれを含有したスラリー |
| JP5637221B2 (ja) * | 2010-12-28 | 2014-12-10 | 宇部興産株式会社 | 多結晶シリコンインゴット鋳造用鋳型及びその製造方法並びに多結晶シリコンインゴット鋳造用鋳型の離型材用窒化珪素粉末及びそれを含有したスラリー |
| CN103339300A (zh) * | 2010-12-30 | 2013-10-02 | 圣戈本陶瓷及塑料股份有限公司 | 坩埚主体及其形成方法 |
| MY165455A (en) | 2011-08-31 | 2018-03-22 | 3M Innovative Properties Co | Silicon-nitride-containing separating layer having high hardness |
| CN104066873A (zh) * | 2011-09-09 | 2014-09-24 | 英诺文特科技公司 | 带涂层坩埚和制造带涂层坩埚的方法 |
| US8747538B2 (en) * | 2011-09-20 | 2014-06-10 | Chung-Hou Tony Hsiao | Photovoltaic ingot mold release |
| CN102358953B (zh) * | 2011-09-28 | 2015-12-09 | 江西赛维Ldk太阳能高科技有限公司 | 一种减少粘埚的坩埚及其制备方法 |
| US8858697B2 (en) | 2011-10-28 | 2014-10-14 | General Electric Company | Mold compositions |
| CN103130528B (zh) * | 2011-12-05 | 2014-06-11 | 江苏协鑫硅材料科技发展有限公司 | 多晶硅铸锭用的免烧结坩埚涂层结构及其制备方法 |
| US9011205B2 (en) | 2012-02-15 | 2015-04-21 | General Electric Company | Titanium aluminide article with improved surface finish |
| US8932518B2 (en) | 2012-02-29 | 2015-01-13 | General Electric Company | Mold and facecoat compositions |
| CN103360077B (zh) * | 2012-04-01 | 2014-12-24 | 浙江昱辉阳光能源有限公司 | 一种氮化硅坩埚及其制备方法 |
| EP2864529A1 (en) * | 2012-06-25 | 2015-04-29 | Silicor Materials Inc. | Lining for surfaces of a refractory crucible for purification of silicon melt and method of purification of the silicon melt using that crucible (s) for melting and further directional solidification |
| JP5901448B2 (ja) * | 2012-06-28 | 2016-04-13 | デンカ株式会社 | 離型剤用窒化ケイ素粉末 |
| US8906292B2 (en) | 2012-07-27 | 2014-12-09 | General Electric Company | Crucible and facecoat compositions |
| US8708033B2 (en) | 2012-08-29 | 2014-04-29 | General Electric Company | Calcium titanate containing mold compositions and methods for casting titanium and titanium aluminide alloys |
| US8992824B2 (en) | 2012-12-04 | 2015-03-31 | General Electric Company | Crucible and extrinsic facecoat compositions |
| US9592548B2 (en) | 2013-01-29 | 2017-03-14 | General Electric Company | Calcium hexaluminate-containing mold and facecoat compositions and methods for casting titanium and titanium aluminide alloys |
| DE102013206993B4 (de) | 2013-04-18 | 2014-12-04 | Morgan Advanced Materials Haldenwanger GmbH | Verfahren zur Beschichtung von Formkörpern aus Quarzgut |
| CN103243392A (zh) * | 2013-05-09 | 2013-08-14 | 天津英利新能源有限公司 | 多晶硅铸锭炉与制备均匀细小晶粒多晶硅铸锭的方法 |
| FR3010716B1 (fr) * | 2013-09-16 | 2015-10-09 | Commissariat Energie Atomique | Substrat pour la solidification de lingot de silicium |
| CN103526290A (zh) * | 2013-10-24 | 2014-01-22 | 阿特斯(中国)投资有限公司 | 多晶硅铸锭的制备方法 |
| US9511417B2 (en) | 2013-11-26 | 2016-12-06 | General Electric Company | Silicon carbide-containing mold and facecoat compositions and methods for casting titanium and titanium aluminide alloys |
