ATE444136T1 - Vorrichtung zur mehrstrahllaserbearbeitung - Google Patents

Vorrichtung zur mehrstrahllaserbearbeitung

Info

Publication number
ATE444136T1
ATE444136T1 AT01980864T AT01980864T ATE444136T1 AT E444136 T1 ATE444136 T1 AT E444136T1 AT 01980864 T AT01980864 T AT 01980864T AT 01980864 T AT01980864 T AT 01980864T AT E444136 T1 ATE444136 T1 AT E444136T1
Authority
AT
Austria
Prior art keywords
array
elements
light
light modulator
microlens
Prior art date
Application number
AT01980864T
Other languages
English (en)
Inventor
Sergei Oshemkov
Vladimir Dmitriev
Nicolai Guletsky
Original Assignee
Pixer Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pixer Technology Ltd filed Critical Pixer Technology Ltd
Application granted granted Critical
Publication of ATE444136T1 publication Critical patent/ATE444136T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Laser Surgery Devices (AREA)
AT01980864T 2000-10-23 2001-10-22 Vorrichtung zur mehrstrahllaserbearbeitung ATE444136T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/694,429 US6625181B1 (en) 2000-10-23 2000-10-23 Method and apparatus for multi-beam laser machining
PCT/IL2001/000969 WO2002034446A2 (en) 2000-10-23 2001-10-22 Method and apparatus for multi-beam laser machining

Publications (1)

Publication Number Publication Date
ATE444136T1 true ATE444136T1 (de) 2009-10-15

Family

ID=24788787

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01980864T ATE444136T1 (de) 2000-10-23 2001-10-22 Vorrichtung zur mehrstrahllaserbearbeitung

Country Status (7)

Country Link
US (1) US6625181B1 (de)
EP (1) EP1345726B1 (de)
AT (1) ATE444136T1 (de)
AU (1) AU2002212648A1 (de)
CA (1) CA2425875A1 (de)
DE (1) DE60140077D1 (de)
WO (1) WO2002034446A2 (de)

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JP6043228B2 (ja) * 2013-04-05 2016-12-14 浜松ホトニクス株式会社 光学モジュールおよび光照射装置
JP6014538B2 (ja) 2013-04-05 2016-10-25 浜松ホトニクス株式会社 光学モジュール、光観察装置、及び光照射装置
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CN109483067B (zh) * 2018-12-04 2020-10-02 淄博职业学院 一种计算机控制式激光加工装置及其加工方法
CN110732771A (zh) * 2019-11-06 2020-01-31 西安中科微精光子制造科技有限公司 一种动态可控激光分束装置
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JP7547105B2 (ja) * 2020-07-29 2024-09-09 株式会社ディスコ Ｓｉ基板生成方法
EP4079446B1 (de) * 2021-04-19 2024-09-11 Akzenta Paneele + Profile GmbH Verfahren zum herstellen eines dekorpaneels mit verbesserter strukturierung
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Also Published As

Publication number Publication date
CA2425875A1 (en) 2002-05-02
DE60140077D1 (de) 2009-11-12
WO2002034446A2 (en) 2002-05-02
AU2002212648A1 (en) 2002-05-06
WO2002034446A3 (en) 2003-02-06
EP1345726A2 (de) 2003-09-24
EP1345726B1 (de) 2009-09-30
EP1345726A4 (de) 2008-01-30
US6625181B1 (en) 2003-09-23

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