AU2001282547A1 - Method of forming optical thin film and optical element provided with optical thin film - Google Patents

Method of forming optical thin film and optical element provided with optical thin film

Info

Publication number
AU2001282547A1
AU2001282547A1 AU2001282547A AU8254701A AU2001282547A1 AU 2001282547 A1 AU2001282547 A1 AU 2001282547A1 AU 2001282547 A AU2001282547 A AU 2001282547A AU 8254701 A AU8254701 A AU 8254701A AU 2001282547 A1 AU2001282547 A1 AU 2001282547A1
Authority
AU
Australia
Prior art keywords
thin film
optical thin
optical
element provided
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001282547A
Other languages
English (en)
Inventor
Hitoshi Ishizawa
Tsuyoshi Murata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of AU2001282547A1 publication Critical patent/AU2001282547A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
    • C03C17/007—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character containing a dispersed phase, e.g. particles, fibres or flakes, in a continuous phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
    • G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/213—SiO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/28—Other inorganic materials
    • C03C2217/284—Halides
    • C03C2217/285—Fluorides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/40—Coatings comprising at least one inhomogeneous layer
    • C03C2217/425—Coatings comprising at least one inhomogeneous layer consisting of a porous layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C03C2218/113—Deposition methods from solutions or suspensions by sol-gel processes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/365—Coating different sides of a glass substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Organic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Composite Materials (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Optical Integrated Circuits (AREA)
AU2001282547A 2000-08-30 2001-08-30 Method of forming optical thin film and optical element provided with optical thin film Abandoned AU2001282547A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000260248 2000-08-30
JP2000-260248 2000-08-30
PCT/JP2001/007457 WO2002018982A1 (fr) 2000-08-30 2001-08-30 Formation d'un film optique mince et element optique dote d'un tel film

Publications (1)

Publication Number Publication Date
AU2001282547A1 true AU2001282547A1 (en) 2002-03-13

Family

ID=18748288

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001282547A Abandoned AU2001282547A1 (en) 2000-08-30 2001-08-30 Method of forming optical thin film and optical element provided with optical thin film

Country Status (6)

