AU2003268097A1 - Reflective x-ray microscope and inspection system for examining objects with wavelengths ofd 100nm - Google Patents

Reflective x-ray microscope and inspection system for examining objects with wavelengths ofd 100nm

Info

Publication number
AU2003268097A1
AU2003268097A1 AU2003268097A AU2003268097A AU2003268097A1 AU 2003268097 A1 AU2003268097 A1 AU 2003268097A1 AU 2003268097 A AU2003268097 A AU 2003268097A AU 2003268097 A AU2003268097 A AU 2003268097A AU 2003268097 A1 AU2003268097 A1 AU 2003268097A1
Authority
AU
Australia
Prior art keywords
wavelengths
inspection system
ofd
reflective
ray microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003268097A
Other languages
English (en)
Other versions
AU2003268097A8 (en
Inventor
Udo Dinger
Thomas Engel
Wolfgang Harnisch
Hans-Jurgen Mann
Dieter Pauschinger
Wolfgang Reinecke
Wilhelm Ulrich
Marco Wedowski
Axel Zibold
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Microelectronic Systems GmbH
Carl Zeiss SMS GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10220815A external-priority patent/DE10220815A1/de
Priority claimed from DE10220816A external-priority patent/DE10220816A1/de
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Publication of AU2003268097A8 publication Critical patent/AU2003268097A8/xx
Publication of AU2003268097A1 publication Critical patent/AU2003268097A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G21K1/062—Devices having a multilayer structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Lenses (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
AU2003268097A 2002-05-10 2003-05-08 Reflective x-ray microscope and inspection system for examining objects with wavelengths ofd 100nm Abandoned AU2003268097A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE10220815.8 2002-05-10
DE10220815A DE10220815A1 (de) 2002-05-10 2002-05-10 Reflektives Röntgenmikroskop und Inspektionssystem zur Untersuchung von Objekten mit Wellenlängen 100 nm
DE10220816A DE10220816A1 (de) 2002-05-10 2002-05-10 Reflektives Röntgenmikroskop und Inspektionssystem zur Untersuchung von Objekten mit Wellenlängen 100 nm
DE10220816.6 2002-05-10
PCT/EP2003/004803 WO2003096356A2 (de) 2002-05-10 2003-05-08 Reflektives röntgenmikroskop und inspektionssystem zur untersuchung von objekten mit wellenlängen ≤ 100nm

Publications (2)

Publication Number Publication Date
AU2003268097A8 AU2003268097A8 (en) 2003-11-11
AU2003268097A1 true AU2003268097A1 (en) 2003-11-11

Family

ID=29421498

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003268097A Abandoned AU2003268097A1 (en) 2002-05-10 2003-05-08 Reflective x-ray microscope and inspection system for examining objects with wavelengths ofd 100nm

Country Status (7)

Country Link
US (1) US7623620B2 (enExample)
EP (2) EP1446813B1 (enExample)
JP (2) JP4639352B2 (enExample)
AT (1) ATE488013T1 (enExample)
AU (1) AU2003268097A1 (enExample)
DE (1) DE50313254D1 (enExample)
WO (1) WO2003096356A2 (enExample)