| US9192983B2 (en) | 2013-11-26 | 2015-11-24 | General Electric Company | Silicon carbide-containing mold and facecoat compositions and methods for casting titanium and titanium aluminide alloys |
| US10391547B2 (en) | 2014-06-04 | 2019-08-27 | General Electric Company | Casting mold of grading with silicon carbide |
| TWI663126B (zh) | 2014-07-09 | 2019-06-21 | 法商維蘇威法國公司 | 包含可磨塗層之輥、其製造方法及其用途 |
| CN104140759B (zh) * | 2014-07-17 | 2016-08-24 | 宁波晶元太阳能有限公司 | 多晶硅铸锭用石英坩埚底部引晶涂层的制备方法 |
| CN105063757B (zh) * | 2015-09-17 | 2017-12-29 | 晶科能源有限公司 | 一种低氧喷涂方法 |
| CN105603374B (zh) * | 2016-02-19 | 2018-06-12 | 中科院微电子研究所昆山分所 | 一种在多晶硅铸锭坩埚上制备Si3N4薄膜的方法 |
| KR102571434B1 (ko) * | 2016-12-28 | 2023-08-29 | 오씨아이 주식회사 | 실리카 도가니 내벽에 질화규소를 코팅하는 방법 |
| CN107162001A (zh) * | 2017-06-20 | 2017-09-15 | 晋能清洁能源光伏工程有限责任公司 | 一种多晶硅分凝铸造方法及分凝装置 |
| CN107876362B (zh) * | 2017-11-10 | 2021-03-23 | 江苏协鑫硅材料科技发展有限公司 | 大尺寸铸锭用坩埚涂层的自动喷涂工艺及坩埚 |
| DE102018206982B4 (de) * | 2018-05-04 | 2025-02-20 | Alzchem Trostberg Gmbh | Tiegel zur Herstellung von multikristallinem Silicium mittels gerichteter Erstarrung, Verfahren zu dessen Herstellung und dessen Verwendung |
| CN109750351A (zh) * | 2018-05-31 | 2019-05-14 | 河北高富氮化硅材料有限公司 | 一种多晶硅铸锭用高效Si3N4粉 |
| CN109704782B (zh) * | 2019-01-30 | 2021-12-14 | 中国科学院理化技术研究所 | 一种用于光伏多晶硅生产的Si2N2O陶瓷粉体的制备方法 |
| US20220212998A1 (en) * | 2019-04-17 | 2022-07-07 | Materion Corporation | Crucibles and compositions and processes for making same |
| CN114477781B (zh) * | 2020-10-23 | 2024-05-24 | 中国科学院理化技术研究所 | 一种复合陶瓷涂层脱模剂的制备工艺 |
| KR102407043B1 (ko) * | 2022-03-04 | 2022-06-10 | 주식회사 에스티아이 | 탄화규소 분말의 합성방법 |
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| US4218418A (en) * | 1978-06-22 | 1980-08-19 | Crystal Systems, Inc. | Processes of casting an ingot and making a silica container |
| US4741925A (en) * | 1987-09-14 | 1988-05-03 | Gte Products Corporation | Method of forming silicon nitride coating |
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| WO2004053207A1 (en) * | 2002-12-06 | 2004-06-24 | Vesuvius France S.A. | Vessel for holding silicon and method of producing the same |
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| US5283124A (en) | 1990-03-02 | 1994-02-01 | Kansai Paint Co., Ltd. | Coating resin composition |
| RU2036983C1 (ru) * | 1991-06-03 | 1995-06-09 | Государственный научно-исследовательский и проектный институт редкометаллической промышленности "Гиредмет" | Покрытие графитового тигля |
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| RU2355832C2 (ru) | 2004-04-29 | 2009-05-20 | Везувиус Крусибл Компани | Кристаллизатор для кристаллизации кремния |
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| EP1811064A1 (fr) * | 2006-01-12 | 2007-07-25 | Vesuvius Crucible Company | Creuset pour le traitement de silicium à l'état fondu |
-
2006
- 2006-10-04 TW TW095136861A patent/TWI400369B/zh not_active IP Right Cessation