Country Link
US (1) US6870602B2 (fr)
EP (1) EP1315005B1 (fr)
JP (1) JP4457557B2 (fr)
AU (1) AU2001282547A1 (fr)
DE (1) DE60130901T2 (fr)
WO (1) WO2002018982A1 (fr)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004302112A (ja) * 2003-03-31 2004-10-28 Nikon Corp 光学薄膜、光学部材、光学系、及び投影露光装置、並びに光学薄膜の製造方法
JP2004302113A (ja) * 2003-03-31 2004-10-28 Nikon Corp 反射防止膜、光学部材、光学系及び投影露光装置、並びに反射防止膜の製造方法
JP2005031361A (ja) * 2003-07-11 2005-02-03 Konica Minolta Opto Inc 光学レンズ及び情報記録再生装置
US8149381B2 (en) 2003-08-26 2012-04-03 Nikon Corporation Optical element and exposure apparatus
US7697111B2 (en) * 2003-08-26 2010-04-13 Nikon Corporation Optical element and exposure apparatus
JP2005114400A (ja) * 2003-10-03 2005-04-28 Nikon Corp 光学特性の計測方法、反射防止膜、光学系及び投影露光装置
US7034923B2 (en) * 2004-01-21 2006-04-25 Asml Netherlands B.V. Optical element, lithographic apparatus comprising such optical element and device manufacturing method
JP5201435B2 (ja) * 2004-03-30 2013-06-05 株式会社ニコン 光学系
JP4433390B2 (ja) * 2004-03-30 2010-03-17 株式会社ニコン 反射防止膜並びにこの反射防止膜を有する光学素子及び光学系
DE102004027842A1 (de) * 2004-06-08 2006-01-12 Institut für Neue Materialien Gemeinnützige GmbH Abrieb- und kratzfeste Beschichtungen mit niedriger Brechzahl auf einem Substrat
KR101294551B1 (ko) * 2004-09-16 2013-08-07 가부시키가이샤 니콘 비정질 산화 규소 바인더를 갖는 ＭｇＦ２ 광학 박막, 및그것을 구비하는 광학 소자, 그리고 그 ＭｇＦ２ 광학박막의 제조 방법
US8049964B2 (en) * 2005-06-14 2011-11-01 Carl Zeiss Smt Gmbh Optical element with an antireflection coating, projection objective, and exposure apparatus comprising such an element
JP2007101799A (ja) * 2005-10-03 2007-04-19 Nippon Sheet Glass Co Ltd 透過型光学素子
JP5127136B2 (ja) * 2005-12-12 2013-01-23 ステラケミファ株式会社 フッ化物微粒子の分散液及びその製造方法
JP2007187994A (ja) * 2006-01-16 2007-07-26 Bridgestone Corp 反射防止膜及び光学フィルター
WO2008001675A1 (fr) 2006-06-27 2008-01-03 Nikon Corporation mince film MULTICOUCHE OPTIQUE, élément optique et procédé de fabrication de mince film multicouche optique
WO2008062817A1 (fr) 2006-11-21 2008-05-29 Nikon Corporation Élément optique et son procédé de fabrication
JP2008270564A (ja) * 2007-04-20 2008-11-06 Canon Inc 露光装置及びデバイス製造方法
US20110003143A1 (en) * 2008-02-25 2011-01-06 Central Glass Company, Limited Organosol Containing Magnesium Fluoride Hydroxide, and Manufacturing Method Therefor
JP5751759B2 (ja) 2009-04-06 2015-07-22 キヤノン株式会社 光学用膜の製造方法
EP2325675A2 (fr) * 2009-07-30 2011-05-25 Canon Kabushiki Kaisha Procédé de production de film optique, film optique et composant optique
JP5777278B2 (ja) * 2009-12-01 2015-09-09 キヤノン株式会社 光学素子の製造方法
JP5340252B2 (ja) 2010-11-17 2013-11-13 キヤノン株式会社 反射防止膜及びその製造方法
US9715043B2 (en) 2011-07-21 2017-07-25 Canon Kabushiki Kaisha Optical member and method of producing the same
JP5878429B2 (ja) * 2012-05-29 2016-03-08 ステラケミファ株式会社 フッ化マグネシウム粒子、フッ化マグネシウム粒子の製造方法、フッ化マグネシウム粒子分散液、フッ化マグネシウム粒子分散液の製造方法、低屈折率層形成用組成物、低屈折率層形成用組成物の製造方法、低屈折率層付基材及び低屈折率層付基材の製造方法
EP2676938A1 (fr) 2012-06-21 2013-12-25 Nanofluor GmbH Sol de fluorure de calcium et revêtements de surface optiquement actifs
EP2708509A1 (fr) 2012-09-18 2014-03-19 Nanofluor GmbH Procédé de préparation de solutions de sol de fluorure de magnésium à partir d'alcoxydes comprenant l'ajout de dioxyde de carbone
EP2708510A1 (fr) 2012-09-18 2014-03-19 Nanofluor GmbH Procédé de préparation de solutions de sol de fluorure de magnésium à partir d'alcoxydes comprenant l'ajout de sels de magnésium
KR20150104133A (ko) * 2012-12-31 2015-09-14 나노플루오르 게엠베하 마그네슘 플루오라이드 졸 및 이의 유도된 광학 활성 표면 코팅
JP2016038537A (ja) * 2014-08-11 2016-03-22 旭硝子株式会社 ワイヤグリッド型偏光子、光源モジュールおよび投射型表示装置
JP7275801B2 (ja) * 2018-04-25 2023-05-18 Ａｇｃ株式会社 ガラス基板
CN115172379A (zh) * 2021-04-21 2022-10-11 长江存储科技有限责任公司 三维存储器及其制备方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2601123A (en) * 1947-04-05 1952-06-17 American Optical Corp Composition for reducing the reflection of light
JPH07107563B2 (ja) * 1986-10-31 1995-11-15 キヤノン株式会社 反射防止膜
JPH07104442B2 (ja) * 1989-04-06 1995-11-13 旭硝子株式会社 フッ化マグネシウム膜及び低反射膜の製造方法
KR920700408A (ko) * 1989-02-23 1992-02-19 원본미기재 MgF₂박막 및 저반사막의 형성 방법
JPH05208811A (ja) * 1992-01-29 1993-08-20 Central Glass Co Ltd フッ化マグネシウムオルガノゾル溶液の製造方法とこの溶液による膜の形成方法
JPH0739747A (ja) * 1993-07-30 1995-02-10 Asahi Glass Co Ltd 超微粒子ゾル
US5518716A (en) * 1994-03-31 1996-05-21 General Electric Company Composition and method of preparing microemulsion blends
JPH07326308A (ja) * 1994-05-30 1995-12-12 Asahi Glass Co Ltd 着色薄膜形成用塗布液およびその塗布液により得られる着色薄膜
JPH09222503A (ja) * 1996-02-19 1997-08-26 Fuji Photo Film Co Ltd 反射防止膜の製造方法および表示装置
US5993898A (en) 1997-05-19 1999-11-30 Nikon Corporation Fabrication method and structure for multilayer optical anti-reflection coating, and optical component and optical system using multilayer optical anti-reflection coating
JP2000034575A (ja) * 1998-03-30 2000-02-02 Minolta Co Ltd 金属酸化物薄膜およびアレイ状金属酸化物機能性素子の製造法
JP3975036B2 (ja) * 1998-09-22 2007-09-12 富士フイルム株式会社 反射防止膜の製造方法
JP3159693B1 (ja) * 1999-08-30 2001-04-23 住友特殊金属株式会社 耐食性被膜を有する希土類系永久磁石の製造方法
JP2001141895A (ja) * 1999-11-09 2001-05-25 Fuji Photo Film Co Ltd 放射線像変換パネル
JP3973330B2 (ja) * 1999-12-10 2007-09-12 触媒化成工業株式会社 透明被膜付基材、透明被膜形成用塗布液、および表示装置