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WO2007020004A1 (de) * 2005-08-17 2007-02-22 Carl Zeiss Smt Ag Projektionsobjektiv und verfahren zur optimierung einer systemblende eines projektionsobjektivs
US7564564B2 (en) * 2006-08-22 2009-07-21 Artium Technologies, Inc. Automatic set-up for instrument functions
DE102006044202A1 (de) * 2006-09-15 2008-05-21 Fahrzeugwerk Bernard Krone Gmbh Dolly-Achse
US20080144167A1 (en) * 2006-12-13 2008-06-19 General Electric Company Optical imaging system and method for high speed and high resolution
DE102007062198A1 (de) 2007-12-21 2009-06-25 Carl Zeiss Microimaging Gmbh Katoptrisches Objektiv zur Abbildung eines im Wesentlichen linienförmigen Objektes
DE102008015996A1 (de) * 2008-03-27 2009-10-01 Carl Zeiss Sms Gmbh Mikroskop und Mikroskopierverfahren zur Untersuchung eines reflektierenden Objektes
KR101535230B1 (ko) * 2009-06-03 2015-07-09 삼성전자주식회사 Ｅｕｖ 마스크용 공간 영상 측정 장치 및 방법
JP6211270B2 (ja) * 2009-06-19 2017-10-11 ケーエルエー−テンカー・コーポレーションＫｌａ−Ｔｅｎｃｏｒ Ｃｏｒｐｏｒａｔｉｏｎ 極紫外線マスクブランクの欠陥検出のための検査システム及び方法
WO2010148293A2 (en) 2009-06-19 2010-12-23 Kla-Tencor Corporation Euv high throughput inspection system for defect detection on patterned euv masks, mask blanks, and wafers
NL2004949A (en) * 2009-08-21 2011-02-22 Asml Netherlands Bv Inspection method and apparatus.
DE102010009022B4 (de) 2010-02-22 2019-10-24 Carl Zeiss Smt Gmbh Beleuchtungssystem sowie Projektionsobjektiv einer Maskeninspektionsanlage
DE102010029049B4 (de) 2010-05-18 2014-03-13 Carl Zeiss Smt Gmbh Beleuchtungsoptik für ein Metrologiesystem für die Untersuchung eines Objekts mit EUV-Beleuchtungslicht sowie Metrologiesystem mit einer derartigen Beleuchtungsoptik
DE102010025033B4 (de) * 2010-06-23 2021-02-11 Carl Zeiss Smt Gmbh Verfahren zur Defekterkennung und Reparatur von EUV-Masken
DE102010047050B4 (de) 2010-09-29 2021-09-16 Carl Zeiss Smt Gmbh Verfahren zur Charakterisierung einer Struktur auf einer Maske und Vorrichtung zur Durchführung des Verfahrens
US8837041B2 (en) * 2010-11-23 2014-09-16 Carl Zeiss Smt Gmbh Magnifying imaging optical system and metrology system with an imaging optical system of this type
JP4761588B1 (ja) * 2010-12-01 2011-08-31 レーザーテック株式会社 Ｅｕｖマスク検査装置
US8842272B2 (en) 2011-01-11 2014-09-23 Kla-Tencor Corporation Apparatus for EUV imaging and methods of using same
DE102011003302A1 (de) 2011-01-28 2012-08-02 Carl Zeiss Smt Gmbh Vergrößerte abbildende Optik sowie Metrologiesystem mit einer derartigen abbildenden Optik
DE102011005881A1 (de) 2011-03-22 2012-05-03 Carl Zeiss Smt Gmbh Verfahren zur Einstellung eines Beleuchtungssystems einer Projektionsbelichtungsanlage für die Projektionslithographie
DE102011079382B4 (de) 2011-07-19 2020-11-12 Carl Zeiss Smt Gmbh Verfahren und Vorrichtung zum Analysieren und zum Beseitigen eines Defekts einer EUV Maske
DE102013204445A1 (de) * 2013-03-14 2014-09-18 Carl Zeiss Smt Gmbh Vergrößernde abbildende Optik sowie EUV-Maskeninspektionssystem mit einer derartigen abbildenden Optik
DE102013212613B4 (de) 2013-06-28 2015-07-23 Carl Zeiss Sms Gmbh Beleuchtungsoptik für ein Metrologiesystem sowie Metrologiesystem mit einer derartigen Beleuchtungsoptik
DE102014219755A1 (de) 2013-10-30 2015-04-30 Carl Zeiss Smt Gmbh Reflektives optisches Element
CN106030405B (zh) * 2014-02-21 2020-11-03 保罗·谢勒学院 使用相干衍射成像方法以及使用微型小孔和孔系统的反射模式的成像系统
EP3518041A1 (en) * 2018-01-30 2019-07-31 ASML Netherlands B.V. Inspection apparatus and inspection method
JP2020173296A (ja) * 2019-04-08 2020-10-22 株式会社ニューフレアテクノロジー Ｅｕｖマスクのパターン検査装置及びｅｕｖマスクのパターン検査方法
JP7484078B2 (ja) * 2019-05-10 2024-05-16 日亜化学工業株式会社 画像表示装置の製造方法および画像表示装置
DE102023204172A1 (de) * 2023-05-05 2024-11-07 Carl Zeiss Smt Gmbh Optisches System für ein Metrologiesystem sowie Metrologiesystem mit einem derartigen optischen System
DE102023129681A1 (de) * 2023-10-27 2025-04-30 Carl Zeiss Smt Gmbh Verfahren und Steuervorrichtung zum Analysieren eines Bildes eines Rohlings einer Photomaske für die Mikrolithographie
DE102024203890A1 (de) 2024-04-25 2025-10-30 Carl Zeiss Smt Gmbh Verfahren zur hochgenauen Lagebestimmung einer Struktur

