FR3010716B1 - Substrat pour la solidification de lingot de silicium - Google Patents

Substrat pour la solidification de lingot de silicium

Info

Publication number
FR3010716B1
FR3010716B1 FR1358904A FR1358904A FR3010716B1 FR 3010716 B1 FR3010716 B1 FR 3010716B1 FR 1358904 A FR1358904 A FR 1358904A FR 1358904 A FR1358904 A FR 1358904A FR 3010716 B1 FR3010716 B1 FR 3010716B1
Authority
FR
France
Prior art keywords
solidification
substrate
silicon ingot
ingot
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1358904A
Other languages
English (en)
Other versions
FR3010716A1 (fr
Inventor
Jean-Paul Garandet
Denis Camel
Beatrice Drevet
Nicolas Eustathopoulos
Charles Huguet
Johann Testard
Rayisa Voytovych
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1358904A priority Critical patent/FR3010716B1/fr
Priority to CN201480050809.3A priority patent/CN105705476A/zh
Priority to EP14789884.5A priority patent/EP3046896A1/fr
Priority to US15/022,440 priority patent/US10023972B2/en
Priority to PCT/IB2014/064473 priority patent/WO2015036975A1/fr
Priority to KR1020167009684A priority patent/KR20160057435A/ko
Publication of FR3010716A1 publication Critical patent/FR3010716A1/fr
Application granted granted Critical
Publication of FR3010716B1 publication Critical patent/FR3010716B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/002Crucibles or containers for supporting the melt
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/50Multilayers
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/02Silicon
    • C01B33/021Preparation
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81Coating or impregnation
    • C04B41/89Coating or impregnation for obtaining at least two superposed coatings having different compositions
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/06Silicon
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002Crucibles or containers
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474Uses not provided for elsewhere in C04B2111/00
    • C04B2111/0087Uses not provided for elsewhere in C04B2111/00 for metallurgical applications
    • C04B2111/00879Non-ferrous metallurgy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Manufacturing & Machinery (AREA)
  • Dispersion Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Chemical Kinetics & Catalysis (AREA)
FR1358904A 2013-09-16 2013-09-16 Substrat pour la solidification de lingot de silicium Expired - Fee Related FR3010716B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR1358904A FR3010716B1 (fr) 2013-09-16 2013-09-16 Substrat pour la solidification de lingot de silicium
CN201480050809.3A CN105705476A (zh) 2013-09-16 2014-09-12 用于固化硅锭的衬底
EP14789884.5A EP3046896A1 (fr) 2013-09-16 2014-09-12 Substrat pour la solidification de lingot de silicium
US15/022,440 US10023972B2 (en) 2013-09-16 2014-09-12 Substrate for solidifying a silicon ingot
PCT/IB2014/064473 WO2015036975A1 (fr) 2013-09-16 2014-09-12 Substrat pour la solidification de lingot de silicium
KR1020167009684A KR20160057435A (ko) 2013-09-16 2014-09-12 실리콘 잉곳 고화용 기재

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1358904A FR3010716B1 (fr) 2013-09-16 2013-09-16 Substrat pour la solidification de lingot de silicium

Publications (2)

Publication Number Publication Date
FR3010716A1 FR3010716A1 (fr) 2015-03-20
FR3010716B1 true FR3010716B1 (fr) 2015-10-09

Family

ID=49911643

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1358904A Expired - Fee Related FR3010716B1 (fr) 2013-09-16 2013-09-16 Substrat pour la solidification de lingot de silicium

Country Status (6)

Country Link
US (1) US10023972B2 (fr)
EP (1) EP3046896A1 (fr)
KR (1) KR20160057435A (fr)
CN (1) CN105705476A (fr)
FR (1) FR3010716B1 (fr)
WO (1) WO2015036975A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105112996A (zh) * 2015-08-28 2015-12-02 常州天合光能有限公司 一种制备高效铸锭多晶硅的方法及专用单晶硅片
DE102019206489A1 (de) * 2019-05-06 2020-11-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Tiegel zur Herstellung von partikel- und stickstoff-freien Silicium-Ingots mittels gerichteter Erstarrung, Silicium-Ingot und die Verwendung des Tiegels

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02167067A (ja) * 1988-12-21 1990-06-27 Kirin Brewery Co Ltd シート状培地
ATE398196T1 (de) * 2004-04-29 2008-07-15 Vesuvius Crucible Co Tiegel für die kristallisation von silicium
NO326797B1 (no) * 2005-06-10 2009-02-16 Elkem As Fremgangsmate og apparat for raffinering av smeltet materiale
TWI400369B (zh) 2005-10-06 2013-07-01 Vesuvius Crucible Co 用於矽結晶的坩堝及其製造方法

Also Published As

Publication number Publication date
FR3010716A1 (fr) 2015-03-20
EP3046896A1 (fr) 2016-07-27
KR20160057435A (ko) 2016-05-23
US10023972B2 (en) 2018-07-17
CN105705476A (zh) 2016-06-22
WO2015036975A1 (fr) 2015-03-19
US20160230305A1 (en) 2016-08-11

Similar Documents

Publication Publication Date Title
FR3007028B1 (fr) Barriere environnementale pour substrat refractaire contenant du silicium
FR2964117B1 (fr) Creuset pour la solidification de lingot de silicium
EP2839341A4 (fr) Couche de masque dur de silicium pour autoassemblage dirigé
EP3062337A4 (fr) Composition liquide de polissage pour tranches de silicium
GB2514918B (en) Nitride semiconductor substrate
EP3010037A4 (fr) Procédé de fabrication de dispositif à semi-conducteurs au carbure de silicium
DK3010852T3 (da) Fremgangsmåde til fremstilling af elementære selennanopartikler
EP2983198A4 (fr) Procédé de fabrication d'un dispositif à semi-conducteurs en carbure de silicium
FR3007052B1 (fr) Dispositif support de type plot pour la construction de terrasses.
FR3003686B1 (fr) Procede de formation d'une couche de silicium contraint
EP2947694A4 (fr) Dispositif semi-conducteur au carbure de silicium
DE102012200326A8 (de) Siliziumkarbid-Halbleitereinrichtung
SG10201404749QA (en) Adhesion layer for through silicon via metallization
FR2989082B1 (fr) Adjuvant pour compositions hydrauliques
DK3057595T3 (da) Smeltebenzazepiner til behandling af stammen
FR2986228B1 (fr) Creuset pour la solidification de lingot de silicium.
EP2905806A4 (fr) Procédé de fabrication de dispositif à semi-conducteurs au carbure de silicium
FR2993095B1 (fr) Detachement d’une couche autoportee de silicium <100>
PL2959329T3 (pl) Lustro z warstwą odblaskową z lub zawierającą krzem i aluminium
FR3010716B1 (fr) Substrat pour la solidification de lingot de silicium
FR3010715B1 (fr) Substrat a revetement peu permeable pour solidification de silicium
GB201315727D0 (en) Coated silicon wafer
FR3010859B1 (fr) Installation, notamment pour la germination de vegetaux
FR3007036B1 (fr) Composition utile pour l'elimination d'etiquettes
FR3011542B1 (fr) Procede pour la desoxydation du silicium

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 4

PLFP Fee payment

Year of fee payment: 5

PLFP Fee payment

Year of fee payment: 6

ST Notification of lapse

Effective date: 20200910