AU2001233331A1 - Electrostatic actuator for microelectromechanical systems and methods of fabrication - Google Patents

Electrostatic actuator for microelectromechanical systems and methods of fabrication

Info

Publication number
AU2001233331A1
AU2001233331A1 AU2001233331A AU3333101A AU2001233331A1 AU 2001233331 A1 AU2001233331 A1 AU 2001233331A1 AU 2001233331 A AU2001233331 A AU 2001233331A AU 3333101 A AU3333101 A AU 3333101A AU 2001233331 A1 AU2001233331 A1 AU 2001233331A1
Authority
AU
Australia
Prior art keywords
fabrication
methods
electrostatic actuator
microelectromechanical systems
microelectromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001233331A
Inventor
Scott Adams
John Chong
Tim Davis
Chris Lee
Scott Miller
Kevin Shaw
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Calient Networks Inc
Original Assignee
Calient Networks Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Calient Networks Inc filed Critical Calient Networks Inc
Publication of AU2001233331A1 publication Critical patent/AU2001233331A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0068—Switches making use of microelectromechanical systems [MEMS] with multi dimensional movement, i.e. the movable actuator performing movements in at least two different directions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H67/00—Electrically-operated selector switches
    • H01H67/22—Switches without multi-position wipers
AU2001233331A 2000-02-03 2001-02-05 Electrostatic actuator for microelectromechanical systems and methods of fabrication Abandoned AU2001233331A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US17991200P 2000-02-03 2000-02-03
US60179912 2000-02-03
US09775491 2001-02-02
US09/775,491 US6753638B2 (en) 2000-02-03 2001-02-02 Electrostatic actuator for micromechanical systems
PCT/US2001/003760 WO2001057902A2 (en) 2000-02-03 2001-02-05 Electrostatic actuator for microelectromechanical systems and methods of fabrication

Publications (1)

Publication Number Publication Date
AU2001233331A1 true AU2001233331A1 (en) 2001-08-14

Family

ID=26875809

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001233331A Abandoned AU2001233331A1 (en) 2000-02-03 2001-02-05 Electrostatic actuator for microelectromechanical systems and methods of fabrication

Country Status (3)

Country Link
US (3) US6753638B2 (en)
AU (1) AU2001233331A1 (en)
WO (1) WO2001057902A2 (en)

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US7098571B2 (en) 2006-08-29
US7261826B2 (en) 2007-08-28
US20040246306A1 (en) 2004-12-09
US6753638B2 (en) 2004-06-22
US20020011759A1 (en) 2002-01-31
US20040245890A1 (en) 2004-12-09

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