AU2003227236A1 - Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system - Google Patents

Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system

Info

Publication number
AU2003227236A1
AU2003227236A1 AU2003227236A AU2003227236A AU2003227236A1 AU 2003227236 A1 AU2003227236 A1 AU 2003227236A1 AU 2003227236 A AU2003227236 A AU 2003227236A AU 2003227236 A AU2003227236 A AU 2003227236A AU 2003227236 A1 AU2003227236 A1 AU 2003227236A1
Authority
AU
Australia
Prior art keywords
processing system
plasma processing
component
suppressing charging
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003227236A
Other languages
English (en)
Inventor
Katsuyuki Koizumi
Kouki Suzuki
Takehiro Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2003227236A1 publication Critical patent/AU2003227236A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0203—Protection arrangements
    • H01J2237/0206—Extinguishing, preventing or controlling unwanted discharges

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Plasma Technology (AREA)
AU2003227236A 2002-04-11 2003-03-27 Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system Abandoned AU2003227236A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002-109189 2002-04-11
JP2002109189A JP4115155B2 (ja) 2002-04-11 2002-04-11 プラズマ処理装置の真空処理室内部品の帯電抑制方法
PCT/JP2003/003770 WO2003085715A1 (en) 2002-04-11 2003-03-27 Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system

Publications (1)

Publication Number Publication Date
AU2003227236A1 true AU2003227236A1 (en) 2003-10-20

Family

ID=28786567

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003227236A Abandoned AU2003227236A1 (en) 2002-04-11 2003-03-27 Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system

Country Status (5)

Country Link
US (1) US7592261B2 (enExample)
JP (1) JP4115155B2 (enExample)
AU (1) AU2003227236A1 (enExample)
TW (1) TWI287261B (enExample)
WO (1) WO2003085715A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4574174B2 (ja) * 2004-01-14 2010-11-04 株式会社日立ハイテクノロジーズ プラズマ処理装置及び電極
JP4527431B2 (ja) * 2004-04-08 2010-08-18 東京エレクトロン株式会社 プラズマ処理装置
USD553104S1 (en) 2004-04-21 2007-10-16 Tokyo Electron Limited Absorption board for an electric chuck used in semiconductor manufacture
JP5103049B2 (ja) * 2007-04-04 2012-12-19 株式会社日立ハイテクノロジーズ ウエハ載置用電極
KR101232901B1 (ko) 2010-12-08 2013-02-13 엘아이지에이디피 주식회사 플라즈마처리장치
US10069443B2 (en) * 2011-12-20 2018-09-04 Tokyo Electron Limited Dechuck control method and plasma processing apparatus
US20150228524A1 (en) * 2014-02-12 2015-08-13 Varian Semiconductor Equipment Associates, Inc. Plasma resistant electrostatic clamp
KR102759821B1 (ko) * 2019-01-30 2025-01-23 어플라이드 머티어리얼스, 인코포레이티드 진공 시스템을 세정하기 위한 방법, 기판의 진공 프로세싱을 위한 방법, 및 기판을 진공 프로세싱하기 위한 장치
TWI844352B (zh) * 2023-05-03 2024-06-01 劉華煒 半導體製程真空腔之靜電吸盤快速排氣結構

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0156244B1 (ko) 1989-04-18 1998-12-01 고다까 토시오 플라즈마 처리방법
US5625526A (en) * 1993-06-01 1997-04-29 Tokyo Electron Limited Electrostatic chuck
US6224312B1 (en) * 1996-11-18 2001-05-01 Applied Materials, Inc. Optimal trajectory robot motion
JP4112659B2 (ja) * 1997-12-01 2008-07-02 大陽日酸株式会社 希ガスの回収方法及び装置
EP1073777A2 (en) * 1998-04-14 2001-02-07 CVD Systems, Inc. Film deposition system
US6081414A (en) * 1998-05-01 2000-06-27 Applied Materials, Inc. Apparatus for improved biasing and retaining of a workpiece in a workpiece processing system
JP4060941B2 (ja) 1998-05-26 2008-03-12 東京エレクトロン株式会社 プラズマ処理方法
JP3323135B2 (ja) * 1998-08-31 2002-09-09 京セラ株式会社 静電チャック
KR100307628B1 (ko) * 1999-04-03 2001-10-29 윤종용 반도체 제조설비의 청정방법 및 이를 적용한 반도체 제조 설비
JP4547744B2 (ja) 1999-11-17 2010-09-22 東京エレクトロン株式会社 プリコート膜の形成方法、成膜装置のアイドリング方法、載置台構造及び成膜装置
JP4590031B2 (ja) 2000-07-26 2010-12-01 東京エレクトロン株式会社 被処理体の載置機構

Also Published As

Publication number Publication date
JP4115155B2 (ja) 2008-07-09
JP2003303813A (ja) 2003-10-24
US20050146277A1 (en) 2005-07-07
TW200306626A (en) 2003-11-16
WO2003085715A1 (en) 2003-10-16
TWI287261B (en) 2007-09-21
US7592261B2 (en) 2009-09-22

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase