AU2002212648A1 - Method and apparatus for multi-beam laser machining - Google Patents

Method and apparatus for multi-beam laser machining

Info

Publication number
AU2002212648A1
AU2002212648A1 AU2002212648A AU1264802A AU2002212648A1 AU 2002212648 A1 AU2002212648 A1 AU 2002212648A1 AU 2002212648 A AU2002212648 A AU 2002212648A AU 1264802 A AU1264802 A AU 1264802A AU 2002212648 A1 AU2002212648 A1 AU 2002212648A1
Authority
AU
Australia
Prior art keywords
array
elements
light
light modulator
microlens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002212648A
Other languages
English (en)
Inventor
Vladimir Yu. Dmitriev
Nicolai N. Guletsky
Sergei V. Oshemkov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
U-C-Laser Ltd
Original Assignee
U-C-Laser Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by U-C-Laser Ltd filed Critical U-C-Laser Ltd
Publication of AU2002212648A1 publication Critical patent/AU2002212648A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
AU2002212648A 2000-10-23 2001-10-22 Method and apparatus for multi-beam laser machining Abandoned AU2002212648A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/694,429 US6625181B1 (en) 2000-10-23 2000-10-23 Method and apparatus for multi-beam laser machining
US09/694,429 2000-10-23
PCT/IL2001/000969 WO2002034446A2 (fr) 2000-10-23 2001-10-22 Procede et dispositif pour usinage laser a faisceaux multiples

Publications (1)

Publication Number Publication Date
AU2002212648A1 true AU2002212648A1 (en) 2002-05-06

Family

ID=24788787

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002212648A Abandoned AU2002212648A1 (en) 2000-10-23 2001-10-22 Method and apparatus for multi-beam laser machining

Country Status (7)

Country Link
US (1) US6625181B1 (fr)
EP (1) EP1345726B1 (fr)
AT (1) ATE444136T1 (fr)
AU (1) AU2002212648A1 (fr)
CA (1) CA2425875A1 (fr)
DE (1) DE60140077D1 (fr)
WO (1) WO2002034446A2 (fr)

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US8675699B2 (en) 2009-01-23 2014-03-18 Board Of Trustees Of Michigan State University Laser pulse synthesis system
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JP5495043B2 (ja) * 2010-04-23 2014-05-21 株式会社ブイ・テクノロジー レーザアニール方法、装置及びマイクロレンズアレイ
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CN105143987B (zh) 2013-03-12 2017-10-20 麦克罗尼克迈达塔有限责任公司 机械制造的对准基准方法和对准系统
WO2014140047A2 (fr) 2013-03-12 2014-09-18 Micronic Mydata AB Procédé et dispositif d'écriture de masques photographiques avec réduction des erreurs mura
JP6043228B2 (ja) * 2013-04-05 2016-12-14 浜松ホトニクス株式会社 光学モジュールおよび光照射装置
JP6014537B2 (ja) 2013-04-05 2016-10-25 浜松ホトニクス株式会社 光学モジュールおよび観察装置
JP6014538B2 (ja) 2013-04-05 2016-10-25 浜松ホトニクス株式会社 光学モジュール、光観察装置、及び光照射装置
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CN106495454A (zh) * 2016-12-19 2017-03-15 华南师范大学 皮秒激光玻璃焊接系统及方法
DE102017200170A1 (de) 2017-01-09 2018-07-12 Robert Bosch Gmbh Vorrichtung und Verfahren zur Formung eines Laserstrahls durch einen programmierbaren Strahlformer
EP3639297A4 (fr) 2017-06-12 2021-01-20 Uniqarta, Inc. Assemblage parallèle de composants discrets sur un substrat
WO2019179604A1 (fr) 2018-03-20 2019-09-26 Robert Bosch Gmbh Dispositif et procédé servant à former un faisceau laser par un système de formation de faisceaux programmable
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EP4079446A1 (fr) * 2021-04-19 2022-10-26 Akzenta Paneele + Profile GmbH Procédé de fabrication d'un panneau décoratif à structuration améliorée
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Also Published As

Publication number Publication date
EP1345726B1 (fr) 2009-09-30
WO2002034446A2 (fr) 2002-05-02
EP1345726A2 (fr) 2003-09-24
DE60140077D1 (de) 2009-11-12
US6625181B1 (en) 2003-09-23
ATE444136T1 (de) 2009-10-15
EP1345726A4 (fr) 2008-01-30
CA2425875A1 (fr) 2002-05-02
WO2002034446A3 (fr) 2003-02-06

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