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JPS612124A (ja) * 1984-06-14 1986-01-08 Canon Inc 結像光学系
JP2603225B2 (ja) * 1986-07-11 1997-04-23 キヤノン株式会社 Ｘ線投影露光装置及び半導体製造方法
EP0252734B1 (en) * 1986-07-11 2000-05-03 Canon Kabushiki Kaisha X-ray reduction projection exposure system of reflection type
US4912737A (en) 1987-10-30 1990-03-27 Hamamatsu Photonics K.K. X-ray image observing device
JPH02210299A (ja) * 1989-02-10 1990-08-21 Olympus Optical Co Ltd Ｘ線用光学系及びそれに用いる多層膜反射鏡
JPH0782117B2 (ja) * 1989-02-23 1995-09-06 オリンパス光学工業株式会社 反射型結像光学系
JP2865257B2 (ja) * 1989-03-07 1999-03-08 オリンパス光学工業株式会社 シュヴアルツシルド光学系
US5063586A (en) * 1989-10-13 1991-11-05 At&T Bell Laboratories Apparatus for semiconductor lithography
JP2945431B2 (ja) * 1990-03-01 1999-09-06 オリンパス光学工業株式会社 結像型ｘ線顕微鏡
JP2921038B2 (ja) 1990-06-01 1999-07-19 キヤノン株式会社 Ｘ線を用いた観察装置
DE4027285A1 (de) * 1990-08-29 1992-03-05 Zeiss Carl Fa Roentgenmikroskop
US5291339A (en) * 1990-11-30 1994-03-01 Olympus Optical Co., Ltd. Schwarzschild optical system
JPH04321047A (ja) 1991-01-21 1992-11-11 Nikon Corp フォトマスク検査装置及びフォトマスク検査方法
JPH04353800A (ja) * 1991-05-31 1992-12-08 Olympus Optical Co Ltd 軟ｘ線顕微鏡
US5177774A (en) * 1991-08-23 1993-01-05 Trustees Of Princeton University Reflection soft X-ray microscope and method
JPH06237016A (ja) * 1993-02-09 1994-08-23 Matsushita Electric Ind Co Ltd 光ファイバモジュールおよびその製造方法
JPH0728226A (ja) 1993-04-30 1995-01-31 Internatl Business Mach Corp <Ibm> 領域的イメージを測定する装置及び方法
JP3336361B2 (ja) * 1993-06-11 2002-10-21 株式会社ニコン 縮小投影露光用反射型ｘ線マスクの検査装置および検査方法
US6438199B1 (en) 1998-05-05 2002-08-20 Carl-Zeiss-Stiftung Illumination system particularly for microlithography
DE19923609A1 (de) * 1998-05-30 1999-12-02 Zeiss Carl Fa Ringfeld-4-Spiegelsysteme mit konvexem Primärspiegel für die EUV-Lithographie
US6328482B1 (en) * 1998-06-08 2001-12-11 Benjamin Bin Jian Multilayer optical fiber coupler
JP4374735B2 (ja) * 1999-08-11 2009-12-02 株式会社ニコン 反射型軟ｘ線顕微鏡、マスク検査装置及び反射マスクの製造方法
EP1126477A3 (de) * 2000-02-14 2003-06-18 Leica Microsystems Lithography GmbH Verfahren zur Untersuchung von Strukturen auf einem Halbleiter-Substrat
JP2002329473A (ja) * 2001-02-27 2002-11-15 Jeol Ltd Ｘ線分光器を備えた透過型電子顕微鏡
DE10319269A1 (de) * 2003-04-25 2004-11-25 Carl Zeiss Sms Gmbh Abbildungssystem für ein, auf extrem ultravioletter (EUV) Strahlung basierendem Mikroskop

Also Published As

Publication number Publication date
US7623620B2 (en) 2009-11-24
EP1455365A2 (de) 2004-09-08
EP1455365A3 (de) 2014-12-17
ATE488013T1 (de) 2010-11-15
EP1446813A2 (de) 2004-08-18
US20050201514A1 (en) 2005-09-15
WO2003096356A3 (de) 2004-05-21
JP2005525565A (ja) 2005-08-25
WO2003096356A2 (de) 2003-11-20
EP1446813B1 (de) 2010-11-10
AU2003268097A8 (en) 2003-11-11
JP4639352B2 (ja) 2011-02-23
DE50313254D1 (de) 2010-12-23
JP2010032542A (ja) 2010-02-12

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase
TH Corrigenda

Free format text: IN VOL 18, NO 2, PAGE(S) 492 UNDER THE HEADING APPLICATIONS OPI - NAME INDEX UNDER THE NAME CARL ZEISS SMS GMBH, APPLICATION NO. 20032680971, UNDER INID (43) CORRECT THE PUBLICATION DATE TO READ 24.11.2003.