Also Published As

Publication number Publication date
JP4457557B2 (ja) 2010-04-28
WO2002018982A1 (fr) 2002-03-07
DE60130901T2 (de) 2008-08-14
US20020191168A1 (en) 2002-12-19
DE60130901D1 (de) 2007-11-22
US6870602B2 (en) 2005-03-22
EP1315005A4 (fr) 2005-09-14
EP1315005B1 (fr) 2007-10-10
EP1315005A1 (fr) 2003-05-28

Similar Documents

Publication Publication Date Title
AU2001282547A1 (en) Method of forming optical thin film and optical element provided with optical thin film
AU4099299A (en) Optical film with defect-reducing surface and method for making same
AU2001288359A1 (en) Thin film battery and method of manufacture
AU2002221122A1 (en) Thin film forming method and thin film forming device
EP0969530A3 (fr) Composant pièzoélectrique à couches minces et méthode de fabrication
AU2002214372A1 (en) Thin film resonator and method for manufacturing the same
AU2001248832A1 (en) Optical film
AU1722799A (en) An optical film and process for manufacture thereof
AU2001244581A1 (en) Optical glass and optical element
AU2002320033A1 (en) Thin films and production methods thereof
AU2001247563A1 (en) Optical waveguide lens and method of fabrication
AU2003228268A1 (en) Improved polyvinyl alcohol film and method of producing the same
AU2002315102A1 (en) Thin film optical detectors for retinal implantation and methods for making and using same
AU2001255165A1 (en) Optical filtering device and method of making the same
AU1797301A (en) Method of stretching film and such film
AU2001241144A1 (en) Substrate with photocatalytic film and method for producing the same
AU2001271036A1 (en) Coated film and method of laminating the same
EP1286184A3 (fr) Procédé de fabrication d'un film semi-réfléchissant et élément optique avec un film semi-réfléchissant
AU2002229014A1 (en) Optical waveguides and method of fabrication thereof
EP1179436A3 (fr) Film de stratification et procédé de stratification l'utilisant
AU2001282934A1 (en) Composite nonlinear optical film, method of producing the same and applications of the same
AU2002321656A1 (en) Optical method measuring thin film growth
AU2002306649A1 (en) A method for making thick and/or thin film
AU2001269428A1 (en) Optical fiber positioning element at optical fiber bundling part in optical fiber type display and method of manufacture and optical fiber type display
AU2001296489A1 (en) Optical backplane and method of making same