- 2006-10-06 RU RU2008117093/05A patent/RU2401889C2/ru not_active IP Right Cessation
- 2006-10-06 AT AT06806079T patent/ATE439461T1/de active
- 2006-10-06 CN CN2006800369429A patent/CN101278078B/zh not_active Expired - Fee Related
- 2006-10-06 ZA ZA200803754A patent/ZA200803754B/xx unknown
- 2006-10-06 PL PL06806079T patent/PL1954856T3/pl unknown
- 2006-10-06 UA UAA200805915A patent/UA89284C2/ru unknown
- 2006-10-06 CA CA2624887A patent/CA2624887C/en active Active
- 2006-10-06 ES ES06806079T patent/ES2327570T3/es active Active
- 2006-10-06 AU AU2006298957A patent/AU2006298957B2/en not_active Ceased
- 2006-10-06 EP EP06806079A patent/EP1954856B1/en not_active Not-in-force
- 2006-10-06 US US12/089,147 patent/US8298333B2/en not_active Expired - Fee Related
- 2006-10-06 WO PCT/EP2006/009671 patent/WO2007039310A1/en not_active Ceased
- 2006-10-06 DE DE602006008498T patent/DE602006008498D1/de active Active
- 2006-10-06 KR KR1020087007304A patent/KR101212924B1/ko not_active Expired - Fee Related
- 2006-10-06 BR BRPI0616485-4A patent/BRPI0616485A2/pt not_active IP Right Cessation
- 2006-10-06 JP JP2008533944A patent/JP4917607B2/ja not_active Expired - Fee Related
-
2008
- 2008-05-05 NO NO20082102A patent/NO20082102L/no not_active Application Discontinuation
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| US4218418A (en) * | 1978-06-22 | 1980-08-19 | Crystal Systems, Inc. | Processes of casting an ingot and making a silica container |
| US4741925A (en) * | 1987-09-14 | 1988-05-03 | Gte Products Corporation | Method of forming silicon nitride coating |
| US6165425A (en) * | 1997-02-06 | 2000-12-26 | Bayer Aktiengesellschaft | Melting pot with silicon protective layers, method for applying said layer and the use thereof |
| WO2004053207A1 (en) * | 2002-12-06 | 2004-06-24 | Vesuvius France S.A. | Vessel for holding silicon and method of producing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| NO20082102L (no) | 2008-05-05 |
| CA2624887A1 (en) | 2007-04-12 |
| EP1954856A1 (en) | 2008-08-13 |
| RU2008117093A (ru) | 2009-11-20 |
| CA2624887C (en) | 2013-07-09 |
| ES2327570T3 (es) | 2009-10-30 |
| CN101278078B (zh) | 2011-01-19 |
| TWI400369B (zh) | 2013-07-01 |
| RU2401889C2 (ru) | 2010-10-20 |
| US8298333B2 (en) | 2012-10-30 |
| KR20080051144A (ko) | 2008-06-10 |
| WO2007039310A1 (en) | 2007-04-12 |
| ZA200803754B (en) | 2009-09-30 |
| TW200720496A (en) | 2007-06-01 |
| ATE439461T1 (de) | 2009-08-15 |
| EP1954856B1 (en) | 2009-08-12 |
| DE602006008498D1 (de) | 2009-09-24 |
| US20080260608A1 (en) | 2008-10-23 |
| BRPI0616485A2 (pt) | 2012-12-25 |
| KR101212924B1 (ko) | 2012-12-14 |
| UA89284C2 (ru) | 2010-01-11 |
| JP4917607B2 (ja) | 2012-04-18 |
| PL1954856T3 (pl) | 2010-01-29 |
| CN101278078A (zh) | 2008-10-01 |
| AU2006298957A1 (en) | 2007-04-12 |
| JP2009510387A (ja) | 2009-03-12 